Patents by Inventor Naoyuki Nozawa
Naoyuki Nozawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10738380Abstract: A deposition apparatus includes a chamber, a holding unit configured to hold a substrate in the chamber, a driving unit configured to move the holding unit holding the substrate such that the substrate passes through a deposition area in the chamber, a deposition unit configured to form a film on the substrate passing through the deposition area by supplying a deposition material to the deposition area, and a cooling unit configured to cool the holding unit.Type: GrantFiled: April 6, 2017Date of Patent: August 11, 2020Assignee: CANON ANELVA CORPORATIONInventors: Naoyuki Nozawa, Nobuo Matsuki, Reiji Sakamoto, Masahito Ishihara
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Patent number: 9896760Abstract: A deposition apparatus comprises a source unit configured to generate a plasma by arc discharge, a deposition unit in which a deposition target material is arranged so as to be irradiated with the plasma generated in the source unit, and an induction unit configured to induce the plasma for the source unit to the deposition unit. The induction unit comprises a partition unit airtightly connected to each of the source unit and the deposition unit and configured to pass the plasma inside, and a plurality of magnet units configured to form a magnetic field to induce the plasma in the partition unit. The plurality of magnet units are connected to adjust a connection angle, and the partition unit includes a tubular member bendable according to the connection angle of the plurality of magnet units.Type: GrantFiled: November 4, 2015Date of Patent: February 20, 2018Assignee: CANON ANELVA CORPORATIONInventors: Hidekazu Nishimura, Naoyuki Nozawa
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Publication number: 20170211179Abstract: A deposition apparatus includes a chamber, a holding unit configured to hold a substrate in the chamber, a driving unit configured to move the holding unit holding the substrate such that the substrate passes through a deposition area in the chamber, a deposition unit configured to form a film on the substrate passing through the deposition area by supplying a deposition material to the deposition area, and a cooling unit configured to cool the holding unit.Type: ApplicationFiled: April 6, 2017Publication date: July 27, 2017Applicant: CANON ANELVA CORPORATIONInventors: Naoyuki NOZAWA, Nobuo MATSUKI, Reiji SAKAMOTO, Masahito ISHIHARA
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Patent number: 9346171Abstract: A substrate transport apparatus including a first substrate holder and a second substrate holder capable of respectively holding substrates includes a first drive arm which has first and second end portions, and is rotatable with rotation of a first drive shaft, a second drive arm which has a third end portion spaced apart from the first end portion by a first distance, and a fourth end portion spaced apart from the second end portion by a second distance, and is rotatable with rotation of a second drive shaft coaxial with the first drive shaft, two first driven arms coupled to the first substrate holder, and two second driven arms coupled to the second substrate holder.Type: GrantFiled: January 29, 2013Date of Patent: May 24, 2016Assignee: CANON ANELVA CORPORATIONInventors: Kazuhito Watanabe, Yukihito Tashiro, Satoshi Nakamura, Daisuke Kobinata, Toshiaki Sasaki, Naoyuki Nozawa
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Publication number: 20160130700Abstract: A deposition apparatus comprises a source unit configured to generate a plasma by arc discharge, a deposition unit in which a deposition target material is arranged so as to be irradiated with the plasma generated in the source unit, and an induction unit configured to induce the plasma for the source unit to the deposition unit. The induction unit comprises a partition unit airtightly connected to each of the source unit and the deposition unit and configured to pass the plasma inside, and a plurality of magnet units configured to form a magnetic field to induce the plasma in the partition unit. The plurality of magnet units are connected to adjust a connection angle, and the partition unit includes a tubular member bendable according to the connection angle of the plurality of magnet units.Type: ApplicationFiled: November 4, 2015Publication date: May 12, 2016Applicant: CANON ANELVA CORPORATIONInventors: Hidekazu NISHIMURA, Naoyuki NOZAWA
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Patent number: 8912697Abstract: A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other.Type: GrantFiled: December 21, 2010Date of Patent: December 16, 2014Assignee: Canon Anelva CorporationInventors: Kazuhito Watanabe, Yukihito Tashiro, Naoyuki Nozawa, Daisuke Kobinata, Hideo Mano
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Patent number: 8534975Abstract: A substrate transport apparatus comprises chambers connected to each other through a gate valve, a transport mechanism configured to open the gate valve and to transport a carrier between the chambers along a transport path, a sensor configured to detect the carrier before the carrier reaches a stop position in the chamber, and a controller configured to cause the gate valve to start closing based on the detection signal from the sensor.Type: GrantFiled: October 22, 2009Date of Patent: September 17, 2013Assignee: Canon Anelva CorporationInventors: Itaru Hagiwara, Naoyuki Nozawa
