Patents by Inventor Nathan Thane

Nathan Thane has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of producing submicron contacts with unique etched slopes
    Patent number: 5366848
    Abstract: A method is provided for making submicron contact openings by forming an insulating layer over a substrate and a photoresist layer over the insulating layer. The thick photoresist layer is patterned and etched to form a first opening in the photoresist. A thin photoresist layer is then formed over the integrated circuit which is then patterned and etched to form a second opening inside the first opening. A contact opening is then etched through the insulating layer through the second opening in the thin photoresist.
    Type: Grant
    Filed: April 1, 1993
    Date of Patent: November 22, 1994
    Assignee: SGS-Thomson Microelectronics, Inc.
    Inventors: Nathan Thane, William Hata