Abstract: A method of fabricating a needle via conformal deposition in a two-piece mold includes the step of attaching a top mold member to a bottom mold member such that the top mold member and the bottom mold member define an enclosed, elongated needle trench with a deposition aperture. A conformal substance, such as polysilicon, is then passed through the deposition aperture such that the conformal substance is deposited within the enclosed, elongated needle trench to form a needle. The method is used to form needles with prongs, multiple channels, multiple ports, barbs, strength enhancement features, and circuitry.

Abstract: A microfabricated valve includes a substrate with a fluid path. A main cantilever is positionable in a resting closed state to prevent fluid movement through the fluid path and a resting open state that allows fluid movement through the fluid path. A ratchet cantilever supports the main cantilever in either the resting closed state or the resting open state, such that the main cantilever does not have to be energized to maintain the resting closed state or the resting open state. A valve state transition mechanism selectively energizes the main cantilever or the ratchet cantilever during a valve state transition period to selectively transition between the resting open and closed states.