Patents by Inventor Naoyuki Suzuki
Naoyuki Suzuki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11939665Abstract: A film thickness measurement apparatus includes: a stage that places a substrate having a film formed thereon and measures a thickness of the film in-situ in a film forming apparatus; a film thickness meter including a light emitter that emits light toward the substrate disposed on the stage and a light receiving sensor that receives the light reflected by the substrate for measuring the thickness of the film in-situ; a moving mechanism including a multi-joint arm that moves an irradiation point of the light on the substrate; a distance meter that measures a distance between the light receiving sensor and the irradiation point on the substrate; and a distance adjustor that adjusts the distance between the light receiving sensor and the irradiation point on the substrate.Type: GrantFiled: February 24, 2021Date of Patent: March 26, 2024Assignee: TOKYO ELECTRON LIMTEDInventors: Masato Shinada, Tamaki Takeyama, Kazunaga Ono, Naoyuki Suzuki, Hiroaki Chihaya, Einstein Noel Abarra
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Publication number: 20240085847Abstract: An image forming apparatus includes plural image holding bodies that are provided for respective colors of toners and hold toner images having the respective colors, an intermediate transfer body onto which the toner images having the respective colors held by the plural image holding bodies are transferred, a waste toner collection unit that collects toners remaining on the intermediate transfer body as a waste toner in a case where the toner images having the respective colors transferred onto the intermediate transfer body are transferred onto a recording material, a waste toner developing unit that uses the waste toner collected by the waste toner collection unit to develop a toner image on an image holding body of the plural image holding bodies or the other image holding body of the plural image holding bodies, and a control unit that performs a control to cause the waste toner developing unit to develop the toner image in a case where a predetermined condition about a ratio of a waste toner having eachType: ApplicationFiled: March 23, 2023Publication date: March 14, 2024Applicant: FUJIFILM Business Innovation Corp.Inventors: Tatsuya KOYAMA, Ryo WAKAMATSU, Kenta TSUKAHIRA, Kenji SUZUKI, Kazutaka SHIBANO, Daiki KATO, Naoyuki KURITA
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Publication number: 20230377927Abstract: A substrate transfer apparatus includes: a planar motor provided in a transfer chamber and having coils arranged therein; a transfer unit movable on the planar motor; and a control unit configured to control an energization of the coils. The transfer unit includes two bases having magnets arranged thereon and configured to be movable on the planar motor, a substrate support member configured to support a substrate, and a link mechanism configured to connect the two bases and the substrate support member to each other.Type: ApplicationFiled: August 7, 2023Publication date: November 23, 2023Inventors: Tatsuo HATANO, Tetsuya MIYASHITA, Naoki WATANABE, Naoyuki SUZUKI
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Patent number: 11764092Abstract: The substrate transfer apparatus includes a planar motor provided in a transfer chamber and having coils arranged therein; a transfer unit movable on the planar motor; and a control unit configured to control an energization of the coils. The transfer unit includes two bases having magnets arranged thereon and configured to be movable on the planar motor, a substrate support member configured to support a substrate, and a link mechanism configured to connect the two bases and the substrate support member to each other.Type: GrantFiled: November 20, 2020Date of Patent: September 19, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Tatsuo Hatano, Tetsuya Miyashita, Naoki Watanabe, Naoyuki Suzuki
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Patent number: 11605547Abstract: A temperature measuring device that measures a temperature of a rotatable stage that holds a substrate, includes: a contact portion provided at a position that does not hinder placing of the substrate on the stage, and a temperature detector having a temperature sensor, and provided at a position separated from the temperature detection contact portion except when measuring a temperature. When measuring the temperature of the stage, the temperature detection contact portion and the temperature detector are relatively moved and brought into contact with each other in a state where the stage is not rotating to detect the temperature of the stage.Type: GrantFiled: March 16, 2020Date of Patent: March 14, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Manabu Nakagawasai, Naoyuki Suzuki, Shinji Orimoto, Hiroyuki Yokohara
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Publication number: 20220415688Abstract: The present disclosure provides a substrate transfer apparatus. According to an aspect of the present disclosure, the substrate transfer apparatus includes: a planar motor provided in a transfer chamber and having coils arranged therein; a transfer unit movable on the planar motor; and a control unit configured to control an energization of the coils. The transfer unit includes two bases having magnets arranged thereon and configured to be movable on the planar motor, a substrate support member configured to support a substrate, and a link mechanism configured to connect the two bases and the substrate support member to each other.Type: ApplicationFiled: November 20, 2020Publication date: December 29, 2022Inventors: Tatsuo HATANO, Tetsuya MIYASHITA, Naoki WATANABE, Naoyuki SUZUKI
