Abstract: The present disclosure relates to beam writing technologies. In detail, a technique for compensating process artifacts of a mask layout transfer process is described. A method implementation of that technique comprises modeling, for a target mask layout, an intensity profile resulting from exposing a resist on a masking layer by beam writing. Further, a contour and a profile of the exposed resist after development are modeled from the intensity profile. Then, a geometry of the masking layer after etching is modeled from the resist contour and the resist profile. For any deviation of the modeled geometry from the target mask layout, an adjustment compensating the deviation can thus be determined.

Abstract: The present disclosure relates to beam writing technologies. In detail, a technique for compensating process artifacts of a mask layout transfer process is described. A method implementation of that technique comprises modeling, for a target mask layout, an intensity profile resulting from exposing a resist on a masking layer by beam writing. Further, a contour and a profile of the exposed resist after development are modeled from the intensity profile. Then, a geometry of the masking layer after etching is modeled from the resist contour and the resist profile. For any deviation of the modeled geometry from the target mask layout, an adjustment compensating the deviation can thus be determined.

Abstract: The comprises at least one sample receiving chamber for a sample liquid, and a distributor channel for sample liquid connected to said at least one sample receiving chamber, with at least one such distributor channel extending from each sample receiving chamber. The sample support further comprises at least one reaction chamber entered by an inflow channel branched off said at least one distributor channel, and a venting opening for each reaction chamber. Each distributor channel and each inflow channel are dimensioned to have the liquid transport through the distributor and inflow channels effected by capillary forces. In each reaction chamber, the entrance region of the inflow channel is provided with a means for generating a capillary force causing the sample liquid to flow from the inflow channel into the reaction chamber.

Abstract: The sample support comprises at least one sample receiving chamber for a sample liquid, and a distributor channel for sample liquid connected to said at least one sample receiving chamber, with at least one such distributor channel extending from each sample receiving chamber. The sample support further comprises at least one reaction chamber entered by an inflow channel branched off said at least one distributor channel, and a venting opening for each reaction chamber. Each distributor channel and each inflow channel are dimensioned to have the liquid transport through the distributor and inflow channels effected by capillary forces. In each reaction chamber, the entrance region of the inflow channel is provided with a means for generating a capillary force causing the sample liquid to flow from the inflow channel into the reaction chamber.

Abstract: The sample support comprises at least one sample receiving chamber for a sample liquid, and a distributor channel for sample liquid connected to said at least one sample receiving chamber, with at least one such distributor channel extending from each sample receiving chamber. The sample support further comprises at least one reaction chamber entered by an inflow channel branched off said at least one distributor channel, and a venting opening for each reaction chamber. Each distributor channel and each inflow channel are dimensioned to have the liquid transport through the distributor and inflow channels effected by capillary forces. In each reaction chamber, the entrance region of the inflow channel is provided with a means for generating a capillary force causing the sample liquid to flow from the inflow channel into the reaction chamber.

Abstract: A nozzle plate contains nozzles, liquid chambers and connection channels between liquid chambers and supply containers for the liquid. All the function regions are produced integrally as a microstructure body by casting from one or more microstructured mold inserts. The smallest implementable spacing of the nozzles from one another can be considerably smaller than in the previously known plates, which allows increased printing density.

Abstract: A nozzle plate contains nozzles, liquid chambers and connection channels between liquid chambers and supply containers for the liquid. All the function regions are produced integrally as a microstructure body by casting from one or more microstructured mold inserts. The smallest implementable spacing of the nozzles from one another can be considerably smaller than in the previously known plates, which allows increased printing density.

Abstract: Gases can be selectively detected by utilization of an infrared (IR) absorption photometer via their specific absorption in the IR range. Known instruments are generally rather expensive, are of considerable size, require careful treatment and as a rule can be operated by skilled personnel only. The microstructured IR absorption photometer of the present invention is developed for (quasi-) continuously controlling a gaseous stream, the photometer being a single-piece shaped part manufactured as a microstructured body. The photometer is compact and robust, suitable for portable instruments and can be manufactured at low cost and in large numbers. The photometer can be made of metal and can be used even at an increased temperature. A flashlight lamp serves as an IR radiation source and a lead selenide receiver as an IR radiation receiver. The pulse repetition frequency of the flashlight lamp is from 0.01 Hz to 10 Hz. The pulse interval preferably amounts to more than a thousand times the pulse duration.

Abstract: A nozzle plate contains nozzles, liquid chambers and connection channels between liquid chambers and supply containers for the liquid. All the function regions are produced integrally as a microstructure body by casting from one or more microstructured mold inserts. The smallest implementable spacing of the nozzles from one another can be considerably smaller than in the previously known plates, which allows increased printing density.

Abstract: Gases can be selectively detected by the utilization of a infrared spectrometer via their specific absorption in the infrared spectral range. The sensor of the present invention is developed for continuously controlling a gaseous stream or a space filled with gas with the sensor being a single-piece shaped part manufactured as a microstructured body. The space filled with gas to be tested is between a mirror grating and entrance and exit slits for IR-radiation. The sensor is compact and robust, suitable for portable instruments, and can be manufactured at low cost and in large numbers. The sensor can also be made of metal and can be used even at an increased temperature. By using the sensor of the present invention, the safety of systems in which flammable, toxic or other gases are contained or may occur can be considerably increased in an economic manner.