Patents by Inventor Neil L. Clarke

Neil L. Clarke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion sources for ion implantation apparatus
    Patent number: 6818909
    Abstract: The invention relates to an ion source for an ion implanter in which source material for providing desired ions is provided in the form of a plate or liner which can be fitted into the reactant chamber of the ion source.
    Type: Grant
    Filed: November 7, 2003
    Date of Patent: November 16, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Adrian Murrell, Peter Michael Banks, Andrew Allen, Neil L. Clarke, Matthew Peter Dobson
  • Ion sources for ion implantation apparatus
    Publication number: 20040144932
    Abstract: The invention relates to an ion source for an ion implanter in which source material for providing desired ions is provided in the form of a plate or liner which can be fitted into the reactant chamber of the ion source.
    Type: Application
    Filed: November 7, 2003
    Publication date: July 29, 2004
    Inventors: Adrian Murrell, Peter Michael Banks, Andrew Allen, Neil L. Clarke, Matthew Peter Dobson
  • Ion sources for ion implantation apparatus
    Patent number: 6686601
    Abstract: The invention relates to an ion source for an ion implanter in which source material for providing desired ions is provided in the form of a plate or liner which can be fitted into the reactant chamber of the ion source.
    Type: Grant
    Filed: December 2, 2002
    Date of Patent: February 3, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Adrian Murrell, Peter Michael Banks, Andrew Allen, Neil L. Clarke, Matthew Peter Dobson
  • Ion sources for ion implantation apparatus
    Publication number: 20030122089
    Abstract: The invention relates to an ion source for an ion implanter in which source material for providing desired ions is provided in the form of a plate or liner which can be fitted into the reactant chamber of the ion source.
    Type: Application
    Filed: December 2, 2002
    Publication date: July 3, 2003
    Inventors: Adrian Murrell, Peter Michael Banks, Andrew Allen, Neil L. Clarke, Matthew Peter Dobson