Patents by Inventor Naoya Terada

Naoya Terada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Member having plasma-resistance for semiconductor manufacturing apparatus and method for producing the same
    Publication number: 20060178010
    Abstract: In order to control and reduce generation of disjoined grains from a plasma-resistant member, the present invention provides a plasma-resistant member having no pores and boundary layers. In a layer structure made of yttria polycrystal and formed on a surface of a member for a semiconductor manufacturing apparatus on a side exposed to plasma, the ratio of pores to the surface of the layer structure is less than 0.1 area %. With this, corrosion from pores never progresses even in a plasma atmosphere. It is also possible to control and reduce disjoined grains due to such corrosion.
    Type: Application
    Filed: March 23, 2006
    Publication date: August 10, 2006
    Applicant: TOTO LTD.
    Inventors: Junichi Iwasawa, Hironori Hatono, Naoya Terada, Yuji Aso, Masakatsu Kiyohara
  • Member having plasma-resistance for semiconductor manufacturing apparatus and method for producing the same
    Publication number: 20060159946
    Abstract: In order to control and reduce generation of disjoined grains from a plasma-resistant member, the present invention provides a plasma-resistant member having no pores and boundary layers. In a layer structure made of yttria polycrystal and formed on a surface of a member for a semiconductor manufacturing apparatus on a side exposed to plasma, substantially no hyaline boundary layer exists in the yttria polycrystal. With this, corrosion from a boundary layer never progresses even in a plasma atmosphere. It is also possible to control and reduce disjoined grains due to such corrosion.
    Type: Application
    Filed: November 21, 2005
    Publication date: July 20, 2006
    Applicant: TOTO LTD.
    Inventors: Junichi Iwasawa, Hironori Hatono, Naoya Terada, Yuji Aso, Masakatsu Kiyohara