Patents by Inventor Nick J. Osborne

Nick J. Osborne has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for improved thin dielectric films
    Publication number: 20030104707
    Abstract: A method of depositing dielectric films such as silicon nitride, oxide, oxynitride, and multilayer films on the surface of a substrate is provided. The method comprises providing a substrate in a hot-wall rapid thermal processing chamber, and using a silicon precursor to form a dielectric film on the substrate.
    Type: Application
    Filed: March 25, 2002
    Publication date: June 5, 2003
    Inventors: Yoshihide Senzaki, Robert B. Herring, Aubrey L. Helms, Nick J. Osborne