Abstract: According to an aspect of the present invention, an apparatus includes a stage, at least a first coil, at least a first magnet, a plurality of Hall sensors, and a stage position estimation module. The first coil is included in a coil array that is a part of a coil arrangement. The first magnet is configured to cooperate with the first coil to form a motor that drives the stage. The dynamics model arrangement obtains a current command provided to the first coil and provides a first signal based on the current command. The Hall sensors are included in the coil arrangement, and are configured to measure a flux that includes a magnetic component and a coil component. The stage position estimation module is configured to obtain the flux and the first signal, and to process the flux and the first signal to estimate a position of the stage.