Abstract: A chuck body defines an axial bore for receiving an object or material to be chucked. A radially inclined bore that opens at least partially into an axial bore is provided in the chuck body. A chuck stopper is fitted into the radially inclined bore such that the chuck stopper extends at least partially into the axial bore to engage the object or material to be chucked. An axis of the radially inclined bore forms a non-zero angle &agr; other than ninety degrees with respect to an axis A of the axial bore. The angle &agr; is between zero and ninety degrees, preferably, between about forty-five and ninety degrees. Various means for maintaining the chuck stopper in the radially inclined bore in a desired chucking position may be used.

Abstract: A graphite material coated with silicon carbide which exhibits superior physical impact resistance and can be manufactured at low cost. The material includes a graphite substrate coated with a silicon carbide film with a thickness of 30-50 &mgr;m, wherein a mixed layer of graphite and silicon carbide with a thickness of 10-500 &mgr;m is provided from the interface of the graphite substrate and the silicon carbide film through the inside of the graphite substrate, and the silicon carbide film has a peel strength of 5 Mpa or more. The silicon carbide film is attached preferably by the CVD method and is suitably used as a material for an apparatus for drawing-up single crystals of silicon.