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Publication number: 20220415687Abstract: A substrate transfer device, includes: a first planar motor installed in a first chamber and having an array of coils; a second planar motor installed in a second chamber connected to the first chamber and having an array of coils; a pair of transfer units configured to move on at least one of the first planar motor and the second planar motor and configured to transfer a substrate; and a controller configured to control supply of electric current to the coils of the first planar motor and the second planar motor.Type: ApplicationFiled: November 20, 2020Publication date: December 29, 2022Inventors: Tatsuo HATANO, Tetsuya MIYASHITA, Naoki WATANABE, Naoyuki SUZUKI
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Patent number: 11417504Abstract: A stage device includes a stage configured to hold a target substrate in a vacuum chamber, a cold heat transfer body fixedly disposed below a bottom surface of the stage with a gap between the stage and the cold heat transfer body and cooled to an extremely low temperature by a chiller disposed below the cold heat transfer body, and cooling fluid supplied to the gap to transfer cold heat of the cold heat transfer body to the stage. The stage device further includes a stage support configured to rotatably support the stage and formed in a cylindrical shape to surround an upper part of the cold heat transfer body wherein the stage support has a vacuum insulation structure, and a rotation part configured to support the stage support and rotated by a driving mechanism while being sealed with magnetic fluid.Type: GrantFiled: October 22, 2019Date of Patent: August 16, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: Manabu Nakagawasai, Naoyuki Suzuki, Shinji Orimoto, Hiroyuki Yokohara, Motoi Yamagata, Koji Maeda
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Patent number: 11414747Abstract: A sputtering device includes a processing chamber where a substrate is accommodated, and a slit plate that partitions the processing chamber into a first space where a target member is disposed and a second space where the substrate is disposed. The slit plate includes an inner member having an opening that penetrates therethrough in a thickness direction of the slit plate, and an outer member disposed around the inner member. The inner member is attachable to and detachable from the outer member.Type: GrantFiled: June 19, 2019Date of Patent: August 16, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: Junichi Takei, Hiroshi Sone, Naoyuki Suzuki, Shinji Orimoto
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Patent number: 11293092Abstract: A stage device includes a stage configured to hold a target substrate in a vacuum chamber, a chiller having a cold head maintained at an extremely low temperature and a cold heat transfer body fixed in contact with the cold head and disposed below a bottom surface of the stage with a gap between the stage and the cold heat transfer body. The stage device further includes a heat insulating structure unit having a vacuum insulated structure and configured to surround at least the cold head and a connection portion between the cold head and the cold heat transfer body, cooling fluid supplied to the gap to transfer cold heat of the cold heat transfer body to the stage, and a stage support rotated by a driving mechanism and configured to rotatably support the stage.Type: GrantFiled: October 22, 2019Date of Patent: April 5, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: Manabu Nakagawasai, Naoyuki Suzuki, Shinji Orimoto
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Patent number: 11282733Abstract: There is provided a stage mechanism, including: an electrostatic chuck having a conductive film formed on a front surface thereof, the conductive film configured to make electrically contact with a rear surface of a substrate; a conductive member electrically connected to the conductive film and formed to extend to a rear surface of the electrostatic chuck; and a moving member electrically connected to the conductive member via a connecting member and configured to move between a first position connected to a ground potential and a second position not connected to the ground potential.Type: GrantFiled: July 24, 2019Date of Patent: March 22, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: Yuuki Motomura, Hiroshi Sone, Yasuyuki Kagaya, Naoyuki Suzuki
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Publication number: 20210285096Abstract: A film thickness measurement apparatus includes: a stage that places a substrate having a film formed thereon and measures a thickness of the film in-situ in a film forming apparatus; a film thickness meter including a light emitter that emits light toward the substrate disposed on the stage and a light receiving sensor that receives the light reflected by the substrate for measuring the thickness of the film in-situ; a moving mechanism including a multi-joint arm that moves an irradiation point of the light on the substrate; a distance meter that measures a distance between the light receiving sensor and the irradiation point on the substrate; and a distance adjustor that adjusts the distance between the light receiving sensor and the irradiation point on the substrate.Type: ApplicationFiled: February 24, 2021Publication date: September 16, 2021Inventors: Masato SHINADA, Tamaki TAKEYAMA, Kazunaga ONO, Naoyuki SUZUKI, Hiroaki CHIHAYA, Einstein Noel ABARRA
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Publication number: 20210262080Abstract: The sputter device according to one embodiment of the present invention has: a treatment vessel in which a substrate is housed; a slit plate which is disposed above the substrate inside the treatment vessel so as to be located parallel to a surface of the substrate and which has formed therein an opening that penetrates in the plate-thickness direction; and a heat-receiving plate which is formed of a material having a higher heat resistance than the slit plate and which is placed on top of the slit plate beneath a target material provided at a slant with respect the slit plate.Type: ApplicationFiled: June 17, 2019Publication date: August 26, 2021Inventors: Junichi TAKEI, Naoki WATANABE, Hiroshi SONE, Naoyuki SUZUKI
