Abstract: A class of electromechanical switch cell is disclosed that has improved switching speed and tolerance to array non-planarity, among other advantages. In one embodiment, the switch cell can include a movable foil that is anchored to the structure, but is not under tension in the unbiased state. In another embodiment, a flexible foil may be mechanically biased so that a portion of the foil is positioned proximate to a reference substrate.

Abstract: A class of electromechanical switch cell including an optical shutter mechanism suited for use as an optical light valve, light curtain, and/or other display applications, is disclosed. An optical shutter in accordance with embodiments of the present invention can include a first set of opaque elements on a substrate foil and a second set of opaque elements on an opposing surface of a moveable foil. By translating the moveable foil, the second set of opaque elements can be made to alternatively be in optical misalignment with the first set of opaque elements, in which case light may not pass through the cell, or in optical alignment with the first set, in which case light may pass through the cell.

Abstract: A low cost, scalable backplane for electrophoretic displays comprising a multi-membrane plastic array of micro electromechanical (MEM) switches. Each switch controls the state of a pixel in the electrophoretic display device.

Abstract: A robust microelectromechanical switch. In an illustrative embodiment, the switch is adapted for use in a display and includes a first flexible surface and a second surface. The second surface is angled relative to the first surface, forming a wedge the first surface and the second surface. A first terminal and a second terminal are positioned relative to the first flexible surface and the second surface so that selective flexing of the flexible surface electrically couples or uncouples the first terminal to the second terminal. In a more specific embodiment, the switch further includes a first mechanism for selectively applying an electrostatic force between the first flexible surface and the second surface. The first surface is positioned on a first elastic flexible layer, and the second surface is positioned on a second layer. The first mechanism includes a first actuator electrode that is coupled to the first surface, and a second actuator electrode that is coupled to the second surface.

Abstract: Display technology incorporating a mirror surfaces or combinations of lenses and mirror surfaces to create displays of improved qualities is disclosed.

Abstract: A flexible micro-electromechanical switch having a cantilevered platform for forming an electrical circuit. A latching mechanism maintains the platform in a biased position after the biasing voltage is removed. The flexible micro-electromechanical switch can be formed into large area arrays and used as the backplane of display devices.

Abstract: Micro-electromechanical devices having an improved flexible layer enable the use of material having a wider range of elastic modulus. The MEM devices include a substantially non-pliable layer and a substantially flexible layer both of which include electrodes that when energized will create electrostatic forces that attracts the flexible layer to the non-pliable layer. The flexible layer has perforations or apertures cut into the flexible layer of a MEMs device to alter operational properties such as electrostatic sensitivity, resonance frequency, rate of change of sensitivity above the resonance frequency, oscillating mass, panel stiffness and others parameters.

Abstract: The present invention relates to a printer system that incorporates an electrically addressable array of micro electro-mechanical switches of arbitrary width. In one embodiment, array of micro electro-mechanical switches of arbitrary width that comprises an electrostatic array used to attract fusible toner or electrically charged ink droplets from a hopper or ink jet assembly to a piece of paper or other printable substrate. The electrostatic array uses electrostatic latching to create the charged environment to allow the toner or ink to be attracted from the hopper or ink jet assembly toward the array. A piece of paper is interposed between the array and the hopper or ink jet assembly. Additional micro electro-mechanical switches control the release of the ink droplets from the ink jet assembly. The micro electro-mechanical switches each comprise a sealed cell that relies on pneumatic restoration forces to insure that switch contacts can be successfully broken as desired.

Abstract: A low cost, scalable backplane for black and white or color optical displays comprises a multi-membrane plastic structure on which is printed or deposited row and column drivers to form a matrix of micro electromechanical (MEM) switches. Each switch controls the state of a pixel in the optical display device. Critical to successful long-term operation, the backplane includes the controlled application of voltages to each switch so that the display functions correctly and display life is maximized. The MEM switches include a substantially non-pliable membrane and a substantially flexible membrane both of which include electrodes that when energized will create electrostatic forces that attracts the flexible membrane to the non-pliable membrane. The MEM switches are manufactured in an array with a pitch that provides a sufficient number of switches to drive an optical display device and each switch may be latched to eliminate the need to constantly refresh the device.

Abstract: The system and method performs optical proximity correction on an integrated circuit (IC) mask design by initially performing optical proximity correction on a library of cells that are used to create the IC. The pre-tested cells are imported onto a mask design. All cells are placed a minimum distance apart to ensure that no proximity effects will occur between elements fully integrated in different cells. An optical proximity correction technique is performed on the mask design by performing proximity correction only on those components, e.g., lines, that are not fully integrated within one cell.

Abstract: A contact (15) formed in accordance with the present invention includes rounded corners on the upper and lower surface and sloped walls in the dielectric material (10) in which the contact is formed. In one embodiment, a photolithographic mask is formed above the dielectric material (10) using photolithographic techniques well known in the art. Using reactive ion etching techniques, the contact is etched until a small portion of the dielectric material remains to be etched in the contact. The photolithographic mask is then removed. The contact is then completely etched using a reactive ion etching process. Using this technique, the contact formed has rounded upper edges.