Patents by Inventor Nico Kemper

Nico Kemper has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7692881
    Abstract: A structure for mounting an assembly of optical elements disposed within a housing, in particular of a projection lens assembly of a projection exposure system for manufacturing semiconductor elements includes a plurality of supporting elements, each respective one of which forms part of a respective one of a plurality of connections though which the housing of the assembly is connected to said supporting structure through which the weight of the assembly is transferred to the supporting structure in such a way that supporting forces generated by said supporting structure are taken up by pressure forces and shear forces which act on at least one of the supporting elements.
    Type: Grant
    Filed: February 22, 2005
    Date of Patent: April 6, 2010
    Assignees: Carl Zeiss SMT AG, ASML Netherlands B.V.
    Inventors: Yim-Bun Patrick Kwan, Bernhard Geuppert, Nico Kemper
  • Publication number: 20070165311
    Abstract: In a housing structure for mounting optical elements, in particular of a projection lens housing in a projection exposure system for manufacturing semiconductor elements, attachment locations, which have connecting parts, for connection to a supporting structure are provided on structural elements. Supporting elements, which are provided with mounting flanges for connection to the supporting structure, act on the structural elements in such a way that weight forces are taken up essentially by pressure forces and shear forces.
    Type: Application
    Filed: February 22, 2005
    Publication date: July 19, 2007
    Inventors: Yim-Bun Kwan, Bernhard Geuppert, Nico Kemper