Patents by Inventor Nicholas Stephen APONE

Nicholas Stephen APONE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and illumination uniformity correction system
    Patent number: 11656555
    Abstract: An illumination adjustment apparatus, to adjust a cross slot illumination of a beam in a lithographic apparatus, includes a plurality of fingers to adjust the cross slot illumination to conform to a selected intensity profile. Each finger has a distal edge that includes at least two segments. The two segments form an indentation of the distal edge.
    Type: Grant
    Filed: April 14, 2020
    Date of Patent: May 23, 2023
    Assignees: ASML HOLDING N.V., ASML NETHERLANDS B V
    Inventors: Janardan Nath, Kalyan Kumar Mankala, Todd R. Downey, Joseph Harry Lyons, Ozer Unluhisarcikli, Alexander Harris Ledbetter, Nicholas Stephen Apone, Tian Gang
  • LITHOGRAPHIC APPARATUS AND ILLUMINATION UNIFORMITY CORRECTION SYSTEM
    Publication number: 20220214622
    Abstract: An illumination adjustment apparatus, to adjust a cross slot illumination of a beam in a lithographic apparatus, includes a plurality of fingers to adjust the cross slot illumination to conform to a selected intensity profile. Each finger has a distal edge that includes at least two segments. The two segments form an indentation of the distal edge.
    Type: Application
    Filed: April 14, 2020
    Publication date: July 7, 2022
    Applicants: ASML HOLDING N.V., ASML NETHERLANDS B.V.
    Inventors: Janardan NATH, Kalyan Kumar MANKALA, Todd R. DOWNEY, Joseph Harry LYONS, Ozer UNLUHISARCIKLI, Alexander Harris LEDBETTER, Nicholas Stephen APONE, Tian GANG