Patents by Inventor Neil Hendricks
Neil Hendricks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20070003457Abstract: An ultra-efficient multilobal cross-sectioned fiber filter for chemical contaminant filtering applications is described. An absorptive chemically reactive reagent, preferably an acid or base and in liquid or an adsorptive chemically reactive reagent (an acid or base) in solid form, is disposed within longitudinal slots in each length of fiber. The reagent may be used alone or in conjunction with solid adsorptive particles which may also be utilized with the reagents in the longitudinal slots within the fibers. Reagents within the fibers remain exposed to a base-contaminated airstream passing through the filter. Base contaminants in the airstream, chemicals such as ammonium and amines (as well as particles), react with the acid reagent within the longitudinal slots of the fibers. As the contaminant and reagent react, the ammonium or amine becomes irreversibly absorbed (or adsorbed if reagent is a solid acid) to the liquid acid reagent and multilobal fiber.Type: ApplicationFiled: August 28, 2003Publication date: January 4, 2007Inventors: Ron Rohrbach, Dan Bause, Peter Unger, Neil Hendricks, Jeff Miller, Adel Tannous, Randy LeClaire, William McGeever
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Publication number: 20050214188Abstract: An ultra-efficient multilobal cross-sectioned fiber filter for chemical contaminant filtering applications is described. An absorptive chemically reactive reagent, preferably an acid or base and in liquid or an adsorptive chemically reactive reagent (an acid or base) in solid form, is disposed within longitudinal slots in each length of fiber. The reagent may be used alone or in conjunction with solid adsorptive particles which may also be utilized with the reagents in the longitudinal slots within the fibers. Reagents within the fibers remain exposed to a base-contaminated airstream passing through the filter. Base contaminants in the airstream, chemicals such as ammonium and amines (as well as particles), react with the acid reagent within the longitudinal slots of the fibers. As the contaminant and reagent react, the ammonium or amine becomes irreversibly absorbed (or adsorbed if reagent is a solid acid) to the liquid acid reagent and multilobal fiber.Type: ApplicationFiled: August 19, 2004Publication date: September 29, 2005Inventors: Ron Rohrbach, Dan Bause, Peter Unger, Jeff Miller, Neil Hendricks, Adel Tannous, Randy Le Claire, William McGeever
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Patent number: 6610114Abstract: An oxidizing slurry for removal of low dielectric constant materials. The slurry is formed utilizing non-oxidizing particles with a separate oxidizing agent, oxidizing particles alone or reducible abrasive particles with a compatible oxidizing agent. The particles can be formed of a metal oxide, nitride, or carbide material, by itself or mixtures thereof, or can be coated on a core material such as silicon dioxide or can be coformed therewith. A preferred oxidizing slurry is multi-modal in particle size distribution. Although developed for utilization in CMP semiconductor processing the oxidizing slurry of the present invention also can be utilized for other high precision polishing processes.Type: GrantFiled: June 14, 2001Date of Patent: August 26, 2003Assignee: Honeywell International Inc.Inventors: Dan Towery, Neil Hendricks, Paul Schilling, Tian-An Chen
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Patent number: 6610145Abstract: A process for forming a uniform nanoporous dielectric film on a substrate. The process includes horizontally positioning a flat substrate within a cup; depositing a liquid alkoxysilane composition onto the substrate surface; covering the cup such that the substrate is enclosed therein; spinning the covered cup and spreading the alkoxysilane composition evenly on the substrate surface; exposing the alkoxysilane composition to water vapor and base vapor to thereby form a gel; and then curing the gel. The invention also provides an apparatus for spin depositing a liquid coating onto a substrate. The apparatus has a cylindrical cup with an open top section and removable cover which closes the top. A vapor injection port extends through the center of the cover. Suitable means hold a substrate centered within the cup and spin the cup.Type: GrantFiled: September 19, 2001Date of Patent: August 26, 2003Assignee: AlliedSignal Inc.Inventors: Neil Hendricks, Douglas M. Smith, Teresa Ramos, James Drage
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Publication number: 20020086166Abstract: Improved processes for forming hydrophobic nanoporous dielectric coatings on substrates are provided. The improved processes involve forming a reaction mixture that combines at least one mono-, di- or trifunctional precursor with at least one tetrafunctional precursor, recovering the reaction product, and then depositing the reaction product onto a suitable substrate, followed by gelling of the deposited film. Precursors include alkoxy, acetoxy and halogen leaving groups.Type: ApplicationFiled: August 23, 1999Publication date: July 4, 2002Inventors: NEIL HENDRICKS, DOUGLAS M. SMITH, TERESA RAMOS, STEPHEN WALLACE, JAMES DRAGE
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Patent number: 6410149Abstract: Improved processes for forming hydrophobic nanoporous dielectric coatings on substrates are provided. The improved processes involve forming a reaction mixture that combines at least one mono-, di- or trifunctional precursor with at least one tetrafunctional precursor, recovering the reaction product, and then depositing the reaction product onto a suitable substrate, followed by gelling of the deposited film. Precursors include alkoxy, acetoxy and halogen leaving groups.Type: GrantFiled: August 23, 1999Date of Patent: June 25, 2002Assignee: AlliedSignal Inc.Inventors: Neil Hendricks, Douglas M. Smith, Teresa Ramos, Stephen Wallace, James Drage
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Publication number: 20020028166Abstract: An ultra-efficient multilobal cross-sectioned fiber filter for chemical contaminant filtering applications is described. An absorptive chemically reactive reagent, preferably an acid or base and in liquid or an adsorptive chemically reactive reagent (an acid or base) in solid form, is disposed within longitudinal slots in each length of fiber. The reagent may be used alone or in conjunction with solid adsorptive particles which may also be utilized with the reagents in the longitudinal slots within the fibers. Reagents within the fibers remain exposed to a base-contaminated airstream passing through the filter. Base contaminants in the airstream, chemicals such as ammonium and amines (as well as particles), react with the acid reagent within the longitudinal slots of the fibers. As the contaminant and reagent react, the ammonium or amine becomes irreversibly absorbed (or adsorbed if reagent is a solid acid) to the liquid acid reagent and multilobal fiber.Type: ApplicationFiled: April 12, 2001Publication date: March 7, 2002Inventors: Neil Hendricks, Jeff Miller, Ron Rohrbach, Dan Bause, Peter Unger, Adel Tannous, Randy Leclaire, William McGeever
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Publication number: 20020019145Abstract: A process for forming a uniform nanoporous dielectric film on a substrate. The process includes horizontally positioning a flat substrate within a cup; depositing a liquid alkoxysilane composition onto the substrate surface; covering the cup such that the substrate is enclosed therein; spinning the covered cup and spreading the alkoxysilane composition evenly on the substrate surface; exposing the alkoxysilane composition to water vapor and base vapor to thereby form a gel; and then curing the gel. The invention also provides an apparatus for spin depositing a liquid coating onto a substrate. The apparatus has a cylindrical cup with an open top section and removable cover which closes the top. A vapor injection port extends through the center of the cover. Suitable means hold a substrate centered within the cup and spin the cup.Type: ApplicationFiled: September 19, 2001Publication date: February 14, 2002Inventors: Neil Hendricks, Douglas M. Smith, Teresa Ramos, James Drage
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Patent number: 6335296Abstract: A process for forming a uniform nanoporous dielectric film on a substrate. The process includes horizontally positioning a flat substrate within a cup; depositing a liquid alkoxysilane composition onto the substrate surface; covering the cup such that the substrate is enclosed therein; spinning the covered cup and spreading the alkoxysilane composition evenly on the substrate surface; exposing the alkoxysilane composition to water vapor and base vapor to thereby form a gel; and then curing the gel. The invention also provides an apparatus for spin depositing a liquid coating onto a substrate. The apparatus has a cylindrical cup with an open top section and removable cover which closes the top. A vapor injection port extends through the center of the cover. Suitable means hold a substrate centered within the cup and spin the cup.Type: GrantFiled: July 23, 1999Date of Patent: January 1, 2002Assignee: AlliedSignal Inc.Inventors: Neil Hendricks, Douglas M. Smith, Teresa Ramos, James Drage
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Patent number: 6319855Abstract: A process for forming a uniform nanoporous dielectric film on a substrate. The process includes horizontally positioning a flat substrate within a cup; depositing a liquid alkoxysilane composition onto the substrate surface; covering the cup such that the substrate is enclosed therein; spinning the covered cup and spreading the alkoxysilane composition evenly on the substrate surface; exposing the alkoxysilane composition to water vapor and base vapor to thereby form a gel; and then curing the gel. The invention also provides an apparatus for spin depositing a liquid coating onto a substrate. The apparatus has a cylindrical cup with an open top section and removable cover which closes the top. A vapor injection port extends through the center of the cover. Suitable means hold a substrate centered within the cup and spin the cup.Type: GrantFiled: November 22, 2000Date of Patent: November 20, 2001Assignee: AlliedSignal, Inc.Inventors: Neil Hendricks, Douglas M. Smith, Teresa Ramos, James Drage
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Patent number: 5986045Abstract: A method is disclosed for making hydroxy-substituted ethynylated biphenyl compounds and for reacting such compounds with a family of noncross-linking thermosetting poly(arylene ethers) to produce novel poly(arylene ether) compositions which, when cured at glass transition temperatures greater than about 350.degree. C. to form thin films, possess properties such as low dielectric constant, low moisture absorption, and high thermal stability. These films are suitable for use as intermetal dielectrics for multilevel interconnection.Type: GrantFiled: June 14, 1996Date of Patent: November 16, 1999Assignee: AlliedSignal Inc.Inventors: Kreisler Lau, Neil Hendricks, William Wan, Aaron Smith
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Patent number: 5959157Abstract: A process for making ethynylated, hydroxy-substituted biphenyl compounds comprising:a) halogenating 3,3'-dimethoxybiphenyl to form 2,2'-dihalo-5,5'-dimethoxybiphenyl;b) reacting the resulting 2,2'-dihalo-5,5'-dimethoxybiphenyl with a bromide-containing compound in a chlorinated solvent to form 2,2'-dihalo-5,5'-dihydroxybiphenyl;c) reacting the resulting 2,2'-dihalo-5,5'-dihydroxybiphenyl with a hydroxyl-containing compound in the presence of a protection catalyst to form 2,2'-dihalo-5,5'-bis(tetrahydropyranoxy)biphenyl;d) ethynylating the resulting 2,2'-dihalo-5,5'-bis(tetrahydropyranoxy)biphenyl with a compound of the formulaCuC.tbd.CR'wherein R' is comprised of an alkyl group having from about 1 to about 20 carbon atoms, an alkenyl group having from about 1 to about 20 carbon atoms, an aryl group, a heteroaryl group, or mixtures thereof to form 2,2'-bis(C.tbd.CR')-5,5'-bis(tetrahydropyranoxy)biphenyl; ande) hydrolyzing the resulting 2,2'-bis(C.tbd.Type: GrantFiled: June 14, 1996Date of Patent: September 28, 1999Assignee: Alliedsignal, Inc.Inventors: Kreisler Lau, Neil Hendricks, William Wan, Aaron Smith
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Patent number: RE37599Abstract: A method is disclosed for making hydroxy-substituted ethynylated biphenyl compounds and for reacting such compounds with a family of noncross-linking thermosetting poly(arylene ethers) to produce novel poly(arylene ether) compositions which, when cured at glass transition temperatures greater than about 350° C. to form thin films, possess properties such as low dielectric constant, low moisture absorption, and high thermal stability. These films are suitable for use as intermetal dielectrics for multilevel interconnection.Type: GrantFiled: September 8, 2000Date of Patent: March 19, 2002Assignee: AlliedSignal Inc.Inventors: Kreisler Lau, Neil Hendricks, William Wan, Aaron Smith