Patents by Inventor Naoyuki Osada
Naoyuki Osada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11260436Abstract: The substrate processing apparatus includes common piping which guides a processing liquid to a branching portion, supply piping which guides the processing liquid from the branching portion to a chemical liquid nozzle, return piping which guides the processing liquid from the branching portion, and a discharge valve which changes a flow rate of the processing liquid supplied from the common piping to the branching portion. The discharge valve makes a valve element stationary at a plurality of positions including a discharge execution position at which the processing liquid is supplied from the common piping to the branching portion at a flow rate larger than a maximum value of a suction flow rate and a discharge stop position at which the processing liquid is supplied from the common piping to the branching portion at a flow rate smaller than the maximum value of the suction flow rate.Type: GrantFiled: May 28, 2020Date of Patent: March 1, 2022Inventors: Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Akihisa Iwasaki, Ayumi Higuchi, Shota Iwahata
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Patent number: 10790169Abstract: A discharge port 31 is arranged inside a chamber 9. A circulation flow passage 50 circulates a processing liquid, while maintaining the processing liquid at a predetermined temperature. A discharge flow passage 32 is branched from a circulation flow passage 50 to guide the processing liquid to the discharge port 31. A return flow passage 33 is connected to the discharge flow passage 32 inside the chamber 9 and allows the processing liquid running through the discharge flowpassage 32 to flow back to the circulation flow passage 50.Type: GrantFiled: January 10, 2018Date of Patent: September 29, 2020Assignee: SCREEN Holdings Co., Ltd.Inventors: Naoyuki Osada, Koji Hashimoto
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Publication number: 20200290101Abstract: The substrate processing apparatus includes common piping which guides a processing liquid to a branching portion, supply piping which guides the processing liquid from the branching portion to a chemical liquid nozzle, return piping which guides the processing liquid from the branching portion, and a discharge valve which changes a flow rate of the processing liquid supplied from the common piping to the branching portion. The discharge valve makes a valve element stationary at a plurality of positions including a discharge execution position at which the processing liquid is supplied from the common piping to the branching portion at a flow rate larger than a maximum value of a suction flow rate and a discharge stop position at which the processing liquid is supplied from the common piping to the branching portion at a flow rate smaller than the maximum value of the suction flow rate.Type: ApplicationFiled: May 28, 2020Publication date: September 17, 2020Inventors: Naoyuki OSADA, Takahiro YAMAGUCHI, Eri FUJITA, Akihisa IWASAKI, Ayumi HIGUCHI, Shota IWAHATA
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Patent number: 10717117Abstract: The substrate processing apparatus includes common piping which guides a processing liquid to a branching portion, supply piping which guides the processing liquid from the branching portion to a chemical liquid nozzle, return piping which guides the processing liquid from the branching portion, and a discharge valve which changes a flow rate of the processing liquid supplied from the common piping to the branching portion. The discharge valve makes a valve element stationary at a plurality of positions including a discharge execution position at which the processing liquid is supplied from the common piping to the branching portion at a flow rate larger than a maximum value of a suction flow rate and a discharge stop position at which the processing liquid is supplied from the common piping to the branching portion at a flow rate smaller than the maximum value of the suction flow rate.Type: GrantFiled: January 19, 2018Date of Patent: July 21, 2020Assignee: SCREEN Holdings Co., Ltd.Inventors: Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Akihisa Iwasaki, Ayumi Higuchi, Shota Iwahata
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Patent number: 10395952Abstract: A substrate processing apparatus includes a processing liquid distributing member that partitions, by an inner wall surface, at least part of a processing liquid distribution passage communicating with a discharge port, a processing liquid supplying unit that supplies the high-temperature processing liquid having a higher temperature than a room temperature to the processing liquid distribution passage, a temperature changing unit arranged to heat or cool an outer wall surface of the processing liquid distributing member from the outside to change a temperature of the processing liquid distributing member, and a controller that executes an equilibrium temperature maintaining step of maintaining the inner wall surface of the processing liquid distributing member at a thermal equilibrium temperature by controlling the temperature changing unit in a state where no processing liquid is supplied from the processing liquid supplying unit to the processing liquid distribution passage.Type: GrantFiled: February 22, 2018Date of Patent: August 27, 2019Assignee: SCREEN Holdings Co., Ltd.Inventors: Koji Hashimoto, Naoyuki Osada
