Patents by Inventor Nicholas Economou

Nicholas Economou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reducing particle implantation
    Patent number: 8907277
    Abstract: Methods disclosed herein include: (a) forming a channel in a sample, the channel extending one micron or more along a direction oriented at an angle to a surface of the sample; (b) exposing a portion of the sample above the channel to a particle beam to cause particles to leave the surface of the sample; and (c) forming an image of the sample based on particles that leave the surface.
    Type: Grant
    Filed: February 13, 2009
    Date of Patent: December 9, 2014
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Rainer Knippelmeyer, Nicholas Economou, Mohan Ananth, Lewis A. Stern, Bill DiNatale, Lawrence Scipioni, John A. Notte, IV
  • REDUCING PARTICLE IMPLANTATION
    Publication number: 20110049364
    Abstract: Methods disclosed herein include: (a) forming a channel in a sample, the channel extending one micron or more along a direction oriented at an angle to a surface of the sample; (b) exposing a portion of the sample above the channel to a particle beam to cause particles to leave the surface of the sample; and (c) forming an image of the sample based on particles that leave the surface.
    Type: Application
    Filed: February 13, 2009
    Publication date: March 3, 2011
    Applicant: Carl Zeiss SMT Inc.
    Inventors: Rainer Knippelmeyer, Nicholas Economou, Mohan Ananth, Lewis A. Stern, Bill DiNatale, Lawrence Scipioni, John A. Notte, IV