Patents by Inventor Nathna Sun

Nathna Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of preventing toppling of lower electrode through flush cleaning
    Patent number: 6511891
    Abstract: A method of forming the lower electrode of a capacitor capable of withstanding the flushing force produced by a cleaning agent. A lower electrode having a rectangular profile when viewed from the top is provided. The lower electrode is bounded by a pair of ends and a pair of sides. The ends and the sides are linked together. The ends have a wedge shape. The sides have edges that cave in towards the center, thereby forming a recess region between the sides. A flushing operation is carried out using a cleaning solution. The cleaning solution flows from one end of the electrode to the other end along the sides.
    Type: Grant
    Filed: June 14, 2001
    Date of Patent: January 28, 2003
    Assignee: United Microelectronics Corp.
    Inventors: Nathna Sun, Benjamin Szu-Min Lin, Chuan-Fu Wang
  • METHOD OF PREVENTING TOPPLING OF LOWER ELECTRODE THROUGH FLUSH CLEANING
    Publication number: 20020192923
    Abstract: A method of forming the lower electrode of a capacitor capable of withstanding the flushing force produced by a cleaning agent. A lower electrode having a rectangular profile when viewed from the top is provided. The lower electrode is bounded by a pair of ends and a pair of sides. The ends and the sides are linked together. The ends have a wedge shape. The sides have edges that cave in towards the center, thereby forming a recess region between the sides. A flushing operation is carried out using a cleaning solution. The cleaning solution flows from one end of the electrode to the other end along the sides.
    Type: Application
    Filed: June 14, 2001
    Publication date: December 19, 2002
    Inventors: Nathna Sun, Benjamin Szu-Min Lin, Chuan-Fu Wang