Patents by Inventor Naotomo MARUYAMA

Naotomo MARUYAMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam device
    Patent number: 10192713
    Abstract: In a side entry type sample holder, vibrations in the radial direction of the sample holder provoke a resolving power decrease in the measurement results. In the present invention, the side entry type sample holder has a stepped portion in the radial direction of an axial portion. The sample stage has a support part contacting the stepped portion in a cylindrical portion capable of moving as one body in the axis direction of the sample holder, and, through the contact between the stepped portion and the support part, a frictional force is generated, opposing the radial direction of the axial portion in the sample holder. In this manner, the vibrations in the radial direction of the sample holder are suppressed, and the resolving power decrease in the measurement results is suppressed.
    Type: Grant
    Filed: December 7, 2015
    Date of Patent: January 29, 2019
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Kiyoshi Yabata, Hideki Kikuchi, Naotomo Maruyama
  • Charged Particle Beam Device
    Publication number: 20180269027
    Abstract: In a side entry type sample holder, vibrations in the radial direction of the sample holder provoke a resolving power decrease in the measurement results. In the present invention, the side entry type sample holder has a stepped portion in the radial direction of an axial portion. The sample stage has a support part contacting the stepped portion in a cylindrical portion capable of moving as one body in the axis direction of the sample holder, and, through the contact between the stepped portion and the support part, a frictional force is generated, opposing the radial direction of the axial portion in the sample holder. In this manner, the vibrations in the radial direction of the sample holder are suppressed, and the resolving power decrease in the measurement results is suppressed.
    Type: Application
    Filed: December 7, 2015
    Publication date: September 20, 2018
    Inventors: Kiyoshi YABATA, Hideki KIKUCHI, Naotomo MARUYAMA