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Publication number: 20120014770Abstract: A substrate conveyance apparatus includes a first driving shaft, an arm portion having one end connected to the first driving shaft, a substrate holding unit capable of holding a substrate, and a connecting portion that connects the other end of the arm portion and the substrate holding unit. The connecting portion includes a rotating support portion that supports the substrate holding unit rotatably with respect to the arm portion, and a moving unit that moves the substrate holding unit upward or downward with respect to the arm portion in the direction of the rotating shaft about which the substrate holding unit is rotated by the rotating support portion.Type: ApplicationFiled: July 14, 2011Publication date: January 19, 2012Applicant: CANON ANELVA CORPORATIONInventors: Kazuhito Watanabe, Yukihito Tashiro, Naoyuki Nozawa, Daisuke Kobinata
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Publication number: 20110315346Abstract: The present invention provides a cooling apparatus capable of improving a cooling efficiency and realizing a high speed cooling process. The present invention also provides a heating apparatus capable of improving a heating efficiency of a substrate and heating the substrate at high speed.Type: ApplicationFiled: April 26, 2011Publication date: December 29, 2011Applicant: CANON ANELVA CORPORATIONInventors: Hidekazu Nishimura, Kazuyuki Majima, Junichi Kitagawa, Naoyuki Nozawa
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Publication number: 20110156514Abstract: A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other.Type: ApplicationFiled: December 21, 2010Publication date: June 30, 2011Applicant: CANON ANELVA CORPORATIONInventors: Kazuhito WATANABE, Yukihito TASHIRO, Naoyuki NOZAWA, Daisuke KOBINATA, Hideo MANO
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Patent number: 7770714Abstract: A transfer apparatus includes a first magnetic member placed in a carrier, and a second magnetic member placed in a carrier supporting unit to oppose the first magnetic member from a position below the first magnetic member in the vertical direction, and having the same polarity as that of the first magnetic member. The repulsive force generated between the first and second magnetic members vertically pushes up the carrier, thereby reducing the weight of the carrier supported by the carrier supporting unit.Type: GrantFiled: August 20, 2008Date of Patent: August 10, 2010Assignee: Canon Anelva CorporationInventors: Naoyuki Nozawa, Hiroshi Sone, Satoshi Hitomi, Yoshiro Hasegawa
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Publication number: 20100101075Abstract: A substrate transport apparatus comprises chambers connected to each other through a gate valve, a transport mechanism configured to open the gate valve and to transport a carrier between the chambers along a transport path, a sensor configured to detect the carrier before the carrier reaches a stop position in the chamber, and a controller configured to cause the gate valve to start closing based on the detection signal from the sensor.Type: ApplicationFiled: October 22, 2009Publication date: April 29, 2010Applicant: CANON ANELVA CORPORATIONInventors: Itaru HAGIWARA, Naoyuki Nozawa
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Publication number: 20090308317Abstract: The peeling-off of a deposited film caused by a carrier is restrained, and the exchange period of the carrier is prolonged. In a carrier 1 including a slider 7 having a mechanism for conveying a substrate holder 3 that supports a substrate 2, a deposition shield 20a, 20b that can cover the substrate holder 3 and has an opening equivalent to or larger than the substrate 2 on which a film is formed is installed on both surfaces of the substrate holder 3. At this time, the substrate holder 3, supporting claws 4, and fixing parts 6 are arranged so as to be hidden by the deposition shield 20. In a film forming chamber, to form a predetermined film on the substrate 2, the carrier 1 covered by the deposition shield 20 is exposed to a plasma space in the film forming chamber, and the film is formed. The deposition of film onto the substrate holder 3, the supporting claws 4, and the fixing parts 6 that are covered by the deposition shield 20 can be restrained.Type: ApplicationFiled: May 20, 2009Publication date: December 17, 2009Applicant: CANON ANELVA CORPORATIONInventors: Hiroshi Sone, Shinya Houman, Naoyuki Nozawa, Yoshiro Hasegawa
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Publication number: 20090056878Abstract: A transfer apparatus includes a first magnetic member placed in a carrier, and a second magnetic member placed in a carrier supporting unit to oppose the first magnetic member from a position below the first magnetic member in the vertical direction, and having the same polarity as that of the first magnetic member. The repulsive force generated between the first and second magnetic members vertically pulls up the carrier, thereby reducing the weight of the carrier supported by the carrier supporting unit.Type: ApplicationFiled: August 20, 2008Publication date: March 5, 2009Applicant: CANON ANELVA CORPORATIONInventors: Naoyuki Nozawa, Hiroshi Sone, Satoshi Hitomi, Yoshiro Hasegawa
