Patents by Inventor Nicolai Wengert

Nicolai Wengert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT
    Publication number: 20180024438
    Abstract: Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
    Type: Application
    Filed: July 10, 2017
    Publication date: January 25, 2018
    Inventors: Jens Kugler, Ulrich Weber, Nicolai Wengert
  • Support elements for an optical element
    Patent number: 9709895
    Abstract: Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
    Type: Grant
    Filed: March 16, 2015
    Date of Patent: July 18, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Jens Kugler, Ulrich Weber, Nicolai Wengert
  • SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT
    Publication number: 20150316853
    Abstract: Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
    Type: Application
    Filed: March 16, 2015
    Publication date: November 5, 2015
    Inventors: Jens Kugler, Ulrich Weber, Nicolai Wengert
  • Support elements for an optical element
    Patent number: 8988654
    Abstract: Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
    Type: Grant
    Filed: March 24, 2011
    Date of Patent: March 24, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Jens Kugler, Ulrich Weber, Nicolai Wengert
  • SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT
    Publication number: 20120067833
    Abstract: Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
    Type: Application
    Filed: March 24, 2011
    Publication date: March 22, 2012
    Applicant: CARL ZEISS SMT GMBH
    Inventors: Jens Kugler, Ulrich Weber, Nicolai Wengert