Abstract: Embodiments of the invention generally provide an electron beam substrate processing system. In one embodiment, the present invention provides an electron beam substrate processing system where a spindle shaft used to rotate substrates during processing includes at least one optical encoder wheel assembly. The optical encoder wheel assembly is configured to provide rotational speed data signal to a rotational speed control system and a pattern generation clock circuit configured to a provide a corrected pattern generator clock signal to a pattern generator circuit. The pattern generation circuit is used to control modulation of an electron beam used for substrate processing. In one aspect of the present invention, repeatable deviations of the rotational speed are measured and processed during substrate processing to correct for such repeatable deviations to increase substrate pattern writing accuracy.

Abstract: A system and method for replicating magnetic patterns on hard disk media includes a mask located over or above a magnetic recording layer. The recording layer may include a single, dual, or multi-layer recording layer. A pattern is or has been formed in the mask, where the pattern defines the recordable regions and the non-recordable regions to be created in one or more layers within the recording layer. Portions of the recording layer are then exposed. An etch may then be performed to create grooves within one or more layers in the exposed regions of the recording layer. The magnetic properties of at least one layer in the exposed portions of the recording layer are then altered in order to create recordable or non-recordable regions. The mask is then removed from the recording layer.

Abstract: A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of: (a) providing a substrate/workpiece comprising a topographically patterned surface including a plurality of projections and depressions corresponding to a pattern to be formed in a surface of the recording medium; (b) forming a thin release layer in conformal contact with the topographically patterned surface by means of a dry process; (c) forming a thicker layer of a material in conformal contact with the thin passivation layer on the topographically patterned surface; and (d) separating the thicker layer of material from the topographically patterned surface to form therefrom a stamper/imprinter including an imprinting surface having a negative image replica of the topographically patterned surface, separation of the thicker layer of material from the topographically patterned surface being facilitated by the thin release layer formed by the dry process.

Abstract: A method of manufacturing a magnetic recording medium comprises steps of providing a non-magnetic substrate having at least one surface; forming a layer of a sol-gel on the surface, partially drying the sol-gel layer at room temperature to remove a portion of the solvent therein to form a partially dried sol-gel layer of hardness less than that of the substrate; mechanically texturing the surface of the partially dried sol-gel layer; and depositing a layer stack including at least one magnetic layer thereover. Embodiments of the invention include embossing a servo pattern in the as-deposited sol-gel layer prior to partial drying and mechanically texturing, followed by sintering at an elevated temperature to form a substantially fully dried layer having a density and hardness similar to that of glass, and formation of a thin film magnetic media layer stack thereon.

Abstract: A system and method for forming servo patterns on magnetic media is disclosed. A magnetic film coated with a layer of polystyrene is stamped with a nickel stamper reproducing the negative image of the stamped pattern on the polystyrene. Ions are then accelerated towards the surface of the polystyrene, which stopps the ions in the areas where the polystyrene is thick and allows the ions to penetrate through to the magnetic layer in the areas where the polystyrene is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped polystyrene pattern on the magnetic layer. The polystyrene is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic media.

Abstract: A method of performing imprint lithography of a surface of a workpiece including a substrate, wherein a stamper/imprinter comprised of a material having thermal expansion characteristics different from the material of said substrate is utilized for embossing a desired pattern in said workpiece surface, the method comprising conducting the embossing at room temperature in order to avoid deleterious effects arising from differences in thermal expansion/contraction characteristics between the stamper/imprinter and the workpiece which occur during conventional imprinting at elevated temperatures. Embodiments of the invention include forming servo patterns in disk-shaped substrates utilized in the manufacture of hard disk magnetic recording media.

Abstract: A method of manufacturing a magnetic recording medium comprises steps of providing a non-magnetic substrate having at least one surface; forming a layer of a sol-gel on the surface, partially drying the sol-gel layer at room temperature to remove a portion of the solvent therein to form a partially dried sol-gel layer of hardness less than that of the substrate; mechanically texturing the surface of the partially dried sol-gel layer; and depositing a layer stack including at least one magnetic layer thereover. Embodiments of the invention include embossing a servo pattern in the as-deposited sol-gel layer prior to partial drying and mechanically texturing, followed by sintering at an elevated temperature to form a substantially fully dried layer having a density and hardness similar to that of glass, and formation of a thin film magnetic media layer stack thereon.

Abstract: A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of:

Abstract: A method of manufacturing a magnetic recording medium comprises steps of providing a non-magnetic substrate having at least one surface; forming a layer of a sol-gel on the surface, partially drying the sol-gel layer at room temperature to remove a portion of the solvent therein to form a partially dried sol-gel layer of hardness less than that of the substrate; mechanically texturing the surface of the partially dried sol-gel layer; and depositing a layer stack including at least one magnetic layer thereover. Embodiments of the invention include embossing a servo pattern in the as-deposited sol-gel layer prior to partial drying and mechanically texturing, followed by sintering at an elevated temperature to form a substantially fully dried layer having a density and hardness similar to that of glass, and formation of a thin film magnetic media layer stack thereon.

Abstract: A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of: (a) providing a non-magnetic substrate including at least one major surface; (b) providing a stamper having a surface with a plurality of recesses forming a negative image of a servo pattern; (c) forming a layer of a partially dried sol-gel material having a first surface in conformal contact with the recess-patterned surface of the stamper and an exposed second surface opposite the first surface; (d) urging the major surface of the substrate into contact with the exposed second surface of the sol-gel layer; (e) removing the stamper from contact with the layer of sol-gel material to expose the recess-patterned surface thereof; (f) converting the partially dried sol-gel layer to a glass-like layer while preserving the recess pattern in the surface thereof; and (f) forming on the recess-patterned surface a laminate of layers constituting a servo-patterned magnetic recording medium.

Abstract: A method of manufacturing a magnetic recording medium comprises steps of providing a non-magnetic substrate for a magnetic recording medium, the substrate including at least one major surface; forming a layer of a sol-gel on the at least one major surface; forming a pattern, e.g., a servo pattern in an exposed surface of the layer of said sol-gel; and converting the layer of sol-gel to a glass or glass-like layer while preserving the pattern in an exposed surface of said glass or glass-like layer. Embodiments of the invention include magnetic media including a patterned glass or glass-like layer formed from a layer of a hydrophilic sol-gel with the pattern embossed therein by means of a stamper having a hydrophilic surface including a negative image of the pattern.

Abstract: A method of manufacturing a magnetic recording medium comprises steps of providing a non-magnetic substrate for a magnetic recording medium, the substrate including at least one major surface; forming a layer of a sol-gel on the at least one major surface; forming a pattern, e.g., a servo pattern in an exposed surface of the layer of said sol-gel; and converting the layer of sol-gel to a glass or glass-like layer while preserving the pattern in an exposed surface of said glass or glass-like layer. Embodiments of the invention include magnetic media including a patterned glass or glass-like layer formed from a layer of a hydrophilic sol-gel with the pattern embossed therein by means of a stamper having a hydrophilic surface including a negative image of the pattern.

Abstract: In a beam lithography operation the relative motion between a work piece and the exposure beam produces variations in linear speed at different regions of the work piece surface. For example, if a disk work piece rotates with a constant angular velocity (CAV) relative to the beam, the linear surface speed relative to the beam impact point increases in proportion to increasing radial distance of that point from the center of the disk. To provide uniform exposure dose, the duty cycle of pulses of the exposure beam are varied in accord with radial distance.

Abstract: Hard disk servo data is recorded on a stamper master or a hard disk with a timing offset that converts the arc described by the servo data writer's rotary actuator into the arc described by the disk drive's rotary actuator.

Abstract: A method of manufacturing a magnetic recording medium comprises steps of providing a non-magnetic substrate for a magnetic recording medium, the substrate including at least one major surface; forming a layer of a sol-gel on the at least one major surface; forming a pattern, e.g., a servo pattern in an exposed surface of the layer of said sol-gel; and converting the layer of sol-gel to a glass or glass-like layer while preserving the pattern in an exposed surface of said glass or glass-like layer. Embodiments of the invention include magnetic media including a patterned glass or glass-like layer formed from a layer of a hydrophilic sol-gel with the pattern embossed therein by means of a stamper having a hydrophilic surface including a negative image of the pattern.

Abstract: A system and method for forming servo patterns on magnetic medium is disclosed. A magnetic film coated with a layer of styrene-acrylonitrile is stamped with a nickel stamper reproducing the negative image of the stamper pattern on the styrene-acrylonitrile. Ions are then accelerated towards the surface of the styrene-acrylonitrile, which stops the ions in the areas where the styrene-acrylonitrile is thick and allows the ions to penetrate through to the magnetic layer in the areas where the styrene-acrylonitrile is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped styrene-acrylonitrile pattern on the magnetic layer. The styrene-acrylonitrile is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic medium.

Abstract: A system and method for forming servo patterns on magnetic media is disclosed. A magnetic film coated with a layer of polystyrene is stamped with a nickel stamper reproducing the negative image of the stamped pattern on the polystyrene. Ions are then accelerated towards the surface of the polystyrene, which stopps the ions in the areas where the polystyrene is thick and allows the ions to penetrate through to the magnetic layer in the areas where the polystyrene is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped polystyrene pattern on the magnetic layer. The polystyrene is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic media.

Abstract: A method of manufacturing a magnetic recording medium comprises steps of: (a) preparing a sol solution containing gel particles; (b) treating the sol solution to remove gel particles having a size greater than a predetermined maximum size; (c) providing a non-magnetic substrate for a magnetic recording medium, the substrate including a surface; and (d) applying a layer of the treated sol solution to the surface of the substrate; (e) converting the layer of treated sol solution to a layer of sol-gel having a hardness less than that of the surface of the substrate, an exposed surface of the layer of sol-gel having very low surface micro-waviness and substantially no defects in the form of protrusions or bumps; (f) forming a pattern in the exposed surface of the layer of sol-gel; (g) converting the layer of sol-gel to a glass or glass-like layer having a density and hardness substantially comparable to that of the surface of the substrate, while preserving the pattern formed in an exposed surface of the g

Abstract: A magnetic recording disc is provided according to the present invention for magnetic recording. The magnetic recording disc includes a disc substrate having a locking pattern etched therein. Chemically synthesized iron-platinum particles are provided in the locking pattern and completely fill the locking pattern. The chemically synthesized iron-platinum nanoparticles exhibit short-range order characteristics forming self organized magnetic arrays.

Abstract: A storage media is provided. The surface of the media is made to vary by an insubstantial amount relative to a datum to provide for improved flyability of a head over the surface.