Abstract: An integrated circuit includes a first field effect transistor (FET) and a second FET formed in or over a semiconductor substrate and configured to selectively conduct a current between a first circuit node and a second circuit node. The first FET has a first source, a first drain and a first buried layer all having a first conductivity type, and a first gate between the first source and the first drain. The second FET has a second source, a second drain and a second buried layer all having the first conductivity type, and a second gate between the second source and the second drain. A first potential between the first source and the first buried layer is configurable independently from a second potential between the second source and the second buried layer.

Abstract: An automatic tester for an analog micromirror device includes a computer having an ADC and DAC connected to its peripheral bus. A micromirror device under test is mounted on a black box containing a light source such as a laser and a position sensitive device. The light beam is reflected by the micromirror device onto the position sensitive device so that the deflection of the mirror in two axes can be measured. The output of the position sensitive device is amplified and coupled to the ADC via a tester board. The computer can test the micromirror device to detect mechanical failure and to measure the resonant frequency and Q of the driving coils, and SNR of the internal package feedback which measures the position of the mirror.

Abstract: An automatic tester for an analog micromirror device includes a computer having an ADC and DAC connected to its peripheral bus. A micromirror device under test is mounted on a black box containing a light source such as a laser and a position sensitive device. The light beam is reflected by the micromirror device onto the position sensitive device so that the deflection of the mirror in two axes can be measured. The output of the position sensitive device is amplified and coupled to the ADC via a tester board. The computer can test the micromirror device to detect mechanical failure and to measure the resonant frequency and Q of the driving coils, and SNR of the internal package feedback which measures the position of the mirror.

Abstract: A drive system for a analog micromirror device includes an operational amplifier having a noninverting input coupled to a voltage control signal and an inverting input coupled to the output via the actuating coils of the micromirror device. A resistor is coupled between the inverting input and a reference potential.