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Patent number: 10910215Abstract: There is provided a method of forming an insulating film which includes providing a workpiece having a base portion and a protuberance portion formed to protrude from the base portion; and forming an insulating film on the workpiece by sputtering. The forming an insulating film includes forming the insulating film while changing an angle defined between the workpiece and a target.Type: GrantFiled: June 30, 2017Date of Patent: February 2, 2021Assignee: TOKYO ELECTRON LIMITEDInventors: Naoki Watanabe, Tatsuo Hatano, Shinji Furukawa, Naoyuki Suzuki
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Publication number: 20200381272Abstract: A placing table structure according to an embodiment includes: a fixedly disposed refrigerated heat transfer element; a rotatable outer cylinder disposed around the refrigerated heat transfer element; and a stage connected to the outer cylinder and disposed above an upper surface of the refrigerated heat transfer element with inclusion of a gap between the refrigerated heat transfer element and the stage.Type: ApplicationFiled: June 25, 2018Publication date: December 3, 2020Inventors: Shinji ORIMOTO, Manabu NAKAGAWASAI, Kouji MAEDA, Hiroshi MIKI, Naoyuki SUZUKI
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Publication number: 20200339565Abstract: The present invention provides a compound having antiviral effects, particularly having growth inhibitory activity on influenza viruses, a preferred example of the compound being a substituted 3-hydroxy-4-pyridone derivative prodrug having cap-dependent endonuclease inhibitory activity.Type: ApplicationFiled: November 15, 2019Publication date: October 29, 2020Applicant: Shionogi & Co., Ltd.Inventors: Chika TAKAHASHI, Hidenori MIKAMIYAMA, Toshiyuki AKIYAMA, Kenji TOMITA, Yoshiyuki TAODA, Makoto KAWAI, Kosuke ANAN, Masayoshi MIYAGAWA, Naoyuki SUZUKI
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Publication number: 20200303223Abstract: A temperature measuring device that measures a temperature of a rotatable stage that holds a substrate, includes: a contact portion provided at a position that does not hinder placing of the substrate on the stage, and a temperature detector having a temperature sensor, and provided at a position separated from the temperature detection contact portion except when measuring a temperature. When measuring the temperature of the stage, the temperature detection contact portion and the temperature detector are relatively moved and brought into contact with each other in a state where the stage is not rotating to detect the temperature of the stage.Type: ApplicationFiled: March 16, 2020Publication date: September 24, 2020Inventors: Manabu Nakagawasai, Naoyuki Suzuki, Shinji Orimoto, Hiroyuki Yokohara
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Patent number: 10772983Abstract: A perfume retainer includes a main body and an air flow channel located in the main body. The air flow channel includes: a retainer space configured to retain a perfume, a first opening located connecting a first end of the retainer space to a space outside of a first end of the air flow channel, and a second opening connecting a second end of the retainer space to a space outside of a second end of the air flow channel. The retainer space includes a plurality of segment regions arranged adjacent each other such that an external wall of one of the plurality of segment regions is in contact with an external wall of another of the plurality of segment regions. The plurality of segment regions increase a surface area of the air flow channel without increasing a volume of space of the air flow channel.Type: GrantFiled: March 31, 2017Date of Patent: September 15, 2020Assignee: Sony CorporationInventors: Shuji Fujita, Tsunetoshi Samukawa, Koya Nomoto, Yuji Ishigaki, Hideki Nakano, Keita Tanaka, Naoyuki Suzuki
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Patent number: 10696707Abstract: The present invention is the following Amphotericin B derivative: wherein each symbol is defined in description. The compound of the present invention has 16th position (X) is urea structure, cyclic structure, hydroxyalkyl or substituted monoalkylcarbamoyl. The compound of the present invention has antifungal activity.Type: GrantFiled: December 28, 2018Date of Patent: June 30, 2020Assignee: SHIONOGI & CO., LTD.Inventors: Keisuke Miyazaki, Kenji Takaya, Takafumi Ohara, Hideki Sugimoto, Manabu Fujitani, Yuki Ogata, Naoyuki Suzuki
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Publication number: 20200131625Abstract: A stage device includes a stage configured to hold a target substrate in a vacuum chamber, a chiller having a cold head maintained at an extremely low temperature and a cold heat transfer body fixed in contact with the cold head and disposed below a bottom surface of the stage with a gap between the stage and the cold heat transfer body. The stage device further includes a heat insulating structure unit having a vacuum insulated structure and configured to surround at least the cold head and a connection portion between the cold head and the cold heat transfer body, cooling fluid supplied to the gap to transfer cold heat of the cold heat transfer body to the stage, and a stage support rotated by a driving mechanism and configured to rotatably support the stage.Type: ApplicationFiled: October 22, 2019Publication date: April 30, 2020Inventors: Manabu NAKAGAWASAI, Naoyuki SUZUKI, Shinji ORIMOTO