Patents by Inventor Nicholas R. Tapias

Nicholas R. Tapias has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240105766
    Abstract: Methods, systems, and devices for single-crystal transistors for memory devices are described. In some examples, a cavity may be formed through at least a portion of one or more dielectric materials, which may be deposited above a deck of memory cells. The cavity may include a taper, such as a taper toward a point, or a taper having an included angle that is within a range, or a taper from a cross-sectional area to some fraction of the cross-sectional area, among other examples. A semiconductor material may be deposited in the cavity and above the one or more dielectric materials, and formed in a single crystalline arrangement based on heating and cooling the deposited semiconductor material. One or more portions of a transistor, such as a channel portion of a transistor, may be formed at least in part by doping the single crystalline arrangement of the semiconductor material.
    Type: Application
    Filed: December 6, 2023
    Publication date: March 28, 2024
    Inventors: Fatma Arzum Simsek-Ege, Masihhur R. Laskar, Nicholas R. Tapias, Darwin Franseda Fan, Manuj Nahar
  • Patent number: 11925014
    Abstract: A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.
    Type: Grant
    Filed: December 8, 2021
    Date of Patent: March 5, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Song Guo, Sanh D. Tang, Shen Hu, Yan Li, Nicholas R. Tapias
  • Patent number: 11862668
    Abstract: Methods, systems, and devices for single-crystal transistors for memory devices are described. In some examples, a cavity may be formed through at least a portion of one or more dielectric materials, which may be deposited above a deck of memory cells. The cavity may include a taper, such as a taper toward a point, or a taper having an included angle that is within a range, or a taper from a cross-sectional area to some fraction of the cross-sectional area, among other examples. A semiconductor material may be deposited in the cavity and above the one or more dielectric materials, and formed in a single crystalline arrangement based on heating and cooling the deposited semiconductor material. One or more portions of a transistor, such as a channel portion of a transistor, may be formed at least in part by doping the single crystalline arrangement of the semiconductor material.
    Type: Grant
    Filed: July 2, 2021
    Date of Patent: January 2, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Fatma Arzum Simsek-Ege, Masihhur R. Laskar, Nicholas R. Tapias, Darwin Franseda Fan, Manuj Nahar
  • Patent number: 11805645
    Abstract: Some embodiments include a structure having an opening extending into an integrated configuration. A first material is within the opening, and is configured to create an undulating topography relative to a sidewall of the opening. The undulating topography has a surface roughness characterized by a mean roughness parameter Rmean which is the mean peak-to-valley distance along the undulating topography. The Rmean is at least about 4 nm. A second material is within the opening and along at least a portion of the undulating topography. The first and second materials are compositionally different from one another. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: August 16, 2019
    Date of Patent: October 31, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Nicholas R. Tapias, Andrew Li, Adam W. Saxler, Kunal Shrotri, Erik R. Byers, Matthew J. King, Diem Thy N. Tran, Wei Yeeng Ng, Anish A. Khandekar
  • Patent number: 11581317
    Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: February 14, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Srinivas Pulugurtha, Richard J. Hill, Yunfei Gao, Nicholas R. Tapias, Litao Yang, Haitao Liu
  • Publication number: 20230006034
    Abstract: Methods, systems, and devices for single-crystal transistors for memory devices are described. In some examples, a cavity may be formed through at least a portion of one or more dielectric materials, which may be deposited above a deck of memory cells. The cavity may include a taper, such as a taper toward a point, or a taper having an included angle that is within a range, or a taper from a cross-sectional area to some fraction of the cross-sectional area, among other examples. A semiconductor material may be deposited in the cavity and above the one or more dielectric materials, and formed in a single crystalline arrangement based on heating and cooling the deposited semiconductor material. One or more portions of a transistor, such as a channel portion of a transistor, may be formed at least in part by doping the single crystalline arrangement of the semiconductor material.
    Type: Application
    Filed: July 2, 2021
    Publication date: January 5, 2023
    Inventors: Fatma Arzum Simsek-Ege, Masihhur R. Laskar, Nicholas R. Tapias, Darwin Franseda Fan
  • Patent number: 11469103
    Abstract: Methods, apparatuses, and systems related to semiconductor structure formation are described. An example method includes forming an opening through silicon (Si) material, formed over a semiconductor substrate, to a first depth to form pillars of Si material. The example method further includes depositing an isolation material within the opening to fill the opening between the Si pillars. The example method further includes removing a portion of the isolation material from between the pillars to a second depth to create a second opening between the pillars and defining inner sidewalls between the pillars. The example method further includes depositing an enhancer material over a top surface of the pillars and along the inner sidewalls of the pillars down to a top portion of the isolation material.
    Type: Grant
    Filed: January 21, 2021
    Date of Patent: October 11, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Nicholas R. Tapias, Sanjeev Sapra, Anish A. Khandekar, Shen Hu
  • Publication number: 20220102351
    Abstract: A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.
    Type: Application
    Filed: December 8, 2021
    Publication date: March 31, 2022
    Inventors: Song Guo, Sanh D. Tang, Shen Hu, Yan Li, Nicholas R. Tapias
  • Patent number: 11201154
    Abstract: A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: December 14, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Song Guo, Sanh D. Tang, Shen Hu, Yan Li, Nicholas R. Tapias
  • Publication number: 20210327883
    Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: June 29, 2021
    Publication date: October 21, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Srinivas Pulugurtha, Richard J. Hill, Yunfei Gao, Nicholas R. Tapias, Litao Yang, Haitao Liu
  • Patent number: 11069687
    Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: March 5, 2020
    Date of Patent: July 20, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Srinivas Pulugurtha, Richard J. Hill, Yunfei Gao, Nicholas R. Tapias, Litao Yang, Haitao Liu
  • Publication number: 20210202487
    Abstract: A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.
    Type: Application
    Filed: December 27, 2019
    Publication date: July 1, 2021
    Inventors: Song Guo, Sanh D. Tang, Shen Hu, Yan Li, Nicholas R. Tapias
  • Publication number: 20210143011
    Abstract: Methods, apparatuses, and systems related to semiconductor structure formation are described. An example method includes forming an opening through silicon (Si) material, formed over a semiconductor substrate, to a first depth to form pillars of Si material. The example method further includes depositing an isolation material within the opening to fill the opening between the Si pillars. The example method further includes removing a portion of the isolation material from between the pillars to a second depth to create a second opening between the pillars and defining inner sidewalls between the pillars. The example method further includes depositing an enhancer material over a top surface of the pillars and along the inner sidewalls of the pillars down to a top portion of the isolation material.
    Type: Application
    Filed: January 21, 2021
    Publication date: May 13, 2021
    Inventors: Nicholas R. Tapias, Sanjeev Sapra, Anish A. Khandekar, Shen Hu
  • Patent number: 10978295
    Abstract: Systems, apparatuses, and methods related to epitaxial growth on semiconductor structures are described. An apparatus may include a working surface of a substrate material and a storage node connected to an active area of an access device on the working surface. The apparatus may also include a material epitaxially grown over the storage node contact to enclose a non-solid space between the storage node contact and passing sense lines.
    Type: Grant
    Filed: June 19, 2019
    Date of Patent: April 13, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Guangjun Yang, Nicholas R. Tapias
  • Patent number: 10930499
    Abstract: Methods, apparatuses, and systems related to semiconductor structure formation are described. An example method includes forming an opening through silicon (Si) material, formed over a semiconductor substrate, to a first depth to form pillars of Si material. The example method further includes depositing an isolation material within the opening to fill the opening between the Si pillars. The example method further includes removing a portion of the isolation material from between the pillars to a second depth to create a second opening between the pillars and defining inner sidewalls between the pillars. The example method further includes depositing an enhancer material over a top surface of the pillars and along the inner sidewalls of the pillars down to a top portion of the isolation material.
    Type: Grant
    Filed: April 9, 2019
    Date of Patent: February 23, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Nicholas R. Tapias, Sanjeev Sapra, Anish A. Khandekar, Shen Hu
  • Publication number: 20210050364
    Abstract: Some embodiments include a structure having an opening extending into an integrated configuration. A first material is within the opening, and is configured to create an undulating topography relative to a sidewall of the opening. The undulating topography has a surface roughness characterized by a mean roughness parameter Rmean which is the mean peak-to-valley distance along the undulating topography. The Rmean is at least about 4 nm. A second material is within the opening and along at least a portion of the undulating topography. The first and second materials are compositionally different from one another. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: August 16, 2019
    Publication date: February 18, 2021
    Applicant: Micro Technology, Inc.
    Inventors: Nicholas R. Tapias, Andrew Li, Adam W. Saxler, Kunal Shrotri, Erik R. Byers, Matthew J. King, Diem Thy N. Tran, Wei Yeeng Ng, Anish A. Khandekar
  • Publication number: 20200402798
    Abstract: Systems, apparatuses, and methods related to epitaxial growth on semiconductor structures are described. An apparatus may include a working surface of a substrate material and a storage node connected to an active area of an access device on the working surface. The apparatus may also include a material epitaxially grown over the storage node contact to enclose a non-solid space between the storage node contact and passing sense lines.
    Type: Application
    Filed: June 19, 2019
    Publication date: December 24, 2020
    Inventors: Guangjun Yang, Nicholas R. Tapias
  • Publication number: 20200328080
    Abstract: Methods, apparatuses, and systems related to semiconductor structure formation are described. An example method includes forming an opening through silicon (Si) material, formed over a semiconductor substrate, to a first depth to form pillars of Si material. The example method further includes depositing an isolation material within the opening to fill the opening between the Si pillars. The example method further includes removing a portion of the isolation material from between the pillars to a second depth to create a second opening between the pillars and defining inner sidewalls between the pillars. The example method further includes depositing an enhancer material over a top surface of the pillars and along the inner sidewalls of the pillars down to a top portion of the isolation material.
    Type: Application
    Filed: April 9, 2019
    Publication date: October 15, 2020
    Inventors: Nicholas R. Tapias, Sanjeev Sapra, Anish A. Khandekar, Shen Hu
  • Publication number: 20200286895
    Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: March 5, 2020
    Publication date: September 10, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Srinivas Pulugurtha, Richard J. Hill, Yunfei Gao, Nicholas R. Tapias, Litao Yang, Haitao Liu