Abstract: The joint between the projection system element and its support comprises an inorganic layer or a direct bond and is thus liquid tight, which can prevent deformation by an immersion liquid. The joint can be made either warm or cold. Solders, glue, and glue protection can all be used in the formation of this joint. In an embodiment, the elements and its support are made of quartz.

Abstract: The joint between the projection system element and its support comprises an inorganic layer or a direct bond and is thus liquid tight, which can prevent deformation by an immersion liquid. The joint can be made either warm or cold. Solders, glue, and glue protection can all be used in the formation of this joint. In an embodiment, the elements and its support are made of quartz.

Abstract: The joint between the projection system element and its support comprises an inorganic layer or a direct bond and is thus liquid tight, which can prevent deformation by an immersion liquid. The joint can be made either warm or cold. Solders, glue, and glue protection can all be used in the formation of this joint. In an embodiment, the elements and its support are made of quartz.

Abstract: The joint between the projection system element and its support comprises an inorganic layer or a direct bond and is thus liquid tight, which can prevent deformation by an immersion liquid. The joint can be made either warm or cold. Solders, glue, and glue protection can all be used in the formation of this joint. In an embodiment, the elements and its support are made of quartz.

Abstract: A method of manufacturing lens elements, in which a glass preform heated to the softening temperature and an annular metal holder (3) enclosing the glass preform are arranged between the heated moulding dies (7,9) of a mould and are moulded in a pressing step into a lens element comprising a glass lens (21) and a ring (3) enclosing the glass lens and acting as a fitting. During moulding, the ring 3 forms together with the two dies (7,9) a quasi closed moulding cavity having an annular gap (15). During moulding, the ring (3) is expanded radially and a quantity of glass is pressed.

Abstract: A method of manufacturing biconvex lens elements (21) comprising a biconvex glass lens (23) and a holder (1) consisting of two cylindrical rings (5,7), which are telescopically slidable with respect to each other and have different diameters so that an annular gap (9) is formed. A lens blank is heated together with the holder (1) in the telescopically extended position of the rings (5,7) to the processing temperature of the glass and is arranged between the heated dies (17, 19) of a mould, whereupon the dies (17, 19) are moved towards each other in a pressing stroke, the two rings (5,7) being telescoped into each other, the lens blank in the holder being moulded into a biconvex glass lens (23) and the excess quantity of glass being pressed from the hotter central part of the lens blank into the annular gap (9). The lens element (21) obtained after cooling is characterized by a biconvex glass lens (23), which is FIG. 7.