Patents by Inventor Nicholas R. Tapias
Nicholas R. Tapias has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240105766Abstract: Methods, systems, and devices for single-crystal transistors for memory devices are described. In some examples, a cavity may be formed through at least a portion of one or more dielectric materials, which may be deposited above a deck of memory cells. The cavity may include a taper, such as a taper toward a point, or a taper having an included angle that is within a range, or a taper from a cross-sectional area to some fraction of the cross-sectional area, among other examples. A semiconductor material may be deposited in the cavity and above the one or more dielectric materials, and formed in a single crystalline arrangement based on heating and cooling the deposited semiconductor material. One or more portions of a transistor, such as a channel portion of a transistor, may be formed at least in part by doping the single crystalline arrangement of the semiconductor material.Type: ApplicationFiled: December 6, 2023Publication date: March 28, 2024Inventors: Fatma Arzum Simsek-Ege, Masihhur R. Laskar, Nicholas R. Tapias, Darwin Franseda Fan, Manuj Nahar
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Patent number: 11925014Abstract: A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.Type: GrantFiled: December 8, 2021Date of Patent: March 5, 2024Assignee: Micron Technology, Inc.Inventors: Song Guo, Sanh D. Tang, Shen Hu, Yan Li, Nicholas R. Tapias
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Patent number: 11862668Abstract: Methods, systems, and devices for single-crystal transistors for memory devices are described. In some examples, a cavity may be formed through at least a portion of one or more dielectric materials, which may be deposited above a deck of memory cells. The cavity may include a taper, such as a taper toward a point, or a taper having an included angle that is within a range, or a taper from a cross-sectional area to some fraction of the cross-sectional area, among other examples. A semiconductor material may be deposited in the cavity and above the one or more dielectric materials, and formed in a single crystalline arrangement based on heating and cooling the deposited semiconductor material. One or more portions of a transistor, such as a channel portion of a transistor, may be formed at least in part by doping the single crystalline arrangement of the semiconductor material.Type: GrantFiled: July 2, 2021Date of Patent: January 2, 2024Assignee: Micron Technology, Inc.Inventors: Fatma Arzum Simsek-Ege, Masihhur R. Laskar, Nicholas R. Tapias, Darwin Franseda Fan, Manuj Nahar
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Patent number: 11805645Abstract: Some embodiments include a structure having an opening extending into an integrated configuration. A first material is within the opening, and is configured to create an undulating topography relative to a sidewall of the opening. The undulating topography has a surface roughness characterized by a mean roughness parameter Rmean which is the mean peak-to-valley distance along the undulating topography. The Rmean is at least about 4 nm. A second material is within the opening and along at least a portion of the undulating topography. The first and second materials are compositionally different from one another. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: August 16, 2019Date of Patent: October 31, 2023Assignee: Micron Technology, Inc.Inventors: Nicholas R. Tapias, Andrew Li, Adam W. Saxler, Kunal Shrotri, Erik R. Byers, Matthew J. King, Diem Thy N. Tran, Wei Yeeng Ng, Anish A. Khandekar
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Patent number: 11581317Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: June 29, 2021Date of Patent: February 14, 2023Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Srinivas Pulugurtha, Richard J. Hill, Yunfei Gao, Nicholas R. Tapias, Litao Yang, Haitao Liu
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Publication number: 20230006034Abstract: Methods, systems, and devices for single-crystal transistors for memory devices are described. In some examples, a cavity may be formed through at least a portion of one or more dielectric materials, which may be deposited above a deck of memory cells. The cavity may include a taper, such as a taper toward a point, or a taper having an included angle that is within a range, or a taper from a cross-sectional area to some fraction of the cross-sectional area, among other examples. A semiconductor material may be deposited in the cavity and above the one or more dielectric materials, and formed in a single crystalline arrangement based on heating and cooling the deposited semiconductor material. One or more portions of a transistor, such as a channel portion of a transistor, may be formed at least in part by doping the single crystalline arrangement of the semiconductor material.Type: ApplicationFiled: July 2, 2021Publication date: January 5, 2023Inventors: Fatma Arzum Simsek-Ege, Masihhur R. Laskar, Nicholas R. Tapias, Darwin Franseda Fan
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Patent number: 11469103Abstract: Methods, apparatuses, and systems related to semiconductor structure formation are described. An example method includes forming an opening through silicon (Si) material, formed over a semiconductor substrate, to a first depth to form pillars of Si material. The example method further includes depositing an isolation material within the opening to fill the opening between the Si pillars. The example method further includes removing a portion of the isolation material from between the pillars to a second depth to create a second opening between the pillars and defining inner sidewalls between the pillars. The example method further includes depositing an enhancer material over a top surface of the pillars and along the inner sidewalls of the pillars down to a top portion of the isolation material.Type: GrantFiled: January 21, 2021Date of Patent: October 11, 2022Assignee: Micron Technology, Inc.Inventors: Nicholas R. Tapias, Sanjeev Sapra, Anish A. Khandekar, Shen Hu
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Publication number: 20220102351Abstract: A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.Type: ApplicationFiled: December 8, 2021Publication date: March 31, 2022Inventors: Song Guo, Sanh D. Tang, Shen Hu, Yan Li, Nicholas R. Tapias
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Patent number: 11201154Abstract: A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.Type: GrantFiled: December 27, 2019Date of Patent: December 14, 2021Assignee: Micron Technology, Inc.Inventors: Song Guo, Sanh D. Tang, Shen Hu, Yan Li, Nicholas R. Tapias
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Publication number: 20210327883Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: June 29, 2021Publication date: October 21, 2021Applicant: Micron Technology, Inc.Inventors: Sanh D. Tang, Srinivas Pulugurtha, Richard J. Hill, Yunfei Gao, Nicholas R. Tapias, Litao Yang, Haitao Liu
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Patent number: 11069687Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: March 5, 2020Date of Patent: July 20, 2021Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Srinivas Pulugurtha, Richard J. Hill, Yunfei Gao, Nicholas R. Tapias, Litao Yang, Haitao Liu
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Publication number: 20210202487Abstract: A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.Type: ApplicationFiled: December 27, 2019Publication date: July 1, 2021Inventors: Song Guo, Sanh D. Tang, Shen Hu, Yan Li, Nicholas R. Tapias
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Publication number: 20210143011Abstract: Methods, apparatuses, and systems related to semiconductor structure formation are described. An example method includes forming an opening through silicon (Si) material, formed over a semiconductor substrate, to a first depth to form pillars of Si material. The example method further includes depositing an isolation material within the opening to fill the opening between the Si pillars. The example method further includes removing a portion of the isolation material from between the pillars to a second depth to create a second opening between the pillars and defining inner sidewalls between the pillars. The example method further includes depositing an enhancer material over a top surface of the pillars and along the inner sidewalls of the pillars down to a top portion of the isolation material.Type: ApplicationFiled: January 21, 2021Publication date: May 13, 2021Inventors: Nicholas R. Tapias, Sanjeev Sapra, Anish A. Khandekar, Shen Hu
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Patent number: 10978295Abstract: Systems, apparatuses, and methods related to epitaxial growth on semiconductor structures are described. An apparatus may include a working surface of a substrate material and a storage node connected to an active area of an access device on the working surface. The apparatus may also include a material epitaxially grown over the storage node contact to enclose a non-solid space between the storage node contact and passing sense lines.Type: GrantFiled: June 19, 2019Date of Patent: April 13, 2021Assignee: Micron Technology, Inc.Inventors: Guangjun Yang, Nicholas R. Tapias
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Patent number: 10930499Abstract: Methods, apparatuses, and systems related to semiconductor structure formation are described. An example method includes forming an opening through silicon (Si) material, formed over a semiconductor substrate, to a first depth to form pillars of Si material. The example method further includes depositing an isolation material within the opening to fill the opening between the Si pillars. The example method further includes removing a portion of the isolation material from between the pillars to a second depth to create a second opening between the pillars and defining inner sidewalls between the pillars. The example method further includes depositing an enhancer material over a top surface of the pillars and along the inner sidewalls of the pillars down to a top portion of the isolation material.Type: GrantFiled: April 9, 2019Date of Patent: February 23, 2021Assignee: Micron Technology, Inc.Inventors: Nicholas R. Tapias, Sanjeev Sapra, Anish A. Khandekar, Shen Hu
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Publication number: 20210050364Abstract: Some embodiments include a structure having an opening extending into an integrated configuration. A first material is within the opening, and is configured to create an undulating topography relative to a sidewall of the opening. The undulating topography has a surface roughness characterized by a mean roughness parameter Rmean which is the mean peak-to-valley distance along the undulating topography. The Rmean is at least about 4 nm. A second material is within the opening and along at least a portion of the undulating topography. The first and second materials are compositionally different from one another. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: August 16, 2019Publication date: February 18, 2021Applicant: Micro Technology, Inc.Inventors: Nicholas R. Tapias, Andrew Li, Adam W. Saxler, Kunal Shrotri, Erik R. Byers, Matthew J. King, Diem Thy N. Tran, Wei Yeeng Ng, Anish A. Khandekar
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Publication number: 20200402798Abstract: Systems, apparatuses, and methods related to epitaxial growth on semiconductor structures are described. An apparatus may include a working surface of a substrate material and a storage node connected to an active area of an access device on the working surface. The apparatus may also include a material epitaxially grown over the storage node contact to enclose a non-solid space between the storage node contact and passing sense lines.Type: ApplicationFiled: June 19, 2019Publication date: December 24, 2020Inventors: Guangjun Yang, Nicholas R. Tapias
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Publication number: 20200328080Abstract: Methods, apparatuses, and systems related to semiconductor structure formation are described. An example method includes forming an opening through silicon (Si) material, formed over a semiconductor substrate, to a first depth to form pillars of Si material. The example method further includes depositing an isolation material within the opening to fill the opening between the Si pillars. The example method further includes removing a portion of the isolation material from between the pillars to a second depth to create a second opening between the pillars and defining inner sidewalls between the pillars. The example method further includes depositing an enhancer material over a top surface of the pillars and along the inner sidewalls of the pillars down to a top portion of the isolation material.Type: ApplicationFiled: April 9, 2019Publication date: October 15, 2020Inventors: Nicholas R. Tapias, Sanjeev Sapra, Anish A. Khandekar, Shen Hu
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Publication number: 20200286895Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: March 5, 2020Publication date: September 10, 2020Applicant: Micron Technology, Inc.Inventors: Sanh D. Tang, Srinivas Pulugurtha, Richard J. Hill, Yunfei Gao, Nicholas R. Tapias, Litao Yang, Haitao Liu