Patents by Inventor Naveen CHANNARAYAPATNA PUTTANNA

Naveen CHANNARAYAPATNA PUTTANNA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHIELD CONFIGURATIONS
    Publication number: 20220213590
    Abstract: Methods and apparatus for processing a substrate using improved shield configurations are provided herein. For example, a process kit for use in a physical vapor deposition chamber includes a shield comprising an inner wall with an innermost diameter configured to surround a target when disposed in the physical vapor deposition chamber, wherein a ratio of a surface area of the shield to a planar area of the inner diameter is about 3 to about 10.
    Type: Application
    Filed: March 8, 2021
    Publication date: July 7, 2022
    Inventors: Uday PAI, Yuan XUE, Abhijeet Laxman SANGLE, Vijay Bhan SHARMA, Suresh Chand SETH, Bharatwaj Ramakrishnan, Soundarrajan JEMBULINGAM, Naveen CHANNARAYAPATNA PUTTANNA, Ankur KADAM, Yi YANG