Patents by Inventor Natan Deutsch

Natan Deutsch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for inspecting a backside of a wafer
    Patent number: 10215707
    Abstract: An inspection system for inspection a surface of a substrate, the inspection system may include an interface for holding the substrate; a movement mechanism for moving the interface, thereby moving the substrate between different positions; a bright field light source that is configured to illuminate different bright field illuminated parts of the surface of the substrate when the substrate is positioned at the different positions; at least one dark field light source that is configured to illuminate different dark field illuminated parts of the surface of the substrate when the substrate is positioned at the different positions; and a camera that is configured to: (a) generate bright field detection signals in response to light that is detected by the camera as a result of the illumination of the different bright field illuminated parts; and (b) generate dark field detection signals in response to light that is detected by the camera as a result of the illumination of the different dark field illuminated par
    Type: Grant
    Filed: July 12, 2016
    Date of Patent: February 26, 2019
    Assignee: CAMTEK LTD.
    Inventors: Zehava Ben Ezer, Guy Kafry, Shimon Koren, Eldad Langmans, Natan Deutsch
  • SYSTEM FOR INSPECTING A BACKSIDE OF A WAFER
    Publication number: 20170010220
    Abstract: An inspection system for inspection a surface of a substrate, the inspection system may include an interface for holding the substrate; a movement mechanism for moving the interface, thereby moving the substrate between different positions; a bright field light source that is configured to illuminate different bright field illuminated parts of the surface of the substrate when the substrate is positioned at the different positions; at least one dark field light source that is configured to illuminate different dark field illuminated parts of the surface of the substrate when the substrate is positioned at the different positions; and a camera that is configured to: (a) generate bright field detection signals in response to light that is detected by the camera as a result of the illumination of the different bright field illuminated parts; and (b) generate dark field detection signals in response to light that is detected by the camera as a result of the illumination of the different dark field illuminated par
    Type: Application
    Filed: July 12, 2016
    Publication date: January 12, 2017
    Inventors: Zehava Ben Ezer, Guy Kafry, Shimon Koren, Eldad Langmans, Natan Deutsch