Patents by Inventor Nicholas Andros

Nicholas Andros has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of manufacturing polishing substrates
    Patent number: 6699920
    Abstract: A method of manufacturing a polishing substrate is disclosed. The method includes disposing into a mold a reaction mixture of dibasic acid and a hydroxylated polymer, and applying a pressure and a temperature to the reaction mixture that are sufficient to cause polymerization and substrate formation in the mold. The dibasic acid is preferably adipic acid. Before pressure and temperature are applied to the reaction mixture, the reaction mixture is capable of being fortified with a polishing agent and/or a filler for controlling modulus and/or the coefficient of expansion.
    Type: Grant
    Filed: February 13, 2002
    Date of Patent: March 2, 2004
    Inventor: Nicholas Andros
  • Surface charge controlling apparatus for wafer cleaning
    Patent number: 6523210
    Abstract: An apparatus for performing a wafer cleaning method includes providing a plurality of sponge portions mounted on a common body for movement relative to a surface of a wafer to be cleaned, each sponge portion defining a sponge surface positioned to contact the surface of the wafer. A cleaning fluid flow is directed through each of the sponge portions perpendicular to the sponge surface and onto the surface of the wafer to generate a streaming potential across each of the sponge portions. The fluid pressure and pH of the cleaning fluid are adjusted until electrical charges on the sponge portions, the wafer, and contaminant particles on the surface of the wafer are all the same electrical sign.
    Type: Grant
    Filed: April 5, 2000
    Date of Patent: February 25, 2003
    Inventor: Nicholas Andros
  • Charged ion cleaning devices and cleaning system
    Patent number: 6489394
    Abstract: A differential physical chemical cleaning system including a plurality of charged cleaning devices for engaging a surface to be cleaned and a fluid delivery system for delivering precipitating agents to the surface to be cleaned and the plurality of cleaning devices.
    Type: Grant
    Filed: December 29, 1999
    Date of Patent: December 3, 2002
    Inventor: Nicholas Andros
  • Method for cleaning a surface by using a cationic sponge material
    Patent number: 6033486
    Abstract: A method of cleaning a surface including the steps of providing a cationic sponge material containing cationic radicals. Exposing particles and charges carried by the surface to be cleaned to the cationic radicals. Attracting and retaining particles and charges on the surface to be cleaned to the cationic radicals.
    Type: Grant
    Filed: August 19, 1998
    Date of Patent: March 7, 2000
    Inventor: Nicholas Andros
  • Charged ion cleaning devices and cleaning system
    Patent number: 5844030
    Abstract: A differential physical chemical cleaning system including a plurality of charged cleaning devices for engaging a surface to be cleaned and a fluid delivery system for delivering precipitating agents to the surface to be cleaned and the plurality of cleaning devices.
    Type: Grant
    Filed: July 9, 1996
    Date of Patent: December 1, 1998
    Inventor: Nicholas Andros
  • Sponge cleaning pad
    Patent number: 5311634
    Abstract: Disc shaped cleaning pads for use on cleaning apparatus, consisting of a supporting core to which a sponge is affixed. The sponge is a microporous material made from a hydroxylated polymer, the physical properties of which can be modified in the chemical growing process.
    Type: Grant
    Filed: February 3, 1993
    Date of Patent: May 17, 1994
    Inventor: Nicholas Andros