Abstract: Aspects of the present invention relate to a vacuum pressure gauge for measuring a vacuum pressure in a vacuum system component. The vacuum pressure gauge has a base for mounting the vacuum pressure gauge to the vacuum system component. A vacuum pressure sensor is fastened to the base. A control unit is provided to control the vacuum pressure sensor. A power supply unit is provided for supplying power to the vacuum pressure sensor. The power supply unit and the vacuum pressure sensor have complementary electrical connectors for connecting the power supply unit to the vacuum pressure sensor. The power supply unit is removably mounted to the vacuum pressure sensor.

Abstract: The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element is enclosed within the wall between the outer and inner facing wall surfaces. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.

Abstract: The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element and a thermal equalisation element are in thermal communication with the body. The body is made of a material with a first thermal conductivity, and the thermal equalisation element is made of a material with a second thermal conductivity that is higher than the first thermal conductivity. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.

Abstract: The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element and a thermal equalisation element are in thermal communication with the body. The body is made of a material with a first thermal conductivity, and the thermal equalisation element is made of a material with a second thermal conductivity that is higher than the first thermal conductivity. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.

Abstract: The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element is enclosed within the wall between the outer and inner facing wall surfaces. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.

Abstract: A process equipment heating system has a group of electric heaters and a heater checking system. The heater checking system is configured to determine a resistance value R1 for the group of electric heaters, compare the resistance value R1 with a reference resistance value RR and judge a fault condition if the resistance value R1 differs from the reference resistance value RR by more than a predetermined amount.

Abstract: A process equipment heating system has a group of electric heaters and a heater checking system. The heater checking system is configured to determine a resistance value R1 for the group of electric heaters, compare the resistance value R1 with a reference resistance value RR and judge a fault condition if the resistance value R1 differs from the reference resistance value RR by more than a predetermined amount.