Patents by Inventor Nicholas John CELESTE

Nicholas John CELESTE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MULTI-LOCATION GAS INJECTION TO IMPROVE UNIFORMITY IN RAPID ALTERNATING PROCESSES
    Publication number: 20220108875
    Abstract: A gas delivery system configured to provide deposition and etch gases to a processing chamber for a rapid alternating process includes a first valve arranged to provide deposition gas from a deposition gas manifold to a first zone of a gas distribution device via a first orifice and provide the deposition gas from the deposition gas manifold to a second zone of the gas distribution device via a second orifice having a diameters than the first orifice. A second valve is arranged to provide etch gas from the etch gas manifold to the first zone of the gas distribution device via a third orifice and provide the etch gas from the etch gas manifold to the second zone of the gas distribution device via a fourth orifice having a different diameter than the third orifice.
    Type: Application
    Filed: January 23, 2020
    Publication date: April 7, 2022
    Inventors: William THIE, Jisoo KIM, Alan J. MILLER, Lai WEl, Frank Y. LIN, Jun Hee Hee HAN, Jie LIU, Conan CHlANG, Michael John MARTIN, Nicholas John CELESTE