Patents by Inventor Natalya Vasilievna Kharitonova, legal representative

Natalya Vasilievna Kharitonova, legal representative has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7022160
    Abstract: The present invention relates to a method of purifying gaseous nitrogen trifluoride from CF4 as impurity. The method comprises selective adsorption of nitrogen trifluoride by dehydrated erionite at a temperature of from ?30 to 30° C., displacement of carbon tetrafluoride by an inert gas, desorption and condensation of the purified nitrogen trifluoride. The purification yields 99.99% pure NF3 with CF4 content not over 10 ppm. The proposed method of NF3 sorption purification makes it possible to carry out the process at an ambient temperature and with long operating life of the sorbent. The method is practically feasible, economically expedient, and easy to implement under industrial conditions.
    Type: Grant
    Filed: February 21, 2003
    Date of Patent: April 4, 2006
    Assignee: Zakrytoe Aktsionernoe Obschestvo Nauchno-Proizvodstvennoe Obiedinenie “Pim-Invest”
    Inventors: Sergei Mikhailovich Igumnov, Nina Valerievna Kharitonova, legal representative, Natalya Vasilievna Kharitonova, legal representative, Valery Pavlovich Kharitonov, deceased