Abstract: A compressor fairing segment includes a body having an upstream surface, a downstream surface, and opposing side surfaces between the upstream and downstream surfaces. A first detent on the upstream surface is shaped to conform to a first complementary fitting inside a compressor. A second detent on the downstream surface shaped to conform to a second complementary fitting inside the compressor.

Abstract: Etching gases are disclosed for plasma etching channel holes, gate trenches, staircase contacts, capacitor holes, contact holes, etc., in Si-containing layers on a substrate and plasma etching methods of using the same. The etching gases are trans-1,1,1,4,4,4-hexafluoro-2-butene; cis-1,1,1,4,4,4-hexafluoro-2-butene; hexafluoroisobutene; hexafluorocyclobutane (trans-1,1,2,2,3,4); pentafluorocyclobutane (1,1,2,2,3-); tetrafluorocyclobutane (1,1,2,2-); or hexafluorocyclobutane (cis-1,1,2,2,3,4). The etching gases may provide improved selectivity between the Si-containing layers and mask material, less damage to channel region, a straight vertical profile, and reduced bowing in pattern high aspect ratio structures.

Abstract: Disclosed are sulfur-containing compounds for plasma etching channel holes, gate trenches, staircase contacts, capacitor holes, contact holes, etc., in Si-containing layers on a substrate and plasma etching methods of using the same. The plasma etching compounds may provide improved selectivity between the Si-containing layers and mask material, less damage to channel region, a straight vertical profile, and reduced bowing in pattern high aspect ratio structures.

Abstract: A control system is provided. The control system includes at least one sensor positioned within a turbine engine, wherein the sensor is configured to detect at least one first operating parameter within the turbine engine. A controller is coupled to the sensor and the controller is configured to receive at least one second operating parameter of the turbine engine. The controller is also configured to control a flow of a fluid to a rotor assembly within the turbine engine such that the fluid is distributed substantially uniformly within the rotor assembly and at least one of the first operating parameter and the second operating parameter is less than at least one threshold value.

Abstract: Systems, methods, and devices, adapted to ease installation of balance weights about a turbine are disclosed. In one embodiment, a device includes: a base including a hollow feature and an operative tip configured to connect to a balance weight; and an inner component disposed within the hollow feature of the base, the inner component including an inner tip at a first end, the inner tip configured to manipulate a set screw connected to the balance weight.

Abstract: Etching gases are disclosed for plasma etching channel holes, gate trenches, staircase contacts, capacitor holes, contact holes, etc., in Si-containing layers on a substrate and plasma etching methods of using the same. The etching gases are trans-1,1,1,4,4,4-hexafluoro-2-butene; cis-1,1,1,4,4,4-hexafluoro-2-butene; hexafluoroisobutene; hexafluorocyclobutane (trans-1,1,2,2,3,4); pentafluorocyclobutane (1,1,2,2,3-); tetrafluorocyclobutane (1,1,2,2-); or hexafluorocyclobutane (cis-1,1,2,2,3,4). The etching gases may provide improved selectivity between the Si-containing layers and mask material, less damage to channel region, a straight vertical profile, and reduced bowing in pattern high aspect ratio structures.

Abstract: A control system is provided. The control system includes at least one sensor that is positioned within a turbine engine and is configured to detect at least one first operating parameter therein. A controller is coupled to the sensor. The controller is configured to receive at least one second operating parameter of the turbine engine. Moreover, the controller is configured to control a flow of a fluid to a rotor assembly within the turbine engine such that at least one of the first operating parameter and the second operating parameter is less than at least one threshold value.

Abstract: Disclosed is a process to purify COS and remove H2S without hydrolyzing or trapping the desired COS product.

Abstract: A compressor fairing segment includes a body having an upstream surface, a downstream surface, and opposing side surfaces between the upstream and downstream surfaces. A first detent on the upstream surface is shaped to conform to a first complementary fitting inside a compressor. A second detent on the downstream surface shaped to conform to a second complementary fitting inside the compressor.

Abstract: Methods of purifying NMe3 by removing N2, NH2Me, NH3, and H2O are disclosed.

Abstract: Systems, methods, and devices, adapted to ease installation of balance weights about a turbine are disclosed. In one embodiment, a device includes: a base including a hollow feature and an operative tip configured to connect to a balance weight; and an inner component disposed within the hollow feature of the base, the inner component including an inner tip at a first end, the inner tip configured to manipulate a set screw connected to the balance weight.

Abstract: A control system is provided. The control system includes at least one sensor that is positioned within a turbine engine and is configured to detect at least one first operating parameter therein. A controller is coupled to the sensor. The controller is configured to receive at least one second operating parameter of the turbine engine. Moreover, the controller is configured to control a flow of a fluid to a rotor assembly within the turbine engine such that at least one of the first operating parameter and the second operating parameter is less than at least one threshold value.

Abstract: A control system is provided. The control system includes at least one sensor positioned within a turbine engine, wherein the sensor is configured to detect at least one first operating parameter within the turbine engine. A controller is coupled to the sensor and the controller is configured to receive at least one second operating parameter of the turbine engine. The controller is also configured to control a flow of a fluid to a rotor assembly within the turbine engine such that the fluid is distributed substantially uniformly within the rotor assembly and at least one of the first operating parameter and the second operating parameter is less than at least one threshold value.

Abstract: Methods of purifying H2Se by removing H2S and/or H2O are disclosed. The amount of H2S in the H2Se-containing gas is reduced below 10 ppmv by passing the H2Se-containing gas through an AW-500 molecular sieve. H2S and H2O are removed by passing H2Se through a 4 A molecular sieve and subsequently passing H2Se through an AW-500 molecular sieve.

Abstract: Disclosed are methods of purifying H2Se by removing H2S and H2O.

Abstract: Disclosed are compounds for plasma ashing photoresist layers on a substrate and methods of using the same. The plasma ashing compounds induce limited to no damage to the underlying layer, such as the low-k film layer.

Abstract: The present invention provides methods for checking and calibrating one or more concentration sensors in an open or closed system. More specifically, in one embodiment of the present invention, the disclosed method allows for the checking and calibration of one or more concentration sensors in which removal of the liquid from the system is required. In two additional embodiments, the disclosed methods allow for the checking and calibration of one or more concentration sensors without having to remove the liquid from the closed system thereby minimizing contamination of the system while at the same time greatly reducing or eliminating contact of the user with the liquid.

Abstract: Disclosed is a process to purify COS and remove H2S without hydrolyzing or trapping the desired COS product.

Abstract: Methods of storing a precursor which decreases the precursor decomposition rate. A vessel is provided, where the vessel has an outer surface made of a first material, and an inner surface made of a second material. The first and second materials are different. A tantalum containing precursor is placed inside the vessel, and the vessel is heated to a temperature between 60° C. and 150° C. At least part of the precursor is withdrawn from the vessel.

Abstract: Methods and compositions for depositing rare earth metal-containing layers are described herein. In general, the disclosed methods deposit the precursor compounds comprising rare earth-containing compounds using vapor deposition methods such as chemical vapor deposition or atomic layer deposition. In certain embodiments, the disclosed precursor compounds include a cyclopentadienyl ligand having at least one aliphatic group as a substituent.