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Patent number: 6660089Abstract: A substrate support mechanism of the present invention, which holds the inner rim of a disc substrate having an opening at its center, comprises: a hollow cylindrical member; a central shaft having a tapered portion disposed in the cylindrical member so as to be axially pushed by a first spring; and a plurality of radially movable members, each of which is pushed inwardly by a second spring and has a click to grip the inner rim; whereby the axial motion of the central shaft is converted by the tapered portion to the radial motion of said radially movable members to grip and release said substrate. A substrate rotation device includes a mechanism for axially moving the cylindrical member; a mechanism for axially moving the central shaft; and a mechanism for rotating the cylindrical member in addition to the substrate support mechanism.Type: GrantFiled: January 31, 2001Date of Patent: December 9, 2003Assignee: Anelva CorporationInventors: Naoyuki Nozawa, Terushige Takeyama, Miho Sakai
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Publication number: 20010010256Abstract: A substrate support mechanism of the present invention, which holds the inner rim of a disc substrate having an opening at its center, comprises: a hollow cylindrical member; a central shaft having a tapered portion disposed in the cylindrical member so as to be axially pushed by a first spring; and a plurality of radially movable members, each of which is pushed inwardly by a second spring and has a click to grip the inner rim; whereby the axial motion of the central shaft is converted by the tapered portion to the radial motion of said radially movable members to grip and release said substrate.Type: ApplicationFiled: January 31, 2001Publication date: August 2, 2001Inventors: Naoyuki Nozawa, Terushige Takeyama, Miho Sakai
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Patent number: 6202592Abstract: A substrate holder for holding a circular substrate in a vertical position during processing of the substrate. The substrate holder is provided with a vertical base plate and three support claws which are mounted on the base plate and which hold the peripheral edge of a substrate. One of the three support claws is a fixed support claw which holds the edge of the substrate at the bottom to support and whose position does not change when the weight of the substrate is supported. The other two support claws are moveable and may be actuated to hold the edge of the substrate at its sides to restrain motion of the substrate. The moveable support claws can be opened and closed for substrate mounting and removal. The two movable support claws are installed on the base plate in a manner so that when the substrate is supported by the fixed support claw they contact the side edge at locations which are higher than the height of the center of the substrate.Type: GrantFiled: November 24, 1999Date of Patent: March 20, 2001Assignee: Anelva CorporationInventors: Naoyuki Nozawa, Yoshiro Hasegawa
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Patent number: 6030455Abstract: A substrate holder for holding a circular substrate in a vertical position during processing of the substrate. The substrate holder is provided with a vertical base plate and three support claws which are mounted on the base plate and which hold the peripheral edge of a substrate. One of the three support claws is a fixed support claw which holds the edge of the substrate at the bottom to support and whose position does not change when the weight of the substrate is supported. The other two support claws are moveable and may be actuated to hold the edge of the substrate at its sides to restrain motion of the substrate. The moveable support claws can be opened and closed for substrate mounting and removal. The two movable support claws are installed on the base plate in a manner so that when the substrate is supported by the fixed support claw they contact the side edge at locations which are higher than the height of the center of the substrate.Type: GrantFiled: July 27, 1998Date of Patent: February 29, 2000Assignee: Anelva CorporationInventors: Naoyuki Nozawa, Yoshiro Hasegawa
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Patent number: 5976255Abstract: A substrate holder to support a substrate in a vertical position in a substrate processing device that performs a process on the substrate, where the process involves forming a plasma in the space around the substrate. The substrate holder includes a base plate and a plurality of supporting claws that are attached to the base plate and arranged so as to come into contact with the outer edge of the substrate and provide vertical support for the substrate. At least one of the plurality of supporting claws is a movable supporting claw that can be brought into contact with and separated from the outer edge of the substrate. When a substrate has been loaded into the holder, the space around the substrate is substantially filled by the base plate or by a member attached to the base plate.Type: GrantFiled: August 25, 1998Date of Patent: November 2, 1999Assignee: Anelva CorporationInventors: Kurita Takaki, Naoyuki Nozawa, Yoshiro Hasegawa