Abstract: A substrate processing apparatus includes: a processing chamber; a substrate holder that is disposed in the processing chamber and holds a substrate; a processing liquid supply that supplies a processing liquid to the substrate held in the substrate holder; an infrared camera that acquires an infrared image of the processing chamber; and a controller that detects at least a state of the processing liquid based on the infrared image and monitors presence/absence of an abnormality.

Abstract: A ceiling unit includes a first side beam supported by at least one of a plurality of upright columns erected on a floor plate of an elevator car, a second side beam supported parallel to the first side beam by a different upright column, among the plurality of upright columns, from the upright column supporting the first side beam, a rear beam that connects respective rear side end portions of the first and second side beams, and a ceiling plate supported by the first and second side beams and the rear beam.

Abstract: An elevator car upper handrail apparatus, in which a connecting body is provided between respective ends of first and second side handrails on a landing side. The connecting body includes an opening/closing member which is rotatable between a closed position, in which a path for movement of a worker from a landing to a car upper surface is closed by the opening/closing member, and an open position, in which the path for movement is opened by the opening/closing member. The opening/closing member is configured to return automatically to the closed position. When the opening/closing member is in the closed position, the connecting body transmits an external force applied to one of the first and second side handrails in the width direction of a car to the other of the first and second side handrails.

Abstract: An elevator car upper handrail apparatus, in which a connecting body is provided between respective ends of first and second side handrails on a landing side. The connecting body includes an opening/closing member which is rotatable between a closed position, in which a path for movement of a worker from a landing to a car upper surface is closed by the opening/closing member, and an open position, in which the path for movement is opened by the opening/closing member. The opening/closing member is configured to return automatically to the closed position. When the opening/closing member is in the closed position, the connecting body transmits an external force applied to one of the first and second side handrails in the width direction of a car to the other of the first and second side handrails.

Abstract: Provided is a sound absorbing panel that can satisfy the heat resistance properties and melting/dripping resistance properties required inside of a railway vehicle. A pier sound absorbing panel includes five sheets of first through fifth glass cloths that are stacked on an aluminum base plate. The edge section of the fifth glass cloth is affixed to the rear surface of the base plate using an adhesive, and the first through fourth glass cloths are fastened using staples. In other words, the first glass cloth and the base plate are fixed using an adhesive, and this adhesive is prevented from melting by the five sheets of the first through fifth glass cloths. The adhesive that fixes the edge section of the fifth glass cloth at the other surface of the base plate is prevented from melting by the five sheets of the first through fifth glass cloths and the base plate.

Abstract: A ceiling unit includes a first side beam supported by at least one of a plurality of upright columns erected on a floor plate of an elevator car, a second side beam supported parallel to the first side beam by a different upright column, among the plurality of upright columns, from the upright column supporting the first side beam, a rear beam that connects respective rear side end portions of the first and second side beams, and a ceiling plate supported by the first and second side beams and the rear beam.

Abstract: In an elevator apparatus, a hoisting machine includes a driving sheave, and a motor portion that rotates the driving sheave, and is disposed in an upper portion inside a hoistway. A suspending unit is wound sequentially around a first car suspending sheave, a second car suspending sheave, the driving sheave, and a counterweight suspending sheave. The second car suspending sheave, the driving sheave, and the counterweight suspending sheave are disposed on a first side of a car guide rail center line that connects first and second car guide rails when viewed from directly above. A portion of the motor portion is disposed between a back surface of the second car guide rail and a hoistway wall. The driving sheave is disposed so as to overlap with the second car guide rail when viewed from a landing side.

Abstract: An underslung elevator includes: a suspending sheave assembly disposed on a lower portion of a car floor, the suspending sheave assembly being configured such that suspending sheaves are each supported rotatably between two longitudinal end portions of a pair of suspending sheave beams; and rubber vibration isolators disposed between a car frame lower beam and the suspending sheave assembly. The suspending sheaves are supported on the pair of suspending sheave beams such that portions thereof protrude upward beyond the pair of suspending sheave beams, and the rubber vibration isolators are disposed to be positioned vertically above shafts of the suspending sheaves when viewed from an axial direction of each of the suspending sheaves, and to be positioned on opposite sides of each of the suspending sheaves when viewed from vertically above.

Abstract: An underslung elevator includes: a suspending sheave assembly disposed on a lower portion of a car floor, the suspending sheave assembly being configured such that suspending sheaves are each supported rotatably between two longitudinal end portions of a pair of suspending sheave beams; and rubber vibration isolators disposed between a car frame lower beam and the suspending sheave assembly. The suspending sheaves are supported on the pair of suspending sheave beams such that portions thereof protrude upward beyond the pair of suspending sheave beams, and the rubber vibration isolators are disposed to be positioned vertically above shafts of the suspending sheaves when viewed from an axial direction of each of the suspending sheaves, and to be positioned on opposite sides of each of the suspending sheaves when viewed from vertically above.

Abstract: Provided is a sound absorbing panel that can satisfy the heat resistance properties and melting/dripping resistance properties required inside of a railway vehicle. A pier sound absorbing panel includes five sheets of first through fifth glass cloths that are stacked on an aluminum base plate. The edge section of the fifth glass cloth is affixed to the rear surface of the base plate using an adhesive, and the first through fourth glass cloths are fastened using staples. In other words, the first glass cloth and the base plate are fixed using an adhesive, and this adhesive is prevented from melting by the five sheets of the first through fifth glass cloths. The adhesive that fixes the edge section of the fifth glass cloth at the other surface of the base plate is prevented from melting by the five sheets of the first through fifth glass cloths and the base plate.

Abstract: In an elevator apparatus, a hoisting machine includes a driving sheave, and a motor portion that rotates the driving sheave, and is disposed in an upper portion inside a hoistway. A suspending unit is wound sequentially around a first car suspending sheave, a second car suspending sheave, the driving sheave, and a counterweight suspending sheave. The second car suspending sheave, the driving sheave, and the counterweight suspending sheave are disposed on a first side of a car guide rail center line that connects first and second car guide rails when viewed from directly above. A portion of the motor portion is disposed between a back surface of the second car guide rail and a hoistway wall. The driving sheave is disposed so as to overlap with the second car guide rail when viewed from a landing side.

Abstract: In a safety system for an elevator, slip detection means detects a slip between a drive sheave and a main rope. A safety gear is mounted to a car, the safety gear being electrically operated by an actuator to cause the car to make an emergency stop regardless of whether a running direction of the car is upward or downward. A safety gear controller cuts power supply to a hoisting machine motor and causes the safety gear to make a braking operation upon detection of the slip between the drive sheave and the main rope by the slip detection means.