Abstract: A cooling arrangement is described and includes a heat sink having a first thermal contact surface, an object having a second thermal contact surface and a resilient wall. The first thermal contact surface and the second thermal contact surface face each other and define a gap. The resilient wall is part of an enclosure that surrounds a space at least comprising the gap, and the cooling arrangement includes a facility to maintain a pressure difference between the space and an environment of the cooling arrangement. Additionally, a lithographic apparatus comprising such a cooling arrangement is described.

Abstract: A device for measuring the tack of materials, comprising a first cylinder (1) included in a fixed frame (2) and a second cylinder (3) included in a movable yoke (4), whose outer surfaces contact each other via a layer of the material to be tested for tack (8). The yoke (4) is connected with the frame (2) via a connecting element (5) movable about a center. A force sensor (6) is included between the yoke and the movable connecting element or between the frame and the movable connecting element. The output of the force sensor (6) is connected with processing means (7) for processing the measuring signal delivered by the force sensor into a material-specific tack value. In a first calibration step, the first cylinder is coupled with a static mass (11) via coupling means (10). A first correction value, based on the measuring signal delivered by the force sensor, is stored in the processing means.