Abstract: An improved flow measurement device is provided in a flow path for direct measurement of flow. An internal heat source solves the problem of heat transfer in conventional mass flow meters. The heat transfer associated with the internal heater forms the basis of flow measurement, and improved accuracy is achieved. The flow measurement device advantageously eliminates the introduction of inaccuracies, bypass errors, or inaccurate assumptions that are inherent in a conventional bypass structure. The present measurement device eliminates the need for one or more bubblers and thus overcomes bubbler pressure sensitivity and the bubbler requirement for exact (and unstable) gas vapor saturation of conventional flow measurement. The flow measurement device works equally well with gases, liquids or mixtures of gases and liquids and provides greater control over flow rates with very high degree of precision.

Abstract: An improved flow measurement device is provided in a flow path for direct measurement of flow. An internal heat source solves the problem of heat transfer in conventional mass flow meters. The heat transfer associated with the internal heater forms the basis of flow measurement, and improved accuracy is achieved. The flow measurement device advantageously eliminates the introduction of inaccuracies, bypass errors, or inaccurate assumptions that are inherent in a conventional bypass structure. The present measurement device eliminates the need for one or more bubblers and thus overcomes bubbler pressure sensitivity and the bubbler requirement for exact (and unstable) gas vapor saturation of conventional flow measurement. The flow measurement device works equally well with gases, liquids or mixtures of gases and liquids and provides greater control over flow rates with very high degree of precision.

Abstract: A method of manufacturing an injector for chemical vapor deposition (CVD) processing is provided. The method comprises the steps of selecting an elongated member of solid material having first and second ends and a gas delivery surface. At least one elongated passage for receiving a gas is formed in the elongated member and extending between the ends. At least one elongated distribution channel is formed by wire electrode discharge machining (EDM) extending from the elongated passage to the gas delivery surface for providing gas to the gas delivery surface.

Abstract: A single body injector for delivering gases to a surface. The injector includes a single elongated block with one or more passages formed in the block and communicating with a gas delivery surface via thin channels which extend between the passages and the gas delivery surface. Metering tubes may be placed in the passages to control the profile of the gases delivered.

Abstract: An electrically insulating pipe coupling assembly for electrically isolating pipe sections to which an electric current is applied. The apparatus includes first and second extension members formed having an integral flange with a protruding annular sealing bead at one end and adapted for attachment to a section of pipe at the other end. An insulating sleeve having an insulating flange is mounted on the first extension member. A nonconductive spacer is positioned between the opposing integral flanges to receive the annular sealing beads, separating and electrically isolating the first and second extension members. A first coupling member is slidably mounted on the insulating sleeve, while a second coupling member is slidably mounted on the second extension member. The coupling members, when secured together, force the annular sealing beads into compressive contact with the nonconductive spacer.

Abstract: A conveyorized atmospheric pressure chemical vapor deposition apparatus having a heated muffle and a conveyor belt for conveying objects to be coated through said muffle. At least one chemical vapor deposition zone is provided in the muffle. An injector assembly is also provided for uniformly injecting first and second reactant gases in the deposition zone across the width of the conveyor belt and against the surfaces of the objects to be coated. The gases exit from slots connected to distribution plenums. Polished cooled surfaces are used on the injector assembly to minimize deposition of chemicals thereon.