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Publication number: 20180277399Abstract: A substrate processing apparatus includes a processing liquid distributing member that partitions, by an inner wall surface, at least part of a processing liquid distribution passage communicating with a discharge port, a processing liquid supplying unit that supplies the high-temperature processing liquid having a higher temperature than a room temperature to the processing liquid distribution passage, a temperature changing unit arranged to heat or cool an outer wall surface of the processing liquid distributing member from the outside to change a temperature of the processing liquid distributing member, and a controller that executes an equilibrium temperature maintaining step of maintaining the inner wall surface of the processing liquid distributing member at a thermal equilibrium temperature by controlling the temperature changing unit in a state where no processing liquid is supplied from the processing liquid supplying unit to the processing liquid distribution passage.Type: ApplicationFiled: February 22, 2018Publication date: September 27, 2018Inventors: Koji HASHIMOTO, Naoyuki OSADA
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Publication number: 20180277398Abstract: A discharge port 31 is arranged inside a chamber 9. A circulation flow passage 50 circulates a processing liquid, while maintaining the processing liquid at a predetermined temperature. A discharge flow passage 32 is branched from a circulation flow passage 50 to guide the processing liquid to the discharge port 31. A return flow passage 33 is connected to the discharge flow passage 32 inside the chamber 9 and allows the processing liquid running through the discharge flowpassage 32 to flow back to the circulation flow passage 50.Type: ApplicationFiled: January 10, 2018Publication date: September 27, 2018Inventors: Naoyuki OSADA, Koji HASHIMOTO
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Publication number: 20180236510Abstract: The substrate processing apparatus includes common piping which guides a processing liquid to a branching portion, supply piping which guides the processing liquid from the branching portion to a chemical liquid nozzle, return piping which guides the processing liquid from the branching portion, and a discharge valve which changes a flow rate of the processing liquid supplied from the common piping to the branching portion. The discharge valve makes a valve element stationary at a plurality of positions including a discharge execution position at which the processing liquid is supplied from the common piping to the branching portion at a flow rate larger than a maximum value of a suction flow rate and a discharge stop position at which the processing liquid is supplied from the common piping to the branching portion at a flow rate smaller than the maximum value of the suction flow rate.Type: ApplicationFiled: January 19, 2018Publication date: August 23, 2018Inventors: Naoyuki OSADA, Takahiro YAMAGUCHI, Eri FUJITA, Akihisa IWASAKI, Ayumi HIGUCHI, Shota IWAHATA
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Patent number: 9802227Abstract: A spin base is caused to rotate at a number of revolutions of from 250 rpm to 350 rpm (first number of revolutions), and at the same time, a cleaning solution is supplied through a discharge head to a holding surface of a spin base while the upper end of a processing cup surrounding the spin base is placed below the holding surface. Thus, an outer upper surface of the processing cup is cleaned with the cleaning solution scattered from the holding surface. Then, the spin base is caused to rotate at a number of revolutions of from 350 rpm to 450 rpm (second number of revolutions) higher than the first number of revolutions, and at the same time, a cleaning solution is supplied through the discharge head onto the holding surface. Thus, a partition plate outside the processing cup is cleaned with the cleaning solution scattered from the rotating holding surface.Type: GrantFiled: September 30, 2015Date of Patent: October 31, 2017Assignee: SCREEN Holdings Co., Ltd.Inventors: Naoyuki Osada, Kentaro Sugimoto
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Patent number: 9740648Abstract: A valve control unit includes a data reading/selecting unit, which reads each of signals transmitted onto a serial bus, and selects a flow rate data signal from among the read signals. Therefore, the valve control unit can acquire the flow rate data signal from the serial bus without allowing the flow rate data signal to pass via the master IC. As a result, it is made possible to ensure real time properties of feedback control, which adjusts a needle valve based on a measurement result of a flowmeter, while reducing a load applied to a CPU that controls the master IC. Moreover, it is not necessary to provide an additional instrument for transferring analog signals between slave devices, and accordingly, a size increase and cost increase of an apparatus can be suppressed.Type: GrantFiled: January 13, 2015Date of Patent: August 22, 2017Assignee: SCREEN Holdings Co., Ltd.Inventors: Takuya Miyashita, Satoshi Segawa, Naoyuki Osada
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Patent number: 9378988Abstract: Nozzle arms for holding discharge heads are caused by a pivotal driving part to move between a processing position above a substrate and a standby position outside a processing cup surrounding a substrate. When the nozzle arms having cleaned a substrate is placed at the standby position, a cleaning solution is ejected from a shower nozzle toward the nozzle arms arranged obliquely downward of the shower nozzle. The three nozzle arms are caused to move up and down such that the nozzle arms cut across a jet of a cleaning solution discharged obliquely downward, thereby cleaning the three nozzle arms in order. Then, a nitrogen gas is ejected from a drying gas nozzle and sprayed on the nozzle arms to remove the cleaning solution attached to the nozzle arms, thereby drying the nozzle arms.Type: GrantFiled: July 2, 2012Date of Patent: June 28, 2016Assignee: SCREEN Holdings Co., Ltd.Inventors: Naoyuki Osada, Kentaro Sugimoto
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Publication number: 20160016206Abstract: A spin base is caused to rotate at a number of revolutions of from 250 rmp to 350 rpm (first number of revolutions), and at the same time, a cleaning solution is supplied through a discharge head to a holding surface of a spin base while the upper end of a processing cup surrounding the spin base is placed below the holding surface. Thus, an outer upper surface of the processing cup is cleaned with the cleaning solution scattered from the holding surface. Then, the spin base is caused to rotate at a number of revolutions of from 350 rpm to 450 rpm (second number of revolutions) higher than the first number of revolutions, and at the same time, a cleaning solution is supplied through the discharge head onto the holding surface. Thus, a partition plate outside the processing cup is cleaned with the cleaning solution scattered from the rotating holding surface.Type: ApplicationFiled: September 30, 2015Publication date: January 21, 2016Inventors: Naoyuki OSADA, Kentaro SUGIMOTO
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Patent number: 9190300Abstract: A spin base is caused to rotate at a number of revolutions of from 250 rmp to 350 rpm (first number of revolutions), and at the same time, a cleaning solution is supplied to a holding surface of a spin base while the upper end of a processing cup is placed below the holding surface. Thus, an outer upper surface of the processing cup is cleaned with the cleaning solution scattered from the holding surface. Then, the spin base is caused to rotate at a number of revolutions of from 350 rpm to 450 rpm (second number of revolutions) higher than the first number of revolutions, and at the same time, a cleaning solution is supplied onto the holding surface. Thus, a partition plate outside the processing cup is cleaned with the cleaning solution scattered from the rotating holding surface.Type: GrantFiled: April 19, 2012Date of Patent: November 17, 2015Assignee: SCREEN Holdings Co., Ltd.Inventors: Naoyuki Osada, Kentaro Sugimoto
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Publication number: 20150220468Abstract: A valve control unit includes a data reading/selecting unit, which reads each of signals transmitted onto a serial bus, and selects a flow rate data signal from among the read signals. Therefore, the valve control unit can acquire the flow rate data signal from the serial bus without allowing the flow rate data signal to pass via the master IC. As a result, it is made possible to ensure real time properties of feedback control, which adjusts a needle valve based on a measurement result of a flowmeter, while reducing a load applied to a CPU that controls the master IC. Moreover, it is not necessary to provide an additional instrument for transferring analog signals between slave devices, and accordingly, a size increase and cost increase of an apparatus can be suppressed.Type: ApplicationFiled: January 13, 2015Publication date: August 6, 2015Inventors: Takuya MIYASHITA, Satoshi SEGAWA, Naoyuki OSADA
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Patent number: 9027577Abstract: A nozzle of a nozzle device includes an arm pipe that extends in a horizontal direction and a downstream pipe formed so as to curve downward from one end of the arm pipe. In the nozzle, a metallic pipe is provided inside a second resin pipe. Moreover, a first resin pipe is provided inside the metallic pipe. A boss is attached to the tip of the metallic pipe between the first resin pipe and the second resin pipe. At the tip of the nozzle, an outer peripheral surface of the first resin pipe, an end surface of the second resin pipe and an end surface of the boss are welded by welding resin. In this way, the metallic pipe is reliably coated with the first resin pipe, the second resin pipe, the boss and the welding resin.Type: GrantFiled: October 12, 2007Date of Patent: May 12, 2015Assignee: Screen Holdings Co., Ltd.Inventors: Naoyuki Osada, Masashi Sawamura, Koji Hasegawa
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Publication number: 20130020284Abstract: Nozzle arms for holding discharge heads are caused by a pivotal driving part to move between a processing position above a substrate and a standby position outside a processing cup surrounding a substrate. When the nozzle arms having cleaned a substrate is placed at the standby position, a cleaning solution is ejected from a shower nozzle toward the nozzle arms arranged obliquely downward of the shower nozzle. The three nozzle arms are caused to move up and down such that the nozzle arms cut across a jet of a cleaning solution discharged obliquely downward, thereby cleaning the three nozzle arms in order. Then, a nitrogen gas is ejected from a drying gas nozzle and sprayed on the nozzle arms to remove the cleaning solution attached to the nozzle arms, thereby drying the nozzle arms.Type: ApplicationFiled: July 2, 2012Publication date: January 24, 2013Inventors: Naoyuki OSADA, Kentaro SUGIMOTO
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Publication number: 20120273011Abstract: A spin base is caused to rotate at a number of revolutions of from 250 rmp to 350 rpm (first number of revolutions), and at the same time, a cleaning solution is supplied to a holding surface of a spin base while the upper end of a processing cup is placed below the holding surface. Thus, an outer upper surface of the processing cup is cleaned with the cleaning solution scattered from the holding surface. Then, the spin base is caused to rotate at a number of revolutions of from 350 rpm to 450 rpm (second number of revolutions) higher than the first number of revolutions, and at the same time, a cleaning solution is supplied onto the holding surface. Thus, a partition plate outside the processing cup is cleaned with the cleaning solution scattered from the rotating holding surface.Type: ApplicationFiled: April 19, 2012Publication date: November 1, 2012Inventors: Naoyuki OSADA, Kentaro SUGIMOTO
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Publication number: 20080251107Abstract: A nozzle of a nozzle device includes an arm pipe that extends in a horizontal direction and a downstream pipe formed so as to curve downward from one end of the arm pipe. In the nozzle, a metallic pipe is provided inside a second resin pipe. Moreover, a first resin pipe is provided inside the metallic pipe. A boss is attached to the tip of the metallic pipe between the first resin pipe and the second resin pipe. At the tip of the nozzle, an outer peripheral surface of the first resin pipe, an end surface of the second resin pipe and an end surface of the boss are welded by welding resin. In this way, the metallic pipe is reliably coated with the first resin pipe, the second resin pipe, the boss and the welding resin.Type: ApplicationFiled: October 12, 2007Publication date: October 16, 2008Inventors: Naoyuki OSADA, Masashi SAWAMURA, Koji HASEGAWA
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Patent number: 5962070Abstract: A substrate treating method and apparatus for treating a substrate by supplying a developing solution thereto while spinning the substrate. A nozzle having a plurality of discharge openings for discharging the developer is disposed such that the discharge openings are at different distances from the spin center of the substrate. The developer is discharged from the nozzle while the latter is moved radially of the substrate. The discharge openings then describe loci not overlapping one another over the substrate. The developer is evenly supplied over the substrate to promote the uniformity of development on the substrate surface.Type: GrantFiled: September 8, 1998Date of Patent: October 5, 1999Assignee: Dainippon Screen MFG. Co., Ltd.Inventors: Tsuyoshi Mitsuhashi, Takuya Wada, Koji Hashimoto, Naoyuki Osada