Patents by Inventor Nico A. H. Verhaar

Nico A. H. Verhaar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Graphical representation of a wafer processing process
    Patent number: 6975921
    Abstract: A method for graphically representing the progress of wafers being processed in a plurality of process stations is disclosed. In one step, the start of a process performed on the wafers in one of the plurality of process stations is determined. Then, the generation of a first line segment parallel to a first axis is initiated. Next, the end of the process in one of the plurality of process stations is determined. Then the generation of the first line segment parallel to the first axis is terminated. The start of a transfer of the wafers from one of the plurality of process stations to another one of the plurality of process stations is detected in a next step. Then, the formation of a second line segment connected with the first line segment and substantially perpendicular to the first axis is initiated. The completion of the transfer of the wafers is then determined and the formation of the second line segment perpendicular to the first axis is terminated.
    Type: Grant
    Filed: November 9, 2001
    Date of Patent: December 13, 2005
    Assignee: ASM International NV
    Inventor: Nico A. H. Verhaar
  • Graphical representation of a wafer processing process
    Publication number: 20030090522
    Abstract: A method for graphically representing the progress of wafers being processed in a plurality of process stations is disclosed. In one step, the start of a process performed on the wafers in one of the plurality of process stations is determined. Then, the generation of a first line segment parallel to a first axis is initiated. Next, the end of the process in one of the plurality of process stations is determined. Then the generation of the first line segment parallel to the first axis is terminated. The start of a transfer of the wafers from one of the plurality of process stations to another one of the plurality of process stations is detected in a next step. Then, the formation of a second line segment connected with the first line segment and substantially perpendicular to the first axis is initiated. The completion of the transfer of the wafers is then determined and the formation of the second line segment perpendicular to the first axis is terminated.
    Type: Application
    Filed: November 9, 2001
    Publication date: May 15, 2003
    Applicant: ASM International NV
    Inventor: Nico A.H. Verhaar