Abstract: A method of adjusting heat uniformity on a wafer mounting surface of a wafer mount having a ceramic base including the wafer mounting surface which can heat a wafer through energization and a cooling plate includes: a) preparing the wafer mount including the cooling plate including: a base including a flow path of a coolant; and a lid detachable from the base; b) measuring a temperature distribution with the lid being attached on the base while heating through the energization and cooling; c) detaching the lid and locally adjusting a shape of the flow path when the temperature distribution does not satisfy a predetermined criterion; and d) remeasuring the temperature distribution after adjusting the shape of the flow path, with the lid being attached on the base while heating through the energization and cooling, wherein the steps c) and d) are repeated until the remeasured temperature distribution satisfies the criterion.

Abstract: A fuel cell catalyst which has high power output characteristics and suppresses degradation of power generation performance due to starting, stopping or load variation; a manufacturing method thereof; a membrane electrode assembly for fuel cell; and a fuel cell including the same. The fuel cell catalyst includes at least catalytically active species and a carrier supporting the catalytically active species. The catalytically active species are at least one selected from the group consisting of platinum, a platinum alloy, and a core-shell catalyst in which a core of a metal different from platinum is coated with a shell containing platinum, the carrier is a carbon material, and at least one of the catalytically active species and the carrier contain(s) fluorine atoms.

Abstract: A fuel cell catalyst which has high power output characteristics and suppresses degradation of power generation performance due to starting, stopping or load variation; a manufacturing method thereof; a membrane electrode assembly for fuel cell; and a fuel cell including the same. The fuel cell catalyst includes at least catalytically active species and a carrier supporting the catalytically active species. The catalytically active species are at least one selected from the group consisting of platinum, a platinum alloy, and a core-shell catalyst in which a core of a metal different from platinum is coated with a shell containing platinum, the carrier is a carbon material, and at least one of the catalytically active species and the carrier contain(s) fluorine atoms.