Abstract: A piezoelectric wavefront modulator is disclosed having mirror actuators including a first and second layer of piezoelectric material, both internally polarized in a given direction, together with electrode means for increasing the internal electric field in one layer while decreasing the internal electric field in the other layer. As the layers are clamped to the modulator support elements at opposite edges, the degree of bending of the layers may be carefully controlled to cause pusher elements to actuate a mirror, which mirror is oriented parallel to the major surfaces of the top layer of piezoelectric material.

Abstract: A wavefront modulator includes a multiple layer unitary block of a piezoelectric medium having a mirror bonded to the uppermost surface of the block. First and second sets of electrodes are formed within the block at each of a plurality of discrete electrically-addressable locations, such that the electrodes of the first set are positioned at one side of each of the layers, and the electrodes of the second set are positioned at opposite sides of each of the layers in order to increase the sensitivity of response of the modulator to in turn decrease the requisite driving or control voltages. The first and second sets of electrodes are offset with respect to each other to provide for ease of electrical access to each electrode of each set.

Abstract: A piezoelectric wavefront modulator employs a plurality of widely-separated posts, which are formed upon the upper portion of a monolithic piezoelectric medium and are affixed to the lower portion of a flexible mirror. The posts extend from the top surface of the piezoelectric medium a sufficient distance, so that the mirror floats. The posts are surrounded by moats formed within the medium, which are configured to produce a highly sensitive device, wherein the post mirror actuators are substantially electromechanically isolated from each other, but not from the piezoelectric material adjacent the moat.