Patents by Inventor Nathan Philip Marchack

Nathan Philip Marchack has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Tapered VA structure for increased alignment tolerance and reduced sputter redeposition in MTJ devices
    Patent number: 10790001
    Abstract: A bottom electrode structure for MRAM or MTJ-based memory cells comprises a taper so that the bottom CD is smaller than the top CD. A process of making a bottom electrode contact structure comprises etching a dielectric layer using a plasma chemistry with an increased degree of polymerization. We obtain a product made by this process.
    Type: Grant
    Filed: January 4, 2019
    Date of Patent: September 29, 2020
    Assignee: International Business Machines Corporation
    Inventors: Bruce B. Doris, Pouya Hashemi, Nathan Philip Marchack
  • TAPERED VA STRUCTURE FOR INCREASED ALIGNMENT TOLERANCE AND REDUCED SPUTTER REDEPOSITION IN MTJ DEVICES
    Publication number: 20200219549
    Abstract: A bottom electrode structure for MRAM or MTJ-based memory cells comprises a taper so that the bottom CD is smaller than the top CD. A process of making a bottom electrode contact structure comprises etching a dielectric layer using a plasma chemistry with an increased degree of polymerization. We obtain a product made by this process.
    Type: Application
    Filed: January 4, 2019
    Publication date: July 9, 2020
    Applicant: International Business Machines Corporation
    Inventors: Bruce B. Doris, Pouya Hashemi, Nathan Philip Marchack