Patents by Inventor Neil E. Hanson

Neil E. Hanson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monitoring dimensions of features at different locations in the processing of substrates
    Patent number: 6829056
    Abstract: A substrate processing apparatus has a chamber having a substrate support, gas distributor, gas energizer, and gas exhaust port. A process monitor is provided to monitor features in a first region of the substrate and generate a corresponding first signal, and to monitor features in a second region of the substrate and generate a second signal. A chamber controller receives and evaluates the first and second signals, and operates the chamber in relation to the signals. For example, the chamber controller can select a process recipe depending upon the signal values. The chamber controller can also set a process parameter at a first level in a first processing sector and at a second level in a second processing sector. The apparatus provides a closed control loop to independently monitor and control processing of features at different regions of the substrate.
    Type: Grant
    Filed: August 21, 2003
    Date of Patent: December 7, 2004
    Inventors: Michael Barnes, John Holland, Hongqing Shan, Bryan Y. Pu, Mohit Jain, Zhifeng Sui, Michael D. Armacost, Neil E. Hanson, Diana Xiaobing Ma, Ashok K. Sinha, Dan Maydan