Patents by Inventor Nicholas E. Webb

Nicholas E. Webb has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon parts having reduced metallic impurity concentration for plasma reaction chambers
    Patent number: 7517803
    Abstract: Silicon parts of a semiconductor processing apparatus containing low levels of metal impurities that are highly mobile in silicon are provided. The silicon parts include, for example, rings, electrodes and electrode assemblies. The silicon parts can reduce metal contamination of wafers processed in plasma atmospheres.
    Type: Grant
    Filed: September 28, 2004
    Date of Patent: April 14, 2009
    Assignee: Lam Research Corporation
    Inventors: Daxing Ren, Jerome S. Hubacek, Nicholas E. Webb
  • Silicon parts having reduced metallic impurity concentration for plasma reaction chambers
    Patent number: 6846726
    Abstract: Silicon parts of a semiconductor processing apparatus containing low levels of metal impurities that are highly mobile in silicon are provided. The silicon parts include, for example, rings, electrodes and electrode assemblies. The silicon parts can reduce metal contamination of wafers processed in plasma atmospheres.
    Type: Grant
    Filed: September 20, 2002
    Date of Patent: January 25, 2005
    Assignee: Lam Research Corporation
    Inventors: Daxing Ren, Jerome S. Hubacek, Nicholas E. Webb
  • Silicon parts having reduced metallic impurity concentration for plasma reaction chambers
    Publication number: 20040161943
    Abstract: Silicon parts of a semiconductor processing apparatus containing low levels of metal impurities that are highly mobile in silicon are provided. The silicon parts include, for example, rings, electrodes and electrode assemblies. The silicon parts can reduce metal contamination of wafers processed in plasma atmospheres.
    Type: Application
    Filed: September 20, 2002
    Publication date: August 19, 2004
    Inventors: Daxing Ren, Jerome S. Hubacek, Nicholas E. Webb