Abstract: A variety of applications can include silicon-based vibrating mesh atomizer (Si-VMA) including inhaled delivery of an aerosol or vaping. Applications can include a Si-VMA with a mesh membrane having an arrangement of apertures structured as nozzles and a mesh wick integrated with the Si-VMA and arranged on the mesh membrane. Applications can include a Si-VMA with a mesh membrane having an arrangement of apertures structured as nozzles and having the nozzles arranged in sections of nozzles to operate the silicon-based vibrating mesh atomizer in multiple modes for propulsion of a microthruster. A chamber can be located on the mesh membrane and can be partitioned into sub-chambers to hold multiple propellants such that each sub-chamber is on a different section of the sections of nozzles.

Abstract: In various embodiments, an apparatus can comprise one or more integrated mesh membranes operable to vibrate based on an integrated structure with a piezoelectric material. The integrated mesh membrane can be implemented in an atomizer, which can be constructed as a monolithic vibrating mesh atomizer. A portable vibrating mesh atomizer can be implemented in a number of applications including, but not limited to, a vaping device or portable liquid medicine delivery system. Additional apparatus, systems, and methods are disclosed.

Abstract: A variety of applications can include parylene capping layer for embedded liquid packaging. A capping structure for liquid packaging can include a conformal parylene capping layer on and contacting a liquid in a recessed cavity of a substrate such that the parylene prevents the liquid from leaking out of the cavity, embedding the liquid in the cavity of the substrate. The selections of substrate, liquid, or type of parylene can be based on the application for which the liquid packaging is implemented.

Abstract: A variety of applications can include systems and methods related to vibrating mesh atomizers for dry powder generation. A spray-drying system can include a silicon vibrating mesh atomizer structured to receive a liquid and generate aerosol droplets; a heater at an outlet of the silicon vibrating mesh atomizer, where the heater is structured to evaporate liquid components of the aerosol droplets; and a collector to collect solid particles from the evaporation of the aerosol droplets. Variations of the silicon vibrating mesh atomizer or variations of associated heaters can be implemented to provide a controlled distribution of solid particles from an aerosol generated from a selected liquid.

Abstract: In various embodiments, an apparatus can comprise one or more sliding mass cantilever devices. Cantilever devices can be structured as monolithic integrated structures with a mass coupled to a cantilever beam, where the mass has one or more cavities in which a liquid or solid particles are disposed. A cap can be arranged on the mass to prevent the liquid or solid particles from exiting the cavities in which they are embedded. The cantilever devices can be structured as microelectromechanical system (MEMS) resonators with a tunable resonant frequency. Such cantilever devices can be implemented as energy harvesting devices.

Abstract: Frequency bandwidth of a cantilever beam system can be enhanced using a movable mass having motion in a cavity of a mass attached to cantilever beam, where the motion is transverse to the cantilever beam. In various embodiments, a cantilever beam apparatus includes a cantilever beam, a first mass, and a second mass. The first mass can be attached to the cantilever beam, with the first mass having a cavity arranged transverse to the cantilever beam. The second mass can be disposed in the cavity such that the second mass is movable in the cavity in a direction transverse to the cantilever beam. Apparatus, systems, and methods associated with enhanced frequency bandwidth of cantilever beam using transverse movable mass are applicable in a variety of applications.

Abstract: Apparatus, systems, and methods associated with microfabricated ultrasound transducer array for neural stimulation are applicable in a variety of applications. Microfabricated micro-scale ultrasound transducers can be integrated with microelectrode arrays for high spatial stimulation of neurons. Ultrasound stimulation of neurons can be combined with electrical recording to monitor neural activity. Such high spatial stimulation devices can be implemented for in-vitro and in-vivo applications. In-vivo applications can include high frequency ultrasound transducers incorporated into brain probes that are implanted at a specific area in the brain, where the high frequency ultrasound transducer can stimulate neurons at that target location.

Abstract: In various embodiments, an apparatus can comprise one or more integrated mesh membranes operable to vibrate based on an integrated structure with a piezoelectric material. The integrated mesh membrane can be implemented in an atomizer, which can be constructed as a monolithic vibrating mesh atomizer. A portable vibrating mesh atomizer can be implemented in a number of applications including, but not limited to, a vaping device or portable liquid medicine delivery system. Additional apparatus, systems, and methods are disclosed.