Patents by Inventor Natsuko Kinoshita
Natsuko Kinoshita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230400767Abstract: A radiation-sensitive resin composition includes: a polymer including a first structural unit represented by formula (1); and a radiation-sensitive acid generator. In the formula (1), R1 represents a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group; R2, R3, and R4 each independently represent a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms; R5 represents a monovalent organic group having 1 to 20 carbon atoms; and L represents a single bond or a divalent organic group having 1 to 20 carbon atoms.Type: ApplicationFiled: August 29, 2023Publication date: December 14, 2023Applicant: JSR CORPORATIONInventors: Takuya OMIYA, Katsuaki NISHIKORI, Kazuya KIRIYAMA, Natsuko KINOSHITA, Tetsurou KANEKO
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Publication number: 20230384676Abstract: A radiation-sensitive resin composition includes: a resin including a structural unit represented by formula (1); a radiation-sensitive acid generator; and a solvent. R1 is a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group; L1 represents a single bond or —COO-L-; L represents a substituted or unsubstituted alkanediyl group; R2 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms; L2 represents a single bond or a divalent linking group; and Ar represents a group obtained by removing (n+1) hydrogen atoms from an aromatic ring. R3 is independently a halogen atom, a halogenated hydrocarbon group, a hydroxy group, a monovalent hydrocarbon group having 1 to 10 carbon atoms, or a monovalent alkyl ether group having 1 to 10 carbon atoms, and at least one R3 is a halogen atom or a halogenated hydrocarbon group.Type: ApplicationFiled: April 18, 2023Publication date: November 30, 2023Applicant: JSR CORPORATIONInventors: Takuya OMIYA, Katsuaki NISHIKORI, Kazuya KIRIYAMA, Yuushi MATSUMURA, Natsuko KINOSHITA
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Publication number: 20230280652Abstract: A radiation-sensitive resin composition includes: a resin containing a structural unit A represented by formula (1); at least one radiation-sensitive acid generator selected from the group consisting of a radiation-sensitive acid generator represented by formula (2-1) and a radiation-sensitive acid generator represented formula (2-2); and a solvent. At least one R3 is an acid-dissociable group; and R41 is a hydrogen atom or a protective group to be deprotected by action of an acid. At least one of Rf1 and Rf2 is a fluorine atom or a fluoroalkyl group; R5a is a monovalent organic group having a cyclic structure; X1+ is a monovalent onium cation; R5b is a monovalent organic group, and X2+ is a monovalent onium cation whose atom having a positive charge is not an atom forming a cyclic structure.Type: ApplicationFiled: May 15, 2023Publication date: September 7, 2023Applicant: JSR CORPORATIONInventor: Natsuko KINOSHITA
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Publication number: 20230236501Abstract: A radiation-sensitive resin composition includes: a polymer, solubility of which in a developer solution is capable of being altered by an action of an acid; a radiation-sensitive acid generator; and a compound represented by formula (1). Ar1 represents a group obtained by removing (a+b+2) hydrogen atoms from an aromatic hydrocarbon ring having 6 to 30 ring atoms; R1 represents a halogen atom or a monovalent organic group having 1 to 20 carbon atoms; L1 represents a divalent linking group; R2 represents a substituted or unsubstituted monovalent aromatic hydrocarbon group having 6 to 20 carbon atoms; a is an integer of 0 to 10, b is an integer of 1 to 10, wherein a sum of a and b is no greater than 10; and X+ represents a monovalent radiation-sensitive onium cation.Type: ApplicationFiled: January 23, 2023Publication date: July 27, 2023Applicant: JSR CORPORATIONInventors: Natsuko KINOSHITA, Takuhiro TANIGUCHI, Katsuaki NISHIKORI, Kazuya KIRIYAMA
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Patent number: 11709428Abstract: A radiation-sensitive resin composition includes: a resin containing a structural unit A represented by formula (1); at least one radiation-sensitive acid generator selected from the group consisting of a radiation-sensitive acid generator represented by formula (2-1) and a radiation-sensitive acid generator represented formula (2-2); and a solvent. At least one R3 is an acid-dissociable group; and R41 is a hydrogen atom or a protective group to be deprotected by action of an acid. At least one of Rf1 and Rf2 is a fluorine atom or a fluoroalkyl group; R5a is a monovalent organic group having a cyclic structure; X1+ is a monovalent onium cation; R5b is a monovalent organic group, and X2+ is a monovalent onium cation whose atom having a positive charge is not an atom forming a cyclic structure.Type: GrantFiled: March 5, 2021Date of Patent: July 25, 2023Assignee: JSR CORPORATIONInventor: Natsuko Kinoshita
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Publication number: 20230104260Abstract: A radiation-sensitive resin composition includes a resin, a radiation-sensitive acid generator, and a solvent. The resin includes a structural unit A represented by formula (1) and a structural unit B having an acid-dissociable group. The structural unit represented by the formula (1) is excluded from the structural unit B. In the formula (1), A is a monovalent aromatic hydrocarbon group in which —ORY is bonded to a carbon atom adjacent to a carbon atom to which L? is bonded, and hydrogen atoms on other carbon atoms are unsubstituted, or a part or all of the hydrogen atoms are substituted with a cyano group, a nitro group, an alkyl group, an alkoxy group, an alkoxycarbonyl group, an alkoxycarbonyloxy group, an acyl group, or an acyloxy group.Type: ApplicationFiled: January 20, 2021Publication date: April 6, 2023Applicant: JSR CORPORATIONInventors: Takuya OMIYA, Katsuaki NISHIKORI, Kazuya KIRIYAMA, Natsuko KINOSHITA
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Publication number: 20220413385Abstract: The radiation-sensitive resin composition contains: a polymer, solubility of which in a developer solution is capable of being altered by an action of an acid, and which has a structural unit represented by the following formula (1); and a radiation-sensitive acid generating agent. L represents a single bond, —COO—, —O—, or —CONH—. X represents a single bond, —O—, -G-O—, —CH2—, —S—, —SO2—, —NRA—, or —CONH—, wherein G represents a divalent aliphatic hydrocarbon group having 1 to 20 carbon atoms, and RA represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms. R2 and R3 each independently represent a halogen atom, a hydroxy group, a sulfanyl group, or an organic group having 1 to 20 carbon atoms.Type: ApplicationFiled: June 1, 2022Publication date: December 29, 2022Applicant: JSR CORPORATIONInventors: Kazuya KIRIYAMA, Takuhiro Taniguchi, Katsuaki Nishikori, Natsuko Kinoshita
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Publication number: 20220283498Abstract: A radiation-sensitive resin composition includes: a resin having a polystyrene-equivalent weight-average molecular weight of 8,000 or less; a radiation-sensitive acid generator; and a solvent. The resin includes: a structural unit A represented by formula (1); a structural unit B having a phenolic hydroxyl group; and a structural unit C having an acid-dissociable group. The structural unit B is other than the structural unit A; and the structural unit C is other than the structural unit A or B. In the formula (1), RX is a hydrogen atom or a methyl group; and Ar is a monovalent aromatic hydrocarbon group having a substituent represented by —ORY. The substituent is bonded to a carbon atom next to a carbon atom bonded to a main chain of the resin. RY is a hydrogen atom or a protective group to be deprotected by action of an acid.Type: ApplicationFiled: February 11, 2022Publication date: September 8, 2022Applicant: JSR CORPORATIONInventors: Katsuaki NISHIKORI, Kazuya Kiriyama, Natsuko Kinoshita, Takuhiro Taniguchi
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Patent number: 11300877Abstract: A radiation-sensitive resin composition includes: a first polymer having a first structural unit that includes an acid-labile group; a radiation-sensitive acid generator; and a first compound capable of forming a salt through a structural change in a molecule thereof upon irradiation with a radioactive ray. Basicity of the first compound preferably changes upon irradiation with a radioactive ray. The first compound preferably generates an acid upon irradiation with a radioactive ray. The first compound is preferably represented by formula (1). In formula (1), Ar1 represents a substituted or unsubstituted heteroarenediyl group having 4 to 30 ring atoms and having at least one nitrogen atom as a ring-constituting atom.Type: GrantFiled: July 9, 2018Date of Patent: April 12, 2022Assignee: JSR CorporationInventor: Natsuko Kinoshita
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Publication number: 20210318613Abstract: A radiation-sensitive resin composition includes a polymer, a radiation-sensitive acid generator, and a compound represented by formula (2). The polymer includes a first structural unit including a phenolic hydroxyl group, a second structural unit including a group represented by formula (1), and a third structural unit including an acid-labile group. In the formula (1), R1, R2, R3, R4, R5, and R6 each independently represent a hydrogen atom, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, or a monovalent fluorinated hydrocarbon group having 1 to 10 carbon atoms, wherein at least one of R1, R2, R3, R4, R5, and R6 represents a fluorine atom or a fluorinated hydrocarbon group; RA represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms; and * denotes a binding site to a part other than the group represented by the formula (1).Type: ApplicationFiled: June 10, 2020Publication date: October 14, 2021Applicant: JSR CORPORATIONInventors: Katsuaki NISHIKORI, Ken MARUYAMA, Kazuki KASAHARA, Tsuyoshi FURUKAWA, Natsuko KINOSHITA
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Publication number: 20210284773Abstract: A radiation-sensitive resin composition includes: a resin containing a structural unit A represented by formula (1); at least one radiation-sensitive acid generator selected from the group consisting of a radiation-sensitive acid generator represented by formula (2-1) and a radiation-sensitive acid generator represented formula (2-2); and a solvent. At least one R3 is an acid-dissociable group; and R41 is a hydrogen atom or a protective group to be deprotected by action of an acid. At least one of Rf1 and Rf2 is a fluorine atom or a fluoroalkyl group; R5a is a monovalent organic group having a cyclic structure; X1+ is a monovalent onium cation; R5b is a monovalent organic group, and X2+ is a monovalent onium cation whose atom having a positive charge is not an atom forming a cyclic structure.Type: ApplicationFiled: March 5, 2021Publication date: September 16, 2021Applicant: JSR CORPORATIONInventor: Natsuko Kinoshita
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Publication number: 20200393761Abstract: A radiation-sensitive resin composition includes a polymer, a radiation-sensitive acid generator, and a compound represented by formula (2). The polymer includes a first structural unit including a phenolic hydroxyl group, a second structural unit including a group represented by formula (1), and a third structural unit including an acid-labile group. In the formula (1), R1, R2, R3, R4, R5, and R6 each independently represent a hydrogen atom, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, or a monovalent fluorinated hydrocarbon group having 1 to 10 carbon atoms, wherein at least one of R1, R2, R3, R4, R5, and R6 represents a fluorine atom or a fluorinated hydrocarbon group; RA represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms; and * denotes a binding site to a part other than the group represented by the formula (1).Type: ApplicationFiled: June 10, 2020Publication date: December 17, 2020Applicant: JSR CORPORATIONInventors: Katsuaki NISHIKORI, Ken MARUYAMA, Kazuki KASAHARA, Tsuyoshi FURUKAWA, Natsuko KINOSHITA
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Publication number: 20200102270Abstract: A radiation-sensitive resin composition includes a first polymer including a first structural unit that includes a first acid-labile group; a radiation-sensitive acid generator; and a compound represented by formula (1). n is 1 or 2. R1 represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms in a case in which n is 1. R1 represents a divalent organic group having 1 to 20 carbon atoms in a case in which n is 2. R2 represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms. E represents a group represented by formula (i). R2 and E may taken together represent a ring structure having 3 to 20 ring atoms together with the nitrogen atom. X represents a divalent organic group having 1 to 20 carbon atoms. R3 represents a second acid-labile group.Type: ApplicationFiled: July 11, 2018Publication date: April 2, 2020Applicant: JSR CORPORATIONInventors: Natsuko KINOSHITA, Katsuaki NISHIKORI, Kouta FURUICHI
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Publication number: 20200012194Abstract: Provided are a radiation-sensitive resin composition, a resist pattern-forming method and a polymer component. The radiation-sensitive resin composition contains: a polymer component having a first structural unit that includes a phenolic hydroxyl group and a second structural unit that includes an acid-labile group; and a radiation-sensitive acid generator, wherein, the polymer component satisfies inequality (A), wherein, in the inequality (A), X1 represents a proportion (mol %) of the first structural unit comprised with respect to total structural units constituting the polymer component included in a fraction eluted until a retention time at which a cumulative area accounts for 1% of a total area on a gel permeation chromatography (GPC) elution curve of the polymer component detected by a differential refractometer; and X2 represents a proportion (mol %) of the first structural unit comprised with respect to total structural units constituting the polymer component.Type: ApplicationFiled: June 19, 2019Publication date: January 9, 2020Applicant: JSR CORPORATIONInventors: Motohiro SHIRATANI, Natsuko Kinoshita, Ken Maruyama
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Publication number: 20180319740Abstract: A radiation-sensitive resin composition includes a first polymer including a first structural unit that includes a first acid-labile group; a radiation-sensitive acid generator; and a compound represented by formula (1). n is 1 or 2. R1 represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms in a case in which n is 1. R1 represents a divalent organic group having 1 to 20 carbon atoms in a case in which n is 2. R2 represents a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms. E represents a group represented by formula (i). R2 and E may taken together represent a ring structure having 3 to 20 ring atoms together with the nitrogen atom. X represents a divalent organic group having 1 to 20 carbon atoms. R3 represents a second acid-labile group.Type: ApplicationFiled: July 11, 2018Publication date: November 8, 2018Applicant: JSR CORPORATIONInventors: Natsuko KINOSHITA, Katsuaki NISHIKORI, Kouta FURUICHI
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Publication number: 20180321585Abstract: A radiation-sensitive resin composition includes: a first polymer having a first structural unit that includes an acid-labile group; a radiation-sensitive acid generator; and a first compound capable of forming a salt through a structural change in a molecule thereof upon irradiation with a radioactive ray. Basicity of the first compound preferably changes upon irradiation with a radioactive ray. The first compound preferably generates an acid upon irradiation with a radioactive ray. The first compound is preferably represented by formula (1). In formula (1), Ar1 represents a substituted or unsubstituted heteroarenediyl group having 4 to 30 ring atoms and having at least one nitrogen atom as a ring-constituting atom.Type: ApplicationFiled: July 9, 2018Publication date: November 8, 2018Applicant: JSR CorporationInventor: Natsuko KINOSHITA
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Patent number: 8369777Abstract: A communication apparatus including a first communication unit for communicating with other communication apparatus through electric field coupling or magnetic field coupling, an approach detection unit for detecting an approach between the other communication apparatus and the first communication unit, and a selection unit for, when the other communication apparatus and the first communication unit are separated from each other, selecting different data to be transmitted depending on a time for which the other communication apparatus and the first communication unit were in close proximity to each other.Type: GrantFiled: July 9, 2009Date of Patent: February 5, 2013Assignee: Sony CorporationInventors: Eiko Sugisaki, Natsuko Kinoshita, Jun Iwasaki
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Publication number: 20100048132Abstract: A communication apparatus including a first communication unit for communicating with other communication apparatus through electric field coupling or magnetic field coupling, an approach detection unit for detecting an approach between the other communication apparatus and the first communication unit, and a selection unit for, when the other communication apparatus and the first communication unit are separated from each other, selecting different data to be transmitted depending on a time for which the other communication apparatus and the first communication unit were in close proximity to each other.Type: ApplicationFiled: July 9, 2009Publication date: February 25, 2010Applicant: Sony CorporationInventors: Eiko SUGISAKI, Natsuko KINOSHITA, Jun IWASAKI