Patents by Inventor Nety M. Krishna
Nety M. Krishna has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20100255660Abstract: A method of forming a solar cell incorporating a compound semiconductor is provided. The compound semiconductor is generally of the “II/VI” variety, and is formed by depositing one or more group II elements in a vapor deposition process, and then contacting the deposited layer with a liquid bath of the group VI elements. The liquid bath may comprise a pure element or a mixture of elements. The contacting is performed under a non-reactive atmosphere, or vacuum, and any fugitive vapors may be captured by a cold trap and recycled. The substrate may be subsequently annealed to remove any excess of the group VI elements, which may be similarly recycled.Type: ApplicationFiled: April 6, 2010Publication date: October 7, 2010Applicant: APPLIED MATERIALS, INC.Inventors: Kaushal K. Singh, Ralf Hofmann, Nety M. Krishna
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Publication number: 20100252108Abstract: Methods for fabrication of copper delafossite materials include a low temperature sol-gel process for synthesizing CuBO2 powders, and a pulsed laser deposition (PLD) process for forming thin films of CuBO2, using targets made of the CuBO2 powders. The CuBO2 thin films are optically transparent p-type semiconductor oxide thin films. Devices with CuBO2 thin films include p-type transparent thin film transistors (TTFT) comprising thin film CuBO2, as a channel layer and thin film solar cells with CuBO2 p-layers. Solid state dye sensitized solar cells (SS-DSSC) comprising CuBO2 in various forms, including “core-shell” and “nano-couple” particles, and methods of manufacture, are also described.Type: ApplicationFiled: December 21, 2009Publication date: October 7, 2010Applicant: APPLIED MATERIALS, INC.Inventors: Kaushal K. Singh, Omkaram Nalamasu, Nety M. Krishna, Michael Snure, Ashutosh Tiwari
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Publication number: 20100208326Abstract: A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.Type: ApplicationFiled: May 3, 2010Publication date: August 19, 2010Applicant: APPLIED MATERIALS, INC.Inventors: Byung-Sung Leo KWAK, Dieter HAAS, Stefan BANGERT, Nety M. KRISHNA, Winfried HOFFMANN
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Publication number: 20100190290Abstract: Embodiments of the present invention generally provide methods for forming conductive structures on the surfaces of a solar cell. In one embodiment, conductive structures are formed on the front surface of a solar cell by depositing a sacrificial polymer layer, forming patterned lines in the sacrificial polymer via a fluid jet, depositing metal layers over the front surface of the solar cell, and performing lift off of the metal layers deposited over the sacrificial polymer by dissolving the sacrificial polymer with a water based solvent.Type: ApplicationFiled: November 24, 2009Publication date: July 29, 2010Applicant: APPLIED MATERIALS, INC.Inventors: Virendra V.S. Rana, Chris Eberspacher, Karl J. Armstrong, Nety M. Krishna
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Publication number: 20100175755Abstract: Methods for fabrication of copper delafossite materials include a low temperature sol-gel process for synthesizing CuBO2 powders, and a pulsed laser deposition (PLD) process for forming thin films of CuBO2, using targets made of the CuBO2 powders. The CuBO2 thin films are optically transparent p-type semiconductor oxide thin films. Devices with CuBO2 thin films include p-type transparent thin film transistors (TTFT) comprising thin film CuBO2 as a channel layer and thin film solar cells with CuBO2 p-layers. Solid state dye sensitized solar cells (SS-DSSC) comprising CuBO2 in various forms, including “core-shell” and “nano-couple” particles, and methods of manufacture, are also described.Type: ApplicationFiled: December 21, 2009Publication date: July 15, 2010Applicant: APPLIED MATERIALS, INC.Inventors: Kaushal K. SINGH, Omkaram NALAMASU, Nety M. KRISHNA, Michael SNURE, Ashutosh TIWARI
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Patent number: 7710671Abstract: A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.Type: GrantFiled: December 12, 2008Date of Patent: May 4, 2010Assignee: Applied Materials, Inc.Inventors: Byung-Sung Leo Kwak, Dieter Haas, Stefan Bangert, Nety M. Krishna, Winfried Hoffmann
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Publication number: 20100101829Abstract: This invention provides an optically transparent conductive layer with a desirable combination of low electrical sheet resistance and good optical transparency. The conductive layer comprises a multiplicity of magnetic nanowires in a plane, the nanowires being aligned roughly (1) parallel to each other and (2) with the long axes of the nanowires in the plane of the layer, the nanowires further being configured to provide a plurality of continuous conductive pathways, and wherein the density of the multiplicity of magnetic nanowires allows for substantial optical transparency of the conductive layer. Furthermore, the conductive layer can include an optically transparent continuous conductive film, wherein the multiplicity of magnetic nanowires are electrically connected to the continuous conductive film.Type: ApplicationFiled: October 24, 2008Publication date: April 29, 2010Inventors: Steven VERHAVERBEKE, Omkaram Nalamasu, Nety M. Krishna
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Publication number: 20100098873Abstract: A method for patterning a magnetic thin film on a substrate includes: providing a pattern about the magnetic thin film, with selective regions of the pattern permitting penetration of energized ions of one or more elements. Energized ions are generated with sufficient energy to penetrate selective regions and a portion of the magnetic thin film adjacent the selective regions. The substrate is placed to receive the energized ions. The portions of the magnetic thin film are rendered to exhibit a magnetic property different than selective other portions. A method for patterning a magnetic media with a magnetic thin film on both sides of the media is also disclosed.Type: ApplicationFiled: October 22, 2008Publication date: April 22, 2010Inventors: STEVEN VERHAVERBEKE, Omkaram Nalamasu, Majeed Foad, Mahalingam Venkatesan, Nety M. Krishna
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Publication number: 20100096256Abstract: A method for patterning a magnetic thin film on a substrate includes: providing a pattern about the magnetic thin film, with selective regions of the pattern permitting penetration of energized ions of one or more elements. Energized ions are generated with sufficient energy to penetrate selective regions and a portion of the magnetic thin film adjacent the selective regions. The substrate is placed to receive the energized ions. The portion of the magnetic thin film is subjected to thermal excitation. The portions of the magnetic thin film are rendered to exhibit a magnetic property different than selective other portions. A method for patterning a magnetic media with a magnetic thin film on both sides of the media is also disclosed.Type: ApplicationFiled: October 22, 2008Publication date: April 22, 2010Inventors: OMKARAM NALAMASU, Steven Verhaverbeke, Majeed Foad, Mahalingam Venkatesan, Nety M. Krishna
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Publication number: 20090293909Abstract: The invention relates to a cleaning method in which from a vacuum coating chamber (3) of a coating installation (1) for the coating of substrates (2) with alkali- or alkaline earth-metals, residues of alkali- or alkaline earth-metals are removed. For this purpose into the chamber (3) a gas from the group of N2, O2 or air is introduced, which reacts with the alkali- or alkaline earth-metals to form the corresponding solid compounds. Water can additionally be introduced into the vacuum coating chamber (3). After the alkali- or alkaline earth-metals have reacted with the gas, the corresponding solid compound is removed from the vacuum coating chamber.Type: ApplicationFiled: May 30, 2008Publication date: December 3, 2009Inventors: STEFAN BANGERT, Jose Manuel Dieguez-Campo, Michael Koenig, Nety M. Krishna, Byung-Sung Leo Kwak
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Publication number: 20090293810Abstract: The invention relates to an arrangement for coating a substrate (4) by means of a vapor distributor (3). This vapor distributor (3) is connected with a vaporizer crucible (7) via an inlet (5). At least one valve (13) is disposed between the crucible (7) and the inlet (5). The vaporizer crucible (7) is located in a chamber (12) which can be evacuated or flooded by means of a vacuum valve (11).Type: ApplicationFiled: May 30, 2008Publication date: December 3, 2009Inventors: STEFAN BANGERT, Jose Manuel Dieguez-Campo, Michael Koenig, Nety M. Krishna, Byung-Sung Leo Kwak
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Publication number: 20090199768Abstract: A method for defining magnetic domains in a magnetic thin film on a substrate, includes: coating the magnetic thin film with a resist; patterning the resist, wherein areas of the magnetic thin film are substantially uncovered; and exposing the magnetic thin film to a plasma, wherein plasma ions penetrate the substantially uncovered areas of the magnetic thin film, rendering the substantially uncovered areas non-magnetic.Type: ApplicationFiled: February 12, 2008Publication date: August 13, 2009Inventors: Steven Verhaverbeke, Nety M. Krishna, Omkaram Nalamasu, Mahalingam Venkatesan
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Publication number: 20090148764Abstract: Concepts and methods are provided to reduce the cost and complexity of thin film battery (TFB) high volume manufacturing by eliminating and/or minimizing the use of conventional physical (shadow) masks. Laser scribing and other alternative physical maskless patterning techniques meet certain or all of the patterning requirements. In one embodiment, a method of manufacturing thin film batteries comprises providing a substrate, depositing layers corresponding to a thin film battery structure on the substrate, the layers including, in order of deposition, a cathode, an electrolyte and an anode, wherein at least one of the deposited layers is unpatterned by a physical mask during deposition, depositing a protective coating, and scribing the layers and the protective coating. Further, the edges of the layers may be covered by an encapsulation layer. Furthermore, the layers may be deposited on two substrates and then laminated to form the thin film battery.Type: ApplicationFiled: October 23, 2008Publication date: June 11, 2009Applicants: APPLIED MATERIALS, INC., MOTOROLA, INC.Inventors: Byung Sung Kwak, Nety M. Krishna, Kurt Eisenbelser, William J. Dauksher, Jon Candelaria
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Publication number: 20080135914Abstract: In one embodiment, a method for forming a metallic nanocrystalline material on a substrate is provided which includes exposing a substrate to a pretreatment process, forming a tunnel dielectric layer on the substrate, exposing the substrate to a post-treatment process, forming a metallic nanocrystalline layer on the tunnel dielectric layer, and forming a dielectric capping layer on the metallic nanocrystalline layer. The method further provides forming the metallic nanocrystalline layer having a nanocrystalline density of at least about 5×1012 cm?2, preferably, at least about 8×1012 cm?2. In one example, the metallic nanocrystalline layer contains platinum, ruthenium, or nickel. In another embodiment, a method for forming a multi-layered metallic nanocrystalline material on a substrate is provided which includes forming a plurality of bi-layers, wherein each bi-layer contains an intermediate dielectric layer deposited on a metallic nanocrystalline layer.Type: ApplicationFiled: June 29, 2007Publication date: June 12, 2008Inventors: Nety M. Krishna, Ralf Hofmann, Kaushal K. Singh, Karl J. Armstrong
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Publication number: 20080019806Abstract: A method and apparatus for a modular processing system is described. The apparatus includes a transfer chamber as the foundation for the system and includes sidewalls adapted to receive at least three 200 mm and/or 300 mm process chambers. The transfer chamber includes a robot capable of withstanding high temperatures and is configured to transfer 200 mm and 300 mm substrates. The modularity of the transfer chamber is highly transportable and provides a research and development platform at a low cost of ownership and may be modularly built into a production system as additional chambers and peripheral hardware is added.Type: ApplicationFiled: July 24, 2006Publication date: January 24, 2008Inventors: Nyi Oo Myo, Steven Poppe, Anthony White, Nety M. Krishna
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Publication number: 20040168705Abstract: A method for removing a reducible contaminant, such as an oxide or organic material, from a surface of a material layer comprises contacting an exposed dielectric layer with one or more suppressant species. The exposed dielectric layer and the material layer are contacted with the reducing species. Contacting the exposed dielectric layer with the suppressant species suppresses reactions between the exposed dielectric layer and the reducing species. Contacting the dielectric layer with the suppressant species may prevent the reducing gas from increasing the dielectric constant of the dielectric layer.Type: ApplicationFiled: March 4, 2004Publication date: September 2, 2004Applicant: Applied Materials, Inc.Inventors: Bingxi Sun, David M. Pung, Ashish Bodke, Nety M. Krishna
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Publication number: 20040018715Abstract: A method for removing a reducible contaminant, such as an oxide or organic material, from a surface of a material layer comprises contacting an exposed dielectric layer with one or more suppressant species. The exposed dielectric layer and the material layer are contacted with the reducing species. Contacting the exposed dielectric layer with the suppressant species suppresses reactions between the exposed dielectric layer and the reducing species. Contacting the dielectric layer with the suppressant species may prevent the reducing gas from increasing the dielectric constant of the dielectric layer.Type: ApplicationFiled: July 25, 2002Publication date: January 29, 2004Applicant: Applied Materials, Inc.Inventors: Bingxi Sun, David M. Pung, Ashish Bodke, Nety M. Krishna