Abstract: A charge pump test configuration and corresponding method of operation are disclosed for determining charge pump efficiency without needing to obtain direct current measurements. A first number of clock edges (CEs) of a clock signal supplied to a first charge pump is determined over a period of time for a predetermined output current. The first charge pump is then connected with a charge pump under test (PUT) in a cascaded manner such that an output current of the first charge pump is supplied to the PUT as an input current. A second number of CEs of a clock signal supplied to the first charge pump is determined over the same period of time for the same predetermined output current from the PUT. The efficiency of the PUT can then be determined as the ratio of the first number of CEs to the second number of CEs, or vice versa.

Abstract: A charge pump test configuration and corresponding method of operation are disclosed for determining charge pump efficiency without needing to obtain direct current measurements. A first number of clock edges (CEs) of a clock signal supplied to a first charge pump is determined over a period of time for a predetermined output current. The first charge pump is then connected with a charge pump under test (PUT) in a cascaded manner such that an output current of the first charge pump is supplied to the PUT as an input current. A second number of CEs of a clock signal supplied to the first charge pump is determined over the same period of time for the same predetermined output current from the PUT. The efficiency of the PUT can then be determined as the ratio of the first number of CEs to the second number of CEs, or vice versa.

Abstract: A fastening assembly for fastening a beam blocker to an extraction plate, the fastening assembly including a mounting pin having a shaft portion, a base portion at a first end of the shaft portion, and a head portion at a second end of the shaft portion, a centering sleeve radially surrounding the shaft portion and axially abutting the base portion, the centering sleeve being radially compressible between the shaft portion and the extraction plate and between the shaft portion and the beam blocker, an annular spacer surrounding the centering sleeve and axially abutting the beam blocker, with the centering sleeve extending partially into the spacer, and a latching cap surrounding the shaft portion and axially abutting the spacer, with the shaft portion extending through a through hole of the latching cap, the through hole being smaller than the head portion in a direction perpendicular to an axis of mounting pin.

Abstract: An ion beam processing apparatus may include a plasma chamber, and a plasma plate, disposed alongside the plasma chamber, where the plasma plate defines a first extraction aperture. The apparatus may include a beam blocker, disposed within the plasma chamber and facing the extraction aperture. The apparatus may further include a non-planar electrode, disposed adjacent the beam blocker and outside of the plasma chamber; and an extraction plate, disposed outside the plasma plate, and defining a second extraction aperture, aligned with the first extraction aperture.

Abstract: An ion beam processing apparatus may include a plasma chamber, and a plasma plate, disposed alongside the plasma chamber, where the plasma plate defines a first extraction aperture. The apparatus may include a beam blocker, disposed within the plasma chamber and facing the extraction aperture. The apparatus may further include a non-planar electrode, disposed adjacent the beam blocker and outside of the plasma chamber; and an extraction plate, disposed outside the plasma plate, and defining a second extraction aperture, aligned with the first extraction aperture.