Patents by Inventor NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY

NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
    Publication number: 20130154059
    Abstract: A semiconductor device manufacturing method includes exciting plasma, applying RF power onto a target substrate to generate substrate bias and performing an ion implantation plural times by applying the RF power in the form of pulses.
    Type: Application
    Filed: February 14, 2013
    Publication date: June 20, 2013
    Applicants: NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY, TOKYO ELECTRON LIMITED
    Inventors: TOKYO ELECTRON LIMITED, NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY