Abstract: A microphone module includes a first MEMS microphone and a second MEMS microphone, wherein the first MEMS microphone includes a first modulator, and wherein the second MEMS microphone includes a second modulator. For the purpose of noise reduction, a defined offset can be applied to an input of the first modulator or of the second modulator. Alternatively, for the purpose of noise reduction, the first modulator and the second modulator can be operated with different modulation frequencies.

Abstract: A MEMS assembly includes a housing having an internal volume V, wherein the housing has a sound opening to the internal volume V, a MEMS component in the housing adjacent to the sound opening, and a layer element arranged at least regionally at a surface region of the housing that faces the internal volume V, wherein the layer element includes a layer material having a lower thermal conductivity and a higher heat capacity than the housing material of the housing that adjoins the layer element.

Abstract: A Micro-Electro-Mechanical System (MEMS) circuit and a method for reconstructing an interference variable are provided. The MEMS circuit includes a MEMS device configured to generate a MEMS signal; a control circuit configured to detect a switched-on state or switched-off state of at least one device and configured to generate a control signal at least partly depending on the switched-on state or the switched-off state; a reconstruction filter configured to determine an interference signal that is partly generated by the at least one device, using the generated control signal; and a subtractor configured to subtract the determined interference signal from the MEMS signal.