Abstract: Techniques are provided to form semiconductor devices that include forksheet transistors with a self-aligned dielectric spine and nanosheets with a wrapped-around gate dielectric. The dielectric spine may be formed prior to the formation of gate structures. In an example, first and second semiconductor devices have first and second semiconductor regions, respectively, extending in a first direction. The first and second semiconductor regions may include any number of nanosheets. A dielectric spine extends in the first direction centrally aligned between the first and second semiconductor regions. The gate dielectric of the gate structures on either side of the dielectric spine is wrapped around the semiconductor regions, such that the gate dielectric is present between the nanosheets and the dielectric spine along the second direction.

Abstract: Integrated circuit structures having patterned nanowire thickness scaling are described. For example, a structure includes a first device of a device type including a first vertical arrangement of horizontal nanowires, and a first gate stack having a first conductive layer over a first gate dielectric layer. A second device of the device type includes a second vertical arrangement of horizontal nanowires laterally spaced apart from the first vertical arrangement of horizontal nanowires, and a second gate stack having a second conductive layer over a second gate dielectric layer. Each of the nanowires of the second vertical arrangement of nanowires has a vertical thickness less than a vertical thickness of each of the nanowires of the first vertical arrangement of horizontal nanowires. The nanowires of the second vertical arrangement of nanowires have a vertical spacing greater than a vertical spacing of the nanowires of the first vertical arrangement of horizontal nanowires.

Abstract: Techniques are provided herein to form semiconductor devices that include forksheet transistors with a self-aligned dielectric spine having an airgap. The airgap may constitute a majority of the total volume of the dielectric spine, this lowering the dielectric constant of the dielectric spine and decreasing parasitic capacitance. In an example, first and second semiconductor devices have first and second semiconductor regions, respectively, extending in a first direction between corresponding source and drain regions. The first and second semiconductor regions may include any number of nanosheets. A dielectric spine extends in the first direction between the first and second semiconductor regions. The dielectric spine includes a dielectric liner adjacent to the sides of the first and second semiconductor regions. A remaining volume of the dielectric spine at least partially bound by the dielectric liner includes an airgap. A dielectric cap structure may be included over the airgap.

Abstract: Techniques are provided to form an integrated circuit having different semiconductor devices with different backside contact structures. Field effect transistors (FETs) each includes semiconductor material extending in a first direction between source and drain regions, and gate structures extending in a second direction around the semiconductor material of each FET. Different contact structures are formed on the source or drain regions of the n-channel FETs compared to the p-channel FETs. A backside contact structure on an n-channel source or drain region includes a first layer of phosphorous-doped titanium, a second layer that includes scandium, and a third layer that includes a metal, such as molybdenum. A backside contact structure on a p-channel source or drain region may include only a layer of metal, such as molybdenum, or the layer of metal and a layer of boron-doped titanium. The contact structures may be used to provide enhanced ohmic contact.

Abstract: Integrated circuit structures having uniform grid metal gate and trench contact cut in a forksheet transistor architecture are described. In an example, a structure includes a dielectric backbone. First and second vertical stacks of nanowires are laterally adjacent to and in contact with first and second sides, respectively, of the dielectric backbone. First and second gate electrodes are around the first and second vertical stacks of nanowires, respectively, and are in contact with the first and second sides of the dielectric backbone, respectively. A first dielectric cut plug structure is adjacent to and in contact with the first gate electrode. A second dielectric cut plug structure is adjacent to and in contact with the second gate electrode. The second dielectric cut plug structure is parallel with the first dielectric cut plug structure.

Abstract: Embodiments disclosed herein include forksheet transistor transistors with self-aligned fork-last backbones. In an example, an integrated circuit structure includes a dielectric backbone. A first vertical stack of nanowires is laterally adjacent to and in contact with a first side of the dielectric backbone. A first epitaxial source or drain structure is at an end of the first vertical stack of nanowires. A second vertical stack of nanowires is laterally adjacent to and in contact with a second side of the backbone, the second side laterally opposite the first side. A second epitaxial source or drain structure is at an end of the second vertical stack of nanowires, the second epitaxial source or drain structure laterally adjacent to but not merged with the first epitaxial source or drain structure.

Abstract: Techniques are provided to form semiconductor devices with different inner spacer widths and different nanoribbon (e.g., or nanowire, or nanosheet) thickness. In an example, any number of first semiconductor devices include first gate structures around first semiconductor regions and any number of second semiconductor devices include second gate structures around second semiconductor regions. First dielectric inner spacers are provided between the first gate structure and the corresponding source or drain regions of the first semiconductor devices with a first width and second dielectric inner spacers are provided between the second gate structure and the corresponding source or drain regions of the second semiconductor devices with a second width that is greater than the first width. In some such examples, the first semiconductor regions may be thinner compared to the second semiconductor regions to cause a corresponding increase in the threshold voltage of the first semiconductor devices.

Abstract: Disclosed herein are integrated circuit (IC) structures fabricated with techniques to reduce a gated subfin region in nanoribbon-based transistors. In one example, the technique involves depositing a film over the shallow trench insulator (STI) between adjacent subfins, where the film has a different material composition than the STI. In accordance with examples described herein, the film over the STI can protect the STI during various etch and clean processes to minimize unintentional recession of the STI and thus minimize the presence of gated subfins in the final IC structure. In some examples, the film may be present over the STI in the final IC structure in a plane with source or drain contact structures, and may also be present over the STI in a metal gate region.

Abstract: Fin trim plug structures for imparting channel stress are described. In an example, an integrated circuit structure includes a fin including silicon, the fin having a top and sidewalls. The fin has a trench separating a first fin portion and a second fin portion. A first gate structure including a gate electrode is over the top of and laterally adjacent to the sidewalls of the first fin portion. A second gate structure including a gate electrode is over the top of and laterally adjacent to the sidewalls of the second fin portion. An isolation structure is in the trench of the fin, the isolation structure between the first gate structure and the second gate structure. The isolation structure includes a first dielectric material laterally surrounding a recessed second dielectric material distinct from the first dielectric material, the recessed second dielectric material laterally surrounding an oxidation catalyst layer.

Abstract: Fabrication methods for integrated circuit (IC) structures and devices including asymmetric source and drain regions are described herein. In one example, an integrated circuit structure includes a transistor including a first region and a second region, where one of the first region and the second region is a source region of the transistor, and another of the first region and the second region is a drain region of the transistor, and where the first and second regions have different widths. In one example, the first region has a first width and the second region has a second width that is smaller than the first width.

Abstract: An integrated circuit structure includes laterally adjacent first and second devices. The first device includes (i) a first source or drain region having a first plurality of portions, (ii) a first plurality of bodies, each body of the first plurality of bodies laterally extending from a corresponding one of the first plurality of portions, and (iii) a first source or drain contact including a first conductive material and coupled to the first plurality of portions. The second device includes (i) a second source or drain region having a second plurality of portions, (ii) a second plurality of bodies, each body of the second plurality of bodies laterally extending from a corresponding one of the second plurality of portions, and (iii) a second source or drain contact coupled to the second plurality of portions and including a second conductive material elementally different from the first conductive material.

Abstract: Fin trim plug structures for imparting channel stress are described. In an example, an integrated circuit structure includes a fin including silicon, the fin having a top and sidewalls. The fin has a trench separating a first fin portion and a second fin portion. A first gate structure including a gate electrode is over the top of and laterally adjacent to the sidewalls of the first fin portion. A second gate structure including a gate electrode is over the top of and laterally adjacent to the sidewalls of the second fin portion. An isolation structure is in the trench of the fin, the isolation structure between the first gate structure and the second gate structure. The isolation structure includes a first dielectric material laterally surrounding a recessed second dielectric material distinct from the first dielectric material, the recessed second dielectric material laterally surrounding an oxidation catalyst layer.

Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.

Abstract: Fin trim plug structures for imparting channel stress are described. In an example, an integrated circuit structure includes a fin including silicon, the fin having a top and sidewalls. The fin has a trench separating a first fin portion and a second fin portion. A first gate structure including a gate electrode is over the top of and laterally adjacent to the sidewalls of the first fin portion. A second gate structure including a gate electrode is over the top of and laterally adjacent to the sidewalls of the second fin portion. An isolation structure is in the trench of the fin, the isolation structure between the first gate structure and the second gate structure. The isolation structure includes a first dielectric material laterally surrounding a recessed second dielectric material distinct from the first dielectric material, the recessed second dielectric material laterally surrounding an oxidation catalyst layer.

Abstract: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.

Abstract: A method for fabricating a semiconductor structure includes forming a plurality of semiconductor fins protruding through a trench isolation region above a substrate. A first gate structure is formed over a first of the plurality of semiconductor fins. A second gate structure is formed over a second of the plurality of semiconductor fins. A gate edge isolation structure is formed laterally between and in contact with the first gate structure and the second gate structure, the gate edge isolation structure on the trench isolation region and extending above an uppermost surface of the first gate structure and the second gate structure. A precision resistor is formed on the gate edge isolation structure, wherein the precision resistor and the first gate structure and second gate structure comprise a same material layer.

Abstract: Fin trim plug structures for imparting channel stress are described. In an example, an integrated circuit structure includes a fin including silicon, the fin having a top and sidewalls. The fin has a trench separating a first fin portion and a second fin portion. A first gate structure including a gate electrode is over the top of and laterally adjacent to the sidewalls of the first fin portion. A second gate structure including a gate electrode is over the top of and laterally adjacent to the sidewalls of the second fin portion. An isolation structure is in the trench of the fin, the isolation structure between the first gate structure and the second gate structure. The isolation structure includes a first dielectric material laterally surrounding a recessed second dielectric material distinct from the first dielectric material, the recessed second dielectric material laterally surrounding an oxidation catalyst layer.

Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.

Abstract: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.

Abstract: Unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, and methods of fabricating unidirectional self-aligned gate endcap (SAGE) architectures with gate-orthogonal walls, are described. In an example, integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin has a cut along a length of the second semiconductor fin. A gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. The gate endcap isolation structure has a substantially uniform width along the lengths of the first and second semiconductor fins.