Patents by Inventor Nicolaas Arnoldus Lammers

Nicolaas Arnoldus Lammers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 9563137
    Abstract: A lithographic projection apparatus includes a laser cleaning device. The laser cleaning device is constructed and arranged to clean a surface. The laser cleaning device includes a laser source constructed and arranged to generate radiation, and an optical element constructed and arranged to focus the radiation in a focal point in order to generate a cleaning plasma in a background gas above the surface. The laser cleaning device is further provided with a gas supply constructed and arranged to generate a jet of protection gas at a location near the plasma.
    Type: Grant
    Filed: May 20, 2010
    Date of Patent: February 7, 2017
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Nicolaas Arnoldus Lammers, Luigi Scaccabarozzi
  • LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20120086929
    Abstract: A lithographic projection apparatus includes a laser cleaning device. The laser cleaning device is constructed and arranged to clean a surface. The laser cleaning device includes a laser source constructed and arranged to generate radiation, and an optical element constructed and arranged to focus the radiation in a focal point in order to generate a cleaning plasma in a background gas above the surface. The laser cleaning device is further provided with a gas supply constructed and arranged to generate a jet of protection gas at a location near the plasma.
    Type: Application
    Filed: May 20, 2010
    Publication date: April 12, 2012
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Nicolaas Arnoldus Lammers, Luigi Scaccabarozzi