Patents by Inventor Nick Snijders

Nick Snijders has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of loading a substrate on a substrate table and lithographic apparatus and device manufacturing method
    Patent number: 9122174
    Abstract: The invention relates to a method of loading a first object on a second object in a lithographic apparatus. The method includes: a) loading the first object on the second object, b) waiting a predetermined time interval and c) performing a relaxation action. The first object may be a substrate and the second object a substrate table. The first object may also be a substrate table and the second object a support structure, supporting the substrate table.
    Type: Grant
    Filed: October 11, 2012
    Date of Patent: September 1, 2015
    Assignee: ASML Netherlands B.V.
    Inventors: Jan-Jaap Kuit, Nick Snijders