Patents by Inventor Nelson Saks

Nelson Saks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4568189
    Abstract: An apparatus and method for aligning a mask and wafer in the fabrication of ntegrated circuits utilizing alignment patterns on the mask and wafer. Each alignment pattern comprises a plurality of parallel alignment marks which are spaced from one another such that the patterns may be superimposed so that the marks of one pattern are positioned between marks of the other pattern. When the patterns are misaligned, a moire pattern is produced which disappears on alignment. The marks of each pattern are also disparately spaced from one another, permitting a gross to fine alignment. In aligning the patterns, each mark of one pattern is positioned between pairs of marks of the other pattern in an order corresponding to the widths of spaces defined between marks of the other pattern, progressing from the largest space width, giving gross alignment, to the smallest, giving fine alignment.
    Type: Grant
    Filed: September 26, 1983
    Date of Patent: February 4, 1986
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: John F. Bass, Nelson Saks, Martin Peckerar