Abstract: A clamping and support system for a turbine is disclosed. The clamping and support system may include a support bar coupled with a lower diaphragm portion of the turbine. The support bar may have a protuberance extending from a first end portion thereof that may at least partially extend into a slot formed in the lower diaphragm portion of the turbine. The clamping and support system may also include a clamping bar coupled with a second end portion of the support bar. The clamping bar may at least partially extend into a slot formed in an upper diaphragm portion of the turbine such that at least a portion of the lower diaphragm portion and at least a portion of the upper diaphragm portion are interposed between the clamping bar and the protuberance of the support bar, thereby coupling the lower diaphragm portion with the upper diaphragm portion.

Abstract: A clamping and support system for a turbine is disclosed. The clamping and support system may include a support bar coupled with a lower diaphragm portion of the turbine. The support bar may have a protuberance extending from a first end portion thereof that may at least partially extend into a slot formed in the lower diaphragm portion of the turbine. The clamping and support system may also include a clamping bar coupled with a second end portion of the support bar. The clamping bar may at least partially extend into a slot formed in an upper diaphragm portion of the turbine such that at least a portion of the lower diaphragm portion and at least a portion of the upper diaphragm portion are interposed between the clamping bar and the protuberance of the support bar, thereby coupling the lower diaphragm portion with the upper diaphragm portion.

Abstract: Embodiments of the present invention provide low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter cavity is defined to extend in a generally horizontal direction when the low-profile filter is in use. A first flow passage is defined to connect an inlet of the filter housing to a first section of the filter cavity and a second flow passage is defined to connect a second section of the filter cavity to an outlet of the filter housing. A filter assembly is disposed in the filter cavity and sealed to the surface of the filter cavity separating the filter cavity into adjacent sections including the first section of the filter cavity and second section of the filter cavity.

Abstract: Embodiments of the present invention provide low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter cavity is defined to extend in a generally horizontal direction when the low-profile filter is in use. A first flow passage is defined to connect an inlet of the filter housing to a first section of the filter cavity and a second flow passage is defined to connect a second section of the filter cavity to an outlet of the filter housing. A filter assembly is disposed in the filter cavity and sealed to the surface of the filter cavity separating the filter cavity into adjacent sections including the first section of the filter cavity and second section of the filter cavity.

Abstract: Embodiments of the present invention provide low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter cavity is defined to extend in a generally horizontal direction when the low-profile filter is in use. A first flow passage is defined to connect an inlet of the filter housing to a first section of the filter cavity and a second flow passage is defined to connect a second section of the filter cavity to an outlet of the filter housing. A filter assembly is disposed in the filter cavity and sealed to the surface of the filter cavity separating the filter cavity into adjacent sections including the first section of the filter cavity and second section of the filter cavity.

Abstract: Embodiments of the present invention provide low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter cavity is defined to extend in a generally horizontal direction when the low-profile filter is in use. A first flow passage is defined to connect an inlet of the filter housing to a first section of the filter cavity and a second flow passage is defined to connect a second section of the filter cavity to an outlet of the filter housing. A filter assembly is disposed in the filter cavity and sealed to the surface of the filter cavity separating the filter cavity into adjacent sections including the first section of the filter cavity and second section of the filter cavity.

Abstract: Embodiments of the present invention provide low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter cavity is defined to extend in a generally horizontal direction when the low-profile filter is in use. A first flow passage is defined to connect an inlet of the filter housing to a first section of the filter cavity and a second flow passage is defined to connect a second section of the filter cavity to an outlet of the filter housing. A filter assembly is disposed in the filter cavity and sealed to the surface of the filter cavity separating the filter cavity into adjacent sections including the first section of the filter cavity and second section of the filter cavity.

Abstract: Embodiments of the present invention provide low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter cavity is defined to extend in a generally horizontal direction when the low-profile filter is in use. A first flow passage is defined to connect an inlet of the filter housing to a first section of the filter cavity and a second flow passage is defined to connect a second section of the filter cavity to an outlet of the filter housing. A filter assembly is disposed in the filter cavity and sealed to the surface of the filter cavity separating the filter cavity into adjacent sections including the first section of the filter cavity and second section of the filter cavity.

Abstract: A gas porous media which comprises a material having a low coefficient of thermal expansion that is capable of retaining 99.99% or more of particles of a size of about 0.003 microns and larger at 0.2 slpm/cm2 while demonstrating a permeability of 3.5×10?12 m2 and a porosity of around 62% is disclosed. The porous media can be fabricated into a frame that is capable of retaining 99.9999999% of particles greater than 0.003 ?m in diameter at 8.3 sccm/cm2 with a permeability of 3.0×10?13 m2 and a porosity of around 53%. The porous medias can be tailored by changing the raw materials and process to yield media with a range of porosities and that exhibit permeability between 1.0E?13 and 1.0E?11 m2. The porous media are used in frames for supporting a pellicle and a reticle in a parallel relationship to each other. The frames may comprise porous media in its entirety or the porous media can be fabricated and sealed into a solid support frame.

Abstract: The present invention provides a gas porous media, the bulk matrix of which comprises a material having a low coefficient of thermal expansion that is also capable of retaining 99.99% or more of particles of a size of about 0.003 microns and larger at 0.2 slpm/cm2 while demonstrating a permeability of 3.5×10−12 m2 and a porosity of around 62%. The porous media, preferably a membrane, is also fabricated into in such a way that the resultant assembly, in this case a frame, is capable of retaining 99.9999999% of particles greater than 0.003 um in diameter at 8.3 sccm/cm2 with a permeability of 3.0×10−13 m2 and a porosity of around 53%. Both porous medias can be tailored by changing the raw materials and process to yield a range of porosities and exhibit permeability between 1.0E−13 and 1.0E−